Model: 4000 (SV4000), Valve Manifold Stations: 5

Model: 4000 (SV4000), Valve Manifold Stations: 14

Model: 4000 (SV4000), Valve Manifold Stations: 12

Model: 4000 (SV4000), Valve Manifold Stations: 11

Model: 4000 (SV4000), Valve Manifold Stations: 10

Model: 4000 (SV4000), Valve Manifold Stations: 3

Model: 4000 (SV4000), Valve Manifold Stations: 4

Model: 4000 (SV4000), Valve Manifold Stations: 13

Model: 4000 (SV4000), Valve Manifold Stations: 15

Model: 4000 (SV4000), Valve Manifold Stations: 16

Model: 4000 (SV4000), Valve Manifold Stations: 20

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5

MU

3, contained in one kit, and can be ordered using the order number for each cylinder bore size. 2.4-3 Series MU Basic: MUB Rod end male thread MUB25 SMU25, #1 (#1+#11) MUB32 SMU32, #1 (#1+#11) MUB40 SMU40, #1 (#1+#11) MUB50 SMU50, #1 (#1+#11) MUB63 SMU63, #1 (#1+#11) (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUB25 MUB32 MUB40 MUB50

CXWM/CXWL

1 !2 !3 !4 !5 !6 !7 !8 !

EXxx-OMN0029CN

1 2 3 4 5 6 7 / byte1 Bit No. 0 1 2 Reserved 3 () 4 () 5 6 7 byte2 Bit No. 0 Reserved : : 7 Reserved byte3 Bit No. 1 0 1 1 2 2 2 3 4 SI 5 Reserved 6 Reserved 7 Reserved 1Bit0 1 ON 2Bit2 3 ON -63No.EX-OMN0029CN-D byte0 Bit No. 0 0 1 1 2 2 3 3 4 4 5 5 6 6 7 7 byte1 Bit No. 0 8 1 9 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved -64No.EX-OMN0029CN-D

IZN10_C

7 7 7-2. 2. 2. 2. 22 22 22 22 -2- 1. 1. 1. 1.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

5 6 7 8 9 1 1 2 3 4 5 6 7 8 9 Double Double Double Double Double Double Double SI unit SI unit Single Single Single Single Single Single Single Single Single Single Single SI unit output no.

HRL

Cooling capacity*2 kW 9 1*8 19 1*8 26 1*8 Heating capacity*3 kW 1.5 1 4.0 1 6.0 1 Temperature stability*4 C CH1: 0.1/CH2: 0.5 Rated flow (Outlet pressure) L/min 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum flow rate L/min 120 16 130 16 180 16 Maximum pump head m 50 49 55 49 68 49 Settable pressure range*5 MPa 0.10 to 0.50 0.10 to 0.49 0.10 to

25

7 units 6 units 7 units 8 units 8 units 4 units 5 units 5 units 4 units 6 units 6 units 7 units 7 units 3 units Wiring/Piping Connectable number of ionizers (IZS42) with transition wiring (without external sensor) Warning 1.

MLGP

Ball Bushing MLGPL20, 25 1 7 30mm stroke or less V = 200mm/s 1 8 Over 30mm stroke V = 200mm/s 5 5 25 25 Load weight m (kg) Load weight m (kg) 20 20 1 10 100 200 1 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 1 9 50mm stroke or less V = 200mm/s 20 Over 50mm stroke V = 200mm/s 200 200 100 100 100 100 100 80 80 80 63 63 63 50 40 50 50 40 Load weight m