S Couplers Series KK/KK13

8 8.4 26.4 30.4 10 1/8 18.4 -02MS R 1/4 22.6 14.2 27.4 33.4 6 KK4P-01MS R 1/8 17 33 37 14 -02MS R 1/4 20.2 34.2 40.2 1/4 25.2 -03MS 9 R 3/8 50.9 32.5 35.7 42.2 17 -04MS R 1/2 57.4 38.2 46.2 22 KK6P-03MS 11 R 3/8 76.0 44.7 41.5 48 19 1/2 -04MS R 1/2 31 53.7 44 52 22 13 106.2 -06MS R 3/4 94.4 45.5 55 27 Reference dimension for R threads after installation.

Thermo-chiller/Rack Mount Type

-inch rack (EIA standards1). 1 19-inch Rack Standards Standard EIA (Electronic Industries Alliance) 500 mm Standard no.

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

PSxx-OMR0001CN

3 () 1 DC(+) 2 N.C. 3 DC(-) 4 OUT1 ZS-31-B() ZS-31-C() -35No.PS-OMR0001CN-J 3 ISA-19-() 4 1 3 2 ISA-19-2/3(5 ) ISA-19-4/5/6(8 ) M12 -36No.PS-OMR0001CN-J 3 () ISA3-N DC+ OUT1 N.C.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

27 COM3 18 COM3 18 N.C. 1 N.C. 1 8 8 COM3 19 COM3 19 N.C. 1 N.C. 1 COM3 38 COM3 38 28 28 COM4 20 COM4 20 N.C. 1 N.C. 1 9 9 COM4 39 COM4 39 N.C. 1 N.C. 1 29 29 COM4 40 COM4 40 1 Cannot be connected 1 Cannot be connected I/O 2 Input Signal I/O 2 Output Signal Name Details Name Details BUSY1 Busy signal for axis 1 +COM3 +COM4 Connects the power supply 24 V for input/output signal BUSY2 Busy

HRX-OM-X071

HRX-OM-X071 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS22l1FG-02-03(S)A 5/32" 8.2 AS22l1FG-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 18 (18) AS22l1FG-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 19 (20) AS32l1FG-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS32l1FG-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS32l1FG

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Mounting (Male thread) M5 x 0.8 Vacuum entry port Mounting Connection 20 M8 x 1 Female thread Male thread 10 to 16 24 M10 x 1 M8 x 1 20 to 32 10 to 16 55 M14 x 1 M10 x 1 M5 x 0.8 40, 50 20 to 32 Pad diameter (mm) M14 x 1 40, 50 Ball joint rotation 15 Pad Type Pad form Ball joint type Pad diameter (mm) 10, 13, 16, 20, 25, 32, 40, 50 Material Urethane rubber NBR Silicon rubber Fluoro rubber

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

M14 x 1 Width across flats 19 Width across flats 19 I I 5 5 J J Width across flats 12 Width across flats 12 Applicable tube O.D.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 1 station 2 stations 3 stations 4 stations 1 () SOL.A 14 () SOL.A 2 () 1 SOL.A 14 15 () 2 SOL.A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 5 stations 16 17 18 19 20 21 22 23 24 25 SOL.B 16 () SOL.A 4 () 6 stations SOL.B 17 () SOL.A 5 () 7 stations SOL.B 18 () SOL.A 6 () 8 stations SOL.B 19 () COM. 13 (+) Connector terminal no.

NCA1

5/8 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 9/16 5/16-24 2.5 1 1/4 0.3 3/8 1.26 1.06 7/16 5/16-18 7/8 1 1 15/16 1.71 3 5/8 2.4 2 1/4 4 3/4 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 9/16 5/16-24 3 1 1/2 0 3/8 1.3 1.06 19/32 3/8-16 1 1/4 1 1 15/16 1.75 3 3/4 2.48 2 3/8 4 7/8 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1 1/2 1/2 7/8 3/8-24 3.75 1 7/8 0 1/2 1.57 1.18 5/8 1/2-13 1 1/2 1 3/8 2 7/16 2.34 4

Intrinsically Safe Valve

2position 1 (P) port 1/4 N.C.

RSQ

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZF ZP SP ZCUK Add or deduct the mass shown in the table on the left for order materials.

AC Servo Motor Driver (CC-Link Type)

of point table No.19 Motor speed of point table Writes the motor speeds of point table No.1 to 255 to RAM.

Micro Mechanical Valve Series VM1000

EXH.2 93.7 (112.2) VHK CYL.2 CYL.1 12 18.5 18.5 VH 23 19 21 20 VHS 3 x 1 4 (SUP CYL port) 35 30.5 2 x 4.2 mounting hole 26.4 0.5 MPa supply VHS 2 x 1 8 (EXH port) T.T. 26 N F.O.F.

VQ5000

Hirose Electric Co., Ltd. 2-M2.6 x 0.45 55 Socket side 1425 113 Terminal no. 47.04 How to Order Manifold F 03 U VV5Q 5 1 1 Option 08 Symbol Series Option Nil CD1 CD2 CU1 CU2 K (3) SB SD SU None Cable (Length) 5 VQ5000 Exhaust cleaner for Rc 1: D side exhaust 0 1 2 3 Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Exhaust cleaner for Rc 1 1/2: D side exhaust Manifold Exhaust

AC Servo Motor Driver (Pulse input type)

Regenerative error (Note 1) (Note 1) (Note 1) Alarms AL.31 1 0 1 Overspeed AL.32 1 0 0 Overcurrent AL.33 0 0 1 Overvoltage AL.35 1 0 1 Command pulse frequency alarm AL.37 0 0 0 Parameter error AL.45 0 1 1 Main circuit device overheat (Note 1) (Note 1) (Note 1) AL.46 0 1 1 Servo motor overheat (Note 1) (Note 1) (Note 1) AL.47 0 1 1 Cooling fan alarm AL.50 0 1 1 Overload 1 (Note 1) (Note 1)

Ionizer

Bar length (mm) IZS31-E3 IZS31-E3 IZS31-E4 IZS31-E5 1 300 30 1 380 1 1 620 80 1 1 780 L 1 3 1100 3 1 1260 2 2 1500 Part no L 5 1 1900 IZS31-E3 IZS31-E4 IZS31-E5 200 4 2 2300 280 360 The model number requires the suffix -X14 to indicate that the body is to be shipped fitted with a security cover. IZS31 Standard part no.

10

A B C +0.025 3H9 0 depth 3 2 x 5.5 through (Body mounting hole) 2 4 3 42 1 Dimensions of auto switch mounting groove (Enlarged view) 4 x M5 x 0.8 thread depth 10 (Mounting thread) +0.052 23H9 0 depth 1.5 4 +0.025 3H9 0 depth 3 M5 x 0.8 (Finger opening port) 4 x M6 x 1 (Piston rod and rack screw) Auto switch mounting groove (4 locations)1 M5 x 0.8 (Finger closing port) H 55 22.6 6.5 0.5 10