Compressed Air Preparation Filter

42.5 Size 40 2 1/4, 3/8, 1/2 145.2 35.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 Size 50 2 3/4, 1 186.2 43 93.1 30 45 70 50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

For detailed specifications, refer to page 8-30-1.

S Couplers

KKA9S-10M -12M -14M KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check valve 1 1 1 1

SZ3000

L 20 46 (7.5) L 14 1 8 55 47.04 (35) (25) 5.5 Approx. 10 25 13 2-M2.6 x 0.45 Socket side Rail mounting hole pitch 12.5 Plug connector HDB-CTF Terminal No.

HRX-OM-Z002

high pressure switch (When AL65 occurred) . 7-6 7.4 OTHER ERRORS . 7-8 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 QUALITY CONTROL OF CIRCULATING FLUID AND FACILITY WATER . 8-1 8.2 INSPECTION AND CLEANING . 8-2 HRLE Series HRX-OM-Z002 Contents 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 3-month inspections . 8-4 8.2.4 6-month inspections . 8-5 8.2.5 Inspection during

NAAMS Standards Compliant

52 104 25 25 52 54 78 146.5 148.5 104.5 138 With front mounting hole Metal cover type NA0.05 NC NB0.05 Release point Y VC0.1 VB0.1 K +0.1 0 Metal cover open 2 x V H7 depth I 4 x NN depth S VA0.02 [mm] Bore size I K NA NB NC NN S V VA VB VC 50 12 55 13 36.5 9.5 M8 x 1.25 11 8 30 32 63.5 63 15 55 13 36.5 15 M8 x 1.25 13 8 30 32 63.5 4 CKZ3N -X2742A -X2568 Dimensions: With Manually Operated

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible The flow rate value and the device status can be figured out easily via the process data.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !

Ｍ icro Mist Separator Regulator

8, 1/4 1/8 40 100.6 71.8 21 M281 45 21 5 37.5 57.5 37.5 58.5 37.5 58.5 AWD30-D 1/4, 3/8 1/8 53 115.4 86.5 26.5 30 M381.5 50 26.5 3.5 37.5 63 37.5 64 37.5 64 AWD40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 75 35.5 0 42.5 73 42.5 73 42.5 73 Optional specifications Semi-standard specifications Metal bowl Metal bowl with level gauge PC/ PA bowl With auto drain Model Bracket mount Panel

Mist Separator Regulator

8, 1/4 1/8 40 100.6 71.8 21 M281 45 21 5 37.5 57.5 37.5 58.5 37.5 58.5 AWM30-D 1/4, 3/8 1/8 53 115.4 86.5 26.5 30 M381.5 50 26.5 3.5 37.5 63 37.5 64 37.5 64 AWM40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 75 35.5 0 42.5 73 42.5 73 42.5 73 Optional specifications Semi-standard specifications Metal bowl Metal bowl with level gauge PC/ PA bowl With auto drain Model Bracket mount Panel

ZP3

Form w 1 Material 8 N S U F GN GS 04 4 4.5 1.8 2.2 Y C ZP3 B 06 6 7 2 3 08 8 9 A B 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 4 to 8 w q ZP3 B T N 04 A5 e Connection thread (Male thread) M5 x 0.8 Width across flats 7 A5 M5 x 0.8 3 8 Model 13.5 Vacuum inlet

Parallel Style Air Gripper Series MHZ

1/4 1 1/4 to 1 1/2 1 3/4 to 2 2 to 2 1/4 MHS MHC MHT MHY Impact load Clearance MHW -X 3.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

8!1!7w !6ui e!5 CJ1 CJP CJ2 CM2 C85 !

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

H/DL/L/LL

(mm) Connection thread R Model Effective area (mm 2) Weight (g) A L2 M L1 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 Applicable tubing 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 12 10 14 35.8 37.5 36 9 21.8 34.9 36.9 31.9 16 14 17 12 1 4 3 8 1 4 L08-02 L08-03 L10-02 52 61 68 8 14 12 17 38 39.7 40.7 19 23.3 35.9 37.9 36.9 16 14

Air Cylinder CP Series Cylinder Positioner Assembly

2.2A (53J 8 . 1 1 1206) 2.O5 l52l '11.2\2 6 0 (66J 8 4 3 (?

V

8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering

CLQ

(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 to 1000 to 1000 to 1000 208 228 254 39 42 52 9 Non-rotating Double

/

External Pilot Solenoid Type (Conduit terminal) A B C D E F G H I J K L M N O Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154