Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

6.8 6.8 6.8 30 28 28 25 227 199 186 186 55 40 40 40 75 55 55 55 51 42.5 34.5 14 12 10 M10 x 1.25 M14 x 1.5 7 56.2 Bore size Y X NN 264 232 219 215 P 181 159 146 146 S 10 8 8 8 Z ZZ Stroke range 1/8 1/8 1/8 1/4 23 20 20 20 27 25 25 21 40 32 25 20 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 200 to 1000 150 to 1000 150 to 700 150 to 700 866 Sine Cylinder 1011-REC 1011Rod flange (F): RECF 2 x P (Rc

Series HAW Water Cooled Aftercooler 1

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

PSE530/200

selection: 20 ms, 160 ms, 640 ms Anti-chattering function ZSP 0.1% F .S. or less Repeatability 0.5% F .S. 1 digit or less (at ambient temperature of 25 3C) Setting/Display accuracy ISA2 For measured value display: 4-digit, 7-segment indicator, Display color: Yellow Display IS For channel display: 1-digit, 7-segment indicator, Display color: Red Red (Lights up when output is ON.)

VXR21/22/23

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B 0 1/4, 3/8 30 21.3 1/8 9.8 34 53 43.9 44 71.9 64.5 5.4 28 15.4 27.5 55 M32 x 1.5 2.3 27.5 25.7 32.5 16 6 10-/21-AR30K-B 66.4 3.5 1/4, 3/8 24.8 41 1/8 10.5 40 53 44 45.8 85.6 6.5 30.7 8 29.4 53 M38 x 1.5 2.3 29.4 31.1 38.5 19 7 10-/21-AR40K-B 70.8

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Note 2) Refer to page 7 for further information of options.

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 4 2 . 1 ) 5 . 1 3 ( 7 3 6 1 . 1 ) 5 . 9 2 ( 8 3 . 1 ) 5 3 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 2 3 8 / 3 S 6 3 1 1 T R K 4 2 . 1 ) 5 . 1 3 ( 4 4 . 1 ) 5 . 6 3 ( 1 4 8 / 3 2 / 1 S 7 3 1 1 T R K 7/8 ) 3 2 . 2 2 ( 0 4 . 1 ) 5 . 5 3 (

5 Port Solenoid Valve

(Not applicable to Gateway Unit) Connector type manifold Connector Wiring Diagram (Mixed wiring) 6 A 4 A 3 A 1 A 5 B 2 B Output The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 6 7 8 9 10 All kits use multi-pin connectors

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

ZP

flats 7 Hexagon width across flats 7 Hexagon width across flats 7 Flat with ribs Flat with ribs Applicable Tubing Flat/Flat with Ribs Flat/Flat with Ribs G: M5 x 0.8 Y G: M6 x 1 G: M6 x 1 Y Applicable tube O.

HRX-OM-Y098

3 months. 7-4 7.3 Operation Stop for an Extended Period of Time . 7-5 7.3.1 Discharge of the circulating fluid . 7-5 7.4 Replacement of consumables . 7-8 7.4.1 Replacing Particle Filters . 7-8 7.4.2 Replacing the DI filter . 7-8 7.4.3 Consumables . 7-11 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRL100/200/300-A-20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication

HRX-OM-R016

Instructions for Use . 1-5 1.5.2 Personal Protective Equipment . 1-6 1.6 Emergency Measures. 1-7 1.7 Waste disposal . 1-8 1.7.1 Disposal of refrigerant and compressor oil. 1-8 1.7.2 Disposal of product . 1-8 1.8 Material Safety Data Sheet (MSDS) . 1-8 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.3 Function of Parts . 2

DOC1001322

to 3 .5-55 Setting of contact output signal 4 to 6 .5-55 5.4.10 Temperature waveform screen.5-59 Chapter 6 Alarm Notifications and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Operation of this product when an alarm occurs . 6-1 6.3 Troubleshooting . 6-2 6.3.1 Alarm contents, causes, and troubleshooting . 6-2 6.4 Other Errors . 6-5 Chapter 7 Control, Inspection and Cleaning . 7-

LJ1H

B A C D 7 8 Standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Motor Output Ground Ball Screw 100W 15mm/10mm lead Horizontal Mount How to Order Stroke LJ1H202 PA 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 F R L T B 2 3 4 5 Axial Right Left Top Bottom 2m 3m 4m 5m Axial entry

S Couplers

-04M-1) 8 8 KKA6 Series (KKA6P-04M-1+KKA6S-04M) Flow rate m3/min (ANR) Flow rate m3/min (ANR) 7 7 KKA4 Series (KKA4P-02M-1+KKA4S-02M-1) 6 6 KKA4 Series 5 5 (KKA4P-02M-1+KKA4S-02M) 4 4 3 3 2 2 1 1 KKA3 Series (KKA3P-01M-1+KKA3S-01M) KKA3 Series (KKA3P-01M-1+KKA3S-01M-1) 0 0 0 0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Pressure MPa Pressure MPa Pressure

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

Programless controller (with stroke study) Step motor (servo 24 VDC)

3 B 15m *1 4 Cable color Terminal Vcc B-4 no GND A-4 C 20m *1 Terminal no Brown 12 A B-5 12 Black 13 A A-5 13 Red 7 B B-6 *1) Produced upon receipt of order. 7 Block 6 B A-6 6 Only Robotic type cable can Orange 9 9 Black 8 signal Terminal no be selected. 8 3 Lock B-1 3 Lock A-1 Red 4 Sensor B-3 4 Black 5 Sensor A-3 5 Brown 1 Electric actuator side Controller side 1 Blue

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM