JXCx-OMT0001CN

SFOD-OMT0011) 3.1 (JXC93*) 1 (1.5m) 1 2 2 DIN 1) 1 1) 1) DIN M5X8(4 ) M5X14(2 ) [] USB (:JXC-W1) (USB ) -10No.JXC-OMT0001CN-C 3.2 4.5 3.3 USB (No.SFOD-OMT0007) 3.4 2.3 6.2 7.

SZ3000

Refer to page 1-7-4.)

Vacuum Unit

digit Switch output Hysteresis Hysteresis mode Variable from 01 Window comparator mode Display type 3 1/2 digit, 7-segment LED, 1-color display (Red) Display accuracy 2% F.S. 1 digit (Ambient temperature at 25 3C) Indicator light Lights up when output is turned ON.

JXCx-OMT0028CN

LEC-CGD LEC-CGD N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 LEC CN4 LEC CN4 No. No.

VP300/500/700

Sub-plate gasket VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

MY1

MM M5 x 0.8 M6 x 1 M6 x 1 A 120 150 180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5

MU

3, contained in one kit, and can be ordered using the order number for each cylinder bore size. 2.4-3 Series MU Basic: MUB Rod end male thread MUB25 SMU25, #1 (#1+#11) MUB32 SMU32, #1 (#1+#11) MUB40 SMU40, #1 (#1+#11) MUB50 SMU50, #1 (#1+#11) MUB63 SMU63, #1 (#1+#11) (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUB25 MUB32 MUB40 MUB50

CXWM/CXWL

1 !2 !3 !4 !5 !6 !7 !8 !

EXxx-OMN0029CN

1 2 3 4 5 6 7 / byte1 Bit No. 0 1 2 Reserved 3 () 4 () 5 6 7 byte2 Bit No. 0 Reserved : : 7 Reserved byte3 Bit No. 1 0 1 1 2 2 2 3 4 SI 5 Reserved 6 Reserved 7 Reserved 1Bit0 1 ON 2Bit2 3 ON -63No.EX-OMN0029CN-D byte0 Bit No. 0 0 1 1 2 2 3 3 4 4 5 5 6 6 7 7 byte1 Bit No. 0 8 1 9 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved -64No.EX-OMN0029CN-D

IZN10_C

7 7 7-2. 2. 2. 2. 22 22 22 22 -2- 1. 1. 1. 1.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

5 6 7 8 9 1 1 2 3 4 5 6 7 8 9 Double Double Double Double Double Double Double SI unit SI unit Single Single Single Single Single Single Single Single Single Single Single SI unit output no.

HRL

Cooling capacity*2 kW 9 1*8 19 1*8 26 1*8 Heating capacity*3 kW 1.5 1 4.0 1 6.0 1 Temperature stability*4 C CH1: 0.1/CH2: 0.5 Rated flow (Outlet pressure) L/min 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum flow rate L/min 120 16 130 16 180 16 Maximum pump head m 50 49 55 49 68 49 Settable pressure range*5 MPa 0.10 to 0.50 0.10 to 0.49 0.10 to

25

7 units 6 units 7 units 8 units 8 units 4 units 5 units 5 units 4 units 6 units 6 units 7 units 7 units 3 units Wiring/Piping Connectable number of ionizers (IZS42) with transition wiring (without external sensor) Warning 1.

MLGP

Ball Bushing MLGPL20, 25 1 7 30mm stroke or less V = 200mm/s 1 8 Over 30mm stroke V = 200mm/s 5 5 25 25 Load weight m (kg) Load weight m (kg) 20 20 1 10 100 200 1 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 1 9 50mm stroke or less V = 200mm/s 20 Over 50mm stroke V = 200mm/s 200 200 100 100 100 100 100 80 80 80 63 63 63 50 40 50 50 40 Load weight m

MLGP

Ball Bushing MLGPL20, 25 1 7 30mm stroke or less V = 200mm/s 1 8 Over 30mm stroke V = 200mm/s 5 5 25 25 Load weight m (kg) Load weight m (kg) 20 20 1 10 100 200 1 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 1 9 50mm stroke or less V = 200mm/s 20 Over 50mm stroke V = 200mm/s 200 200 100 100 100 100 100 80 80 80 63 63 63 50 40 50 50 40 Load weight m

240

1 t !

LECP6_C

C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18

Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly