Compressed Air Preparation Filter

MPa 0.1 Nominal filtration rating*1 m 0.1 (99% filtered particle size) Oil mist concentration on the outlet side*2, *3 mg/m3 1 ( 0.8 ppm) or less Compressed air purity class*4 ISO 8573-1:2010 [ 2 : 7 : 3 ]*5 Max. flow capacity*6 L/min (ANR) 300 750 1500 2200 3700 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4, 1 1 Weight kg 0.19 0.39 0.79 1.23 1.46 Bowl material Polycarbonate Stainless

KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 K 10 10 19.5 22.8 12.8 10 D2 H Connection threads 8 15.2 18 26 21.5 26.3 12 M (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 H 17 20.9 12

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2 to 20 stations per 1 station: 18 SY 2 stations: 86 C4(4) C6(6) M5(M5 thread) VQZ2l20 VQZ2l21 addition Rc(PT) 1/8 Top VQZ2000 2 to 20 stations SYJ VV5QZ22lll per 1 station: 26 SX 2 stations: 181 C6(6) C8(8) C10(10) Rc(PT)1/4 VQZ3l20 VQZ3l21 addition Rc(PT) 1/4 Top VQZ3000 2 to 20 stations VK VV5QZ32lll per 1 station: 53 VZ VF VFR VP7 How to Order Manifold Assembly (Example) VP4 VQ VQZ21205MC6

Direct Operated

AC/Class B coil (Built-in full-wave rectifier type) DC 1 5 G N 1 1 G N R VX02 VX02 Series Series Rated voltage Note) 1 2 3 1 2 3 VX31 VX32 VX33 VX31 VX32 VX33 1 2 3 4 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz Rated voltage Note) 5 6 24 VDC 12 VDC Note 1) Refer to Table (1) for available combinations.

V

ZPT04U 4 4.8 1.6 3 6 5 8 0.8 D E E P T Y P E ZPT06U 6 7 2.5 3 6 5 8 0.8 Model A B C D E F G Y ZPT08U 8 9 2.5 3 6 5 8 1 ZPT10D 10 12 15 24 35.5 58.5 71.5 6 ZPT16D 16 18 16 25 36.5 59.5 72.5 7 Courtesy of Steven Engineering, Inc. !

MGC

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 Material Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Note Clear hard anodized Clear hard anodized Chromated No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

0 Magnet Rare earth @1 High carbon chrome bearing steel Steel balls !1 Magnet holder Steel Nickel plated @2 Electroless nickel plated Brass Plug !2 Replacement Parts: Seal Kit Contents Kit no. Bore size (mm) MXP6-PS 6 2 pieces each of no. !3 and !5 and 1 piece of no. !4 MXPJ6 No.

Rotary Actuator

9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

KG

(mm) Note) L P D Nylon Urethane 2-applicable tubing KGU04-01 KGU04-M5 4 11 20 12 11 21 34 M5 x 0.8 10.4 36 38 40 39.5 42 46 42.5 45.5 49 51 52.5 55.5 56.5 2.2 2.2 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 58.5 59 60.5 M5 x 0.8 13 1 8 1 4 3 8 1 8 17 12.8 12.8 6 13.4 10.6 14 17 25.6 17.7 15 23 35

Ｍ icro Mist Separator Regulator

Semi-standard: 6C Semi-standard: 6 Piping port thread ty pe Piping port thread ty pe (9) Part No. (9) Part No. Rc G Rc G AD27-6C-A AD27-6-A NPT AD27-6C(Z)-A NPT AD27-6(Z)-A C Note 1) Option symbol 2 Semi-standard symbol Semi-standard: 2 Piping port thread ty pe (9) Part No. Rc G NPT AD27-2(Z)-A AD27-2-A Appearance and part No. Note 1) Minimum operating pressure is 0.1 MPa.

Mist Separator Regulator

Semi-standard: 6C Semi-standard: 6 Piping port thread ty pe Piping port thread ty pe (9) Part No. (9) Part No. Rc G Rc G AD27-6C-A AD27-6-A NPT AD27-6C(Z)-A NPT AD27-6(Z)-A C Note 1) Option symbol 2 Semi-standard symbol Semi-standard: 2 Piping port thread ty pe (9) Part No. Rc G NPT AD27-2(Z)-A AD27-2-A Appearance and part No. Note 1) Minimum operating pressure is 0.1 MPa.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

4 @1 w !8 w !8 w @1 !4 !3 @1 !4 !3 !8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

VXF

Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

8, 1/4" 18 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 28 20 [mm] 28 20 Model A P Q PF2M705/710S-C4(-L) 87.1 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S -C6(-L) 87.9 2.8 depth 8.4 2.5 depth 6 8 8 PF2M725/750S-N7(-L) 95.5 2.8 depth 8.4 2.5 depth 6 PF2M711/721S-C8(-L) 96 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 2 x P Q 2 x P

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

6 6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.

Thermo-chiller

0 Union (Size: 1/2 inch) Stainless steel 1 (197) !1 DI sensor piping assembly Stainless steel 1 !2 Mounting bracket 1 !3 DI filter inlet hose PVC 1 !4 DI filter outlet hose PVC 1 !5 Hose clamp 4 !6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !