Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

manifold 10-SS5Z3-60PD2-05U-P 10-SS5Z3-60PD2-05U-P 1 set (Manifold part no.) 10-SZ3160-5LOZ-C6 2 sets (Single solenoid part no.) 10-SZ3260-5LOZ-C6 3 sets (Double solenoid part no.)

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

NCA1

1/4 2.625 3/8 1 1/4 3 3/16 5 7/8 3 1/4 8 5/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 8 7/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2

Air Cylinder NCA1 Series

12 2 1/4 2.625 3/8 1 1/4 3 3/16 5 7/8 3 1/4 8 5/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 8 7/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3

One-touch Fittings Series KQ2

13.7 15.4 14.29 7 20 3.5 10 11 20 12 21 4.4 12 22 35 16 24 36 31 29 38 64 34 43 69 10-32UNF 12.7 2.3 9.3 15.6 1 16 5 32 23 22 11.11 1 8 1 4 1 8 1 4 16 10.4 10 18 3 26 25 24 26 14.29 11.11 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 NPT 3 16 3.5 16.5 11.4 10 19.5 14.29 10-32UNF 2.3 18.1 13.6 12 16.1 7 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

Compact

Application Example Application Example Mounting direction w (to minimize the installation width) Mounting direction q (to minimize the installation height) LEF Workpiece Workpiece LEJ Guide Guide LEL Floating bracket LEMB series LEM LEM LEMB series Floating bracket Mounting Example Mounting Example LEY 55 40 55 24 Za1 Za2 1 1 1 1 1 1 1 1 LES 40 LEPY LEPS 45 80 92 112 90 Detail drawing of

Secondary Batteries

Symbol Nil Type Rc G*1 Port size F N Symbol Size 150C Applicable body size NPT 250C 350C 450C 550C *1 Conforms to ISO1179-1. 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 90-AMD650/850 AMD 650 10 90 Series compatible with secondary batteries Option Description IN-OUT reversal direction R Symbol Nil 90 Material restriction Body size 650 850 Accessory Symbol Description Bracket*1 Thread type Nil

Rotary Table/

3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 18 Series MSQ Dimensions/Size 70, 100, 200 WB effective depth

Slider Type Ball Screw Drive/11-LEFS Series

100 100 LEH LEY -X5 10 10 11LEFS 11LEFS Suction flow rate: 30 L/min Suction flow rate: 30 L/min 11LEJS 1 1 0 0.1 0.6 0.5 0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5

Solid State Auto Switches

Weight (g) Auto switch model Applicable bore size (mm) Weight D-G39C-4, K39C-4 40 50 63 80 100 162 D-G39C-5, K39C-5 166 D-G39C-6, K39C-6 184 D-G39C-8, K39C-8 210 D-G39C-10, K39C-10 232 Dimensions (mm) 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 4 x Z Hexagon socket head cap bolt G (PF) 1/2 (Applicable cable O.D. 6.8 to 9.6) Indicator light Most sensitive position Dimensions

MLGP

50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 1 1 50mm stroke or less V = 400mm/s 1 2 Over 50mm stroke V = 400mm/s 100 50 100 100 80 80 10 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 40 40 1 32 32 0.1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 7 Low Profile Guide Cylinder with Lock Series MLGP Vertical

MLGP

50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 1 1 50mm stroke or less V = 400mm/s 1 2 Over 50mm stroke V = 400mm/s 100 50 100 100 80 80 10 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 40 40 1 32 32 0.1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 7 Low Profile Guide Cylinder with Lock Series MLGP Vertical

Vacuum Unit

1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Series IDG

100HM 191 186 101 80 365 204 202 104 90 368 241 262 16 19 129 147 7 9 95 108 50 55 22 25 3/8, 1/2 1/2 27 Membrane Air Dryer Series IDG Dimensions (mm) 1in = 25.4mm IDG60LM, 75LM, 100LM IDG60SM, 75SM, 100SM Port size 3/8, 1/2 (250) 91 Purge air for dew point indicator 50 77 84 13 18 22 IN OUT 40 10 OUT 165 (B) 9 Drain Drain Purge air for dehumidification (Maintenance space 100mm or more)

VQ4000

thread Rc 1/4: Rc 1/4 thread 2 4 VQZ B A B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A B A 6 B A VQD 2 4 B A B A 5 D side B A 6.5 L1 2 4 B A B A 4 B A 2 4 Manual override B A B A 3 B A 4 2 B A A 2 A 4 2 B A A 1 SMC Indicator light A 2 4 R4.5 Stations 12 X 16.5 (External pilot port) Rc 1/8 9 9 106 10 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 SMC (Pilot EXH port) Rc 1/8 1 P 5 3 R2 R1 42 17.5

CXWM/CXWL

Note 1) Only type E (Reed switch) is applicable as an auto switch when mounting a housing of 10.

ZX

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch unit E C ZX1 1 10 Ejector unit Filter unit F ZX1 1 10 Ejector unit PV/V port size Ejector unit nozzle dia.

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580