VQ4000

thread Rc 1/4: Rc 1/4 thread 2 4 VQZ B A B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A B A 6 B A VQD 2 4 B A B A 5 D side B A 6.5 L1 2 4 B A B A 4 B A 2 4 Manual override B A B A 3 B A 4 2 B A A 2 A 4 2 B A A 1 SMC Indicator light A 2 4 R4.5 Stations 12 X 16.5 (External pilot port) Rc 1/8 9 9 106 10 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 SMC (Pilot EXH port) Rc 1/8 1 P 5 3 R2 R1 42 17.5

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch

SZ3000

Refer to page 1-7-4.)

Series VQ Base Mounted Metal Seal/Rubber Seal

1> 0 1 3 4 5 2 6 7 8 9 1 2 3 6 7 0 4 5 Sl unit output No. Sl unit output No.

Plug-in Unit

3(R) port 2-Rc 1/2 1(P) port 4-G 1/2 Conduit port VQC SMC SMC SMC SMC SMC SMC SMC SQ 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 VQ0 13 55.5 42.7 43.5 20.5 VQ4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 33.5 11.5 15.7 12 2-Rc 1/8 (Pilot exhaust port) VQ5 (6.5) 21.5 2-Rc 1/8 (External pilot port) 27 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Upstream pressure MPa 41 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 5 2 1 3 4 32.4 32.6 15 18 M12 SPEEDCON w 4 3 5 1 2 Plug connector pin assignment A-coded (Normal key) 4.2 M12 SPEEDCON M12 SPEEDCON 17 3 4 Socket connector pin assignment A-coded (Normal key) Wiring #7 PCA-1557798 Y connector (2 x M8-M12) Socket connector pin assignment 40.7 9.9 15.8 8.3 14.8 1 q 1 3 3 4 1 2 3 4 1 2 1 4 21.8 21.7 13 12 M8 4 3 w 1 3 3 4 Plug connector

CRB2/CRBU2/CRB1

Example 3 Example 4 The stopper ring is mounted on 120 clockwise from the standard position shown in Fig. 1-2 in Example 1, just as in Fig. 4-2 of Example 4.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3 (conforms to MIL-C-83503) 7.6 Connector case attachment lever (both sides) (3.2) 101.2

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

-3-A10 VS7-3-B04 VS7-3-B06 3/8 1/4 Piping specifications Symbol A02 A03 A04 A06 A10 B02 B03 B04 B06 Size 2 Size 3 Size 1 Horizontal 3/8 Side-ported 1/4 0.37 3/8 1/4 Side-ported 3/8 Bottom 3/8 Side-ported 1/2 3/8 Side-ported 3/4 0.68 1/2 Horizontal Side-ported 1 1.29 3/4 Bottom-ported 1/4 3/8 Bottom-ported 3/8 0.68 1/2 Bottom Bottom-ported 1/2 1.29 3/4 Bottom-ported 3/4 3/4 1/2 Thread

HRX-OM-W032

See Table 5.20-1 Default alarm settings and customizing (1/4) to (4/4) for more details of the default settings.

Secondary Batteries

(mm) 4 6 8 4 6 8 1(P) 1(P) 1(P): Male thread 2(A): One-touch fitting Applicable tubing O.D. (mm) 1 8 4 Port size R Connection thread R Applicable tubing O.D.

Integrated Controller

Wire color Signal 1 Brown C24V 2 White M24V 3 Blue 0V 4 Black LK RLS (45.8) L 35 5 45 PIN 2 PIN 1 (15) (29.1) Operation Data Setting Options Specific Product Precautions PIN 3 PIN 4 A end B end Part no.

Vacuum Unit

Port Size Ejector system Vacuum pump system Metric Inch Metric Inch PV 6 1/4" 6 1/4" V 6, 8 1/4", 5/16" 6, 8 1/4", 5/16" EXH (Port exhaust) 8 5/16" If the sound absorbing material is clogged, it will cause a reduction in the ejector performance.

CXWM/CXWL

1 !2 !3 !4 !5 !6 !7 !8 !