4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

2 RS 20 20 10 MI 10 10 5 4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type mass of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 to 5 V or 0 to 10 V can be selected.

Rotary Actuator

9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

Air Cylinder CP Series Cylinder Positioner Assembly

) 0.63 1 5 0 1 m 2.36 1.C16 1 . 1 0 M 1 8 x l 5 0 5 9 r r 6 ; o o ; ) (60) (38) l:27j (i2 + 0 070) (28) ( 1 5 ) 127) 0.71 +0003 M22xr.50.75 2.17 1 . 1 0 1.42 2 A O 1 itti (16 fO 070) (28l; l (55) (19) (28) l:371 (36) {71) (20+0.064) 0.

Table of Contents

VQ1 3 C6 Y 5 0 1 D-sub connector kit with 3 m cable VV5Q13-08FU2 1 set Manifold base no. VQ1130-5-C6 4 sets Valve part no. (Stations 1 to 4) VQ1230-5B-C64 sets Valve part no.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

SMC Basic Pneumatics

F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

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F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT

Thermo-chiller

1 m) Note 5) dB (A) 70 70 Waterproof specication IPX4 Accessories Alarm code list stickers 2 pcs.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction shows closed center type.)

HRS100/150

A 14/15 16/19 Rated power consumption 50/60 Hz Note 5) kW (kVA) 3.8/4.8 (4.9/5.3) 4.7/6.1 (5.6/6.7) Noise level (Front 1 m/Height 1 m) Note 5) dB (A) 70 70 Waterproof specification IPX4 Accessories Alarm code list stickers 2 pcs.

Direct Operated

AC/Class B coil (Built-in full-wave rectifier type) DC 1 5 G N 1 1 G N R VX02 VX02 Series Series Rated voltage Note) 1 2 3 1 2 3 VX31 VX32 VX33 VX31 VX32 VX33 1 2 3 4 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz Rated voltage Note) 5 6 24 VDC 12 VDC Note 1) Refer to Table (1) for available combinations.

Thermo-chiller

0 Union (Size: 1/2 inch) Stainless steel 1 (197) !1 DI sensor piping assembly Stainless steel 1 !2 Mounting bracket 1 !3 DI filter inlet hose PVC 1 !4 DI filter outlet hose PVC 1 !5 Hose clamp 4 !6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

base side B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) Z S M J H F Model MXPJ6-5 44 5 37 27 38 25 MXPJ6-10 59 10 47 42 53 35 8-8-14 14 Precision Air Slide Table Series MXP Dimensions: MXP6 Piping port 2-M3 x 0.5 (Plug: M-3P) AA 42 MX 7 4 H 2.3 11.2 3 MTS 1 MY 1 0.05 D B 9.5 3.5 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

High Purity Chemical Valve

size LQ3 2 to 5 Plug 6 1/4" 6 1/4" 2 8 2 8 10 3/8" Base type 10 3/8" A Stacking type 10 3/8" Manifold stations 10 3/8" 3 12 1/2" 02 2 stations 3 12 1/2" 12 1/2" 05 5 stations 12 1/2" 4 LQ2 integral fitting 19, 3/4" 4 19, 3/4" 12 1/2" 12 1/2" 5 5 19, 3/4" 19, 3/4" How to Order Valve LVC 2 0 07 S A Option Body class LQ2 integral fitting Nil 1 4 None With flow rate adjustment With indicator

4-channel Flow Monitor ( compatible)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.