HRX-OM-W060

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRL-A-20 (Air cooled type) . 2-2 2.3 Function of Parts . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1

VQ7-6/7-8

2 4 2 1 1 1 5 3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

VQ7-6/7-8

2 4 2 1 1 1 5 3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

VQ7-6/7-8

AXT512-13 O-ring NBR 2 AS568-022 O-ring NBR 1 AS568-020 O-ring NBR 2 AXT512-5 Gasket NBR 1 AXT512-4 Plate SPCC 1 M4X10 Oval countersunk head screw SWRH3 2 AXT512-6-1 Connection fitting A 2 AXT512-6-4 Connection fitting B 2 AXT512-6-3 Hexagon socket head screw 2 32 Manifold Specification Sheet Series VQ7-6 1.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No.

High Purity Chemical Valve

size LQ3 2 to 5 Plug 6 1/4" 6 1/4" 2 8 2 8 10 3/8" Base type 10 3/8" A Stacking type 10 3/8" Manifold stations 10 3/8" 3 12 1/2" 02 2 stations 3 12 1/2" 12 1/2" 05 5 stations 12 1/2" 4 LQ2 integral fitting 19, 3/4" 4 19, 3/4" 12 1/2" 12 1/2" 5 5 19, 3/4" 19, 3/4" How to Order Valve LVC 2 0 07 S A Option Body class LQ2 integral fitting Nil 1 4 None With flow rate adjustment With indicator

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

Table of Contents

Applicable shaft type: K (mm) L3 max X L1 max W1 (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = CRB2 50 50 1 to 6 Y 3 L2 2 L1 2 11.5 to 39.5 1 to 6 X 3 11.5 to 39.5 L4 = L2 = Y = 63 63 1 to 7.5 Y 3 L2 2 L1 2 12.5 to 45 1 to 7.5 X 3 12.5 to 45 CRBU2 80 80 1 to 8.5 Y 3 L2 2 L1 2 13.5 to 53.5 1 to 8.5 X 3 13.5 to 53.5 X = 100 100 1 to 12.5 Y

Dual Rod Cylinder Series CXSJ/CXS

0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

Direct Operated

/N.O. 1/8 to 1/2 2 to 10 10 to 50 N.C.

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

SZ3000

1 2 1 2 Note) The L1 to L4 dimensions for SS5Z3-60PD Dare the same as the SS5Z3-60PD Udimensions.

Vacuum Pad

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

Vacuum Pad

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

Vacuum Pad

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

Vacuum Pad

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

HRX-OM-Z002

for use . 1-6 1.5.2 Personal protective equipment . 1-6 1.6 EMERGENCY MEASURES . 1-7 1.7 WASTE DISPOSAL . 1-7 1.7.1 Disposal of refrigerant and compressor oil. 1-7 1.7.2 Disposal of the product . 1-7 1.8 SAFETY DATA SHEETSDS . 1-8 Chapter 2 Names and Functions of Parts . 2-1 2.1 NAME OF EACH PART . 2-1 2.1.1 HRLE050-A-20-(In case of Air-cooled refrigeration) . 2-1 2.1.2 HRLE050-W-20-(In

Thermo-chiller

Description Fluid contact material Qty. q DI filter cartridge (Part no.: HRR-DF001)1 PP , PE 1 w DI filter inlet fitting assembly Stainless steel, PA 1 e DI filter outlet fitting assembly Stainless steel, PA 1 r O-ring EPDM 2 t Clip 2 y Nipple (Size : 1 inchHRL-DI001) : 1/2 inchHRL-DI002) Stainless steel 2 (138) u Union (Size : 1 inchHRL-DI001) : 1/2 inchHRL-DI002) Stainless steel 1 i DI

Parallel Style Air Gripper Series MHZ

1/4 1 1/4 to 1 1/2 1 3/4 to 2 2 to 2 1/4 MHS MHC MHT MHY Impact load Clearance MHW -X 3.

24

1 pc. 5 *1 5 2 pcs. 10 *1 10 D-A9V 1 pc. 5 2 pcs. 10 D-Z7 D-Z80 1 pc. 5 *1 5 2 pcs. 10 D-Y59 D-Y7P 1 pc. 5 *1 5 2 pcs. 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc. 5 *2 2 pcs. 10 *2 D-Y7BA 1 pc. 5 *2 2 pcs. 10 *2 D-P3DWA 1 pc. 15 2 pcs. 15 D-P4DW 1 pc. 5 *2, 3 2 pcs.