Large Type Vacuum Unit Series ZR

vacuum switch specifications (D1, D2, D3) 1.3mm 13 Symbol Lead wire length 1.5mm 15 Applicable switch Output specifications 25 (L) Lead wire length 0.6 (3.0) m 1.8mm NPN output 18 D1 D2 26 (L) Lead wire length 0.6 (3.0) m Analog output 2.0mm 20 65 (L) Lead wire length 0.6 (3.0) m PNP output 27 (L) Lead wire length 0.6 (3.0) m NPN output D3 26 (L) Lead wire length 0.6 (3.0) m Analog output 67

mlu

85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Operation y [Specify Step No.1 to input the DRIVE signal.] 100 602 Step Motor Controller (CC-Link Direct Input Type) LECPMJ Series Dimensions 4.5 For body mounting (Screw mounting type) 32.5 35 67 (11.5) 1.2 84.2 64.2 35 187.3 (When locking DIN rail) 193.2 (When removing DIN rail) 152.5 170 161 Mountable on DIN rail (35 mm) (77) 17.5 4.5 For body mounting (Screw mounting type) L DIN rail

LG1H

Not required. m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 58 for deflection data. 48 Standard Motor/Horizontal Mount Specification Series LG1H21 With Coupling Dimensions/LG1H21PA 110 4 x M6 x 1 thread depth 10 67 20 0.02 4 x M8 x 1.25 thread depth 10 8H10 depth 10 8H10 depth 8 160 (123.5) Stroke + 180 (table movement range) 82.5 10 107 95 Work piece mounting reference plane 55 Body

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

LVD20 LVD30 LVD40 LVD50 LVC20 LVC30 LVC40 LVC50 A 54.5 79.5 82 105.5 54.5 79 96 129 B 114 67 83 93 79 106 131 154 Integral tubing (construction) 493 Guide ring Eliminates lateral motion of the poppet which reduces internal leakage. Piston damper Absorbs piston momentum to minimize impact-induced particle generation.

JA/JAH/JB/JS

67 67 82.5 82.5 98.5 123 123 155 213 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 8 9 9 13 13 13 15 15 18 24 24 24 42 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5

Floating Joint

67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 13 17 17 22 22 22 27 27 32 41 41 41 55 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03

Compact Hydraulic Cylinder

Related Products DDimensions B + Stroke A + Stroke (mm) A 55 to 100 mm strokes B 55 to 100 mm strokes Bore size (mm) 32 40 50 63 80 100 65 67 76 80 89 95 73.5 75.5 87 91 100 107 Dimensions other than the above are the same as the standard double acting single rod type.

Cylinder

o Cylinder Theoretical Force Weight (gO The weight in parenthesisis IS with auto SWitch , , r Operating pressure(kgffcm') Bore size(mm)' Bore size T,y~e,ol mounti,ng Action (mm) 10 y 6 . 3 '>15 3 5 7 ;;V jE i , 44(51) 60(67) 99 (106) 5 IN 0.63 1.06-L2~ . -/---[-~ 6 50(61) 66(77) 10811 19) 10 OUT 0.85 ~.98 Series CJP 118(129) 15 Stroke 56(67~+ 73(84) [-'t-Id~K95 . 4.12 Nosemount lO ~ (mm

Pin Clamp Cylinders

14.8 149 14.9 150 15.0 Diamond type D11 11 15 15 -X 531 C(L)KQG32 Series Dimensions CKQGl32 (Clamping height LOW type) The figures below indicate the CKQGB32-lRCL-X2081. 49.5 50 250.1 Mounting surface 19.8 32.5 Mounting surface position 50 52 Port side A Mounting surface 27 D 12.5 (Cylinder stroke) 0 0.05 d 10 (Clamp stroke) Q Q SR Port side K B 120 C Mounting surface 8 to 10 26 12 48 67

SMC Pneumatic Clean Series

67 5 5 4.5 4.5 11 13 66 82 218 218 86 106 17.5 17.5 70.5 82.5 75.5 75.5 14 264 95 16 264 95 Other dimensions are the same as basic style.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

15

Allowable load mass on guides and moment Allowable moment [Nm] M1 1.3 2.6 8.6 17 30 67 96 Bore size (mm) Allowable load mass on guides m [kg] 6 10 15 20 25 32 40 M2 1.4 2.9 8.9 18 35 82 124 M3 1.3 2.6 8.6 17 30 67 96 9 15 35 60 104 195 244 The table above indicates the maximum performance of the guide, but does not show the actual allowable work load mass.

3 Port Solenoid Valve/

.: 6, 1/4" (With check valve) (External pilot port) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5 Applicable cable O.D. 3.5 to 7 2 x 6.2 (For mounting) G1/2 Channel 2 113.5 41.5 36 94.5 77.5 Channel 1 36 21 9.5 (88.9) 16 18 (14) (Max. 10) 224.2 117.3 27.2 (70.7) A 124.8 99 View A For M12 connector 36 18 e w Vent port (6.2) 1/2" [1(P) port] 40 r Pin number (22.9) (With check valve) q 88.9 80

1

55 55 102 57 71 XSA2-2V 56 XSA2-43S 64.5 31 3/8 XSA2-43V 67 22 25 11.5 5 10 78 67.5 54 61.5 67.5 59.5 61.5 XSA3-32S 63 31.5 40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting

Foot Pedal Type

MODEL VM2 SMC 54 71 177 152 Lock lever LOCK UNLOCK T.T. 2.5 (70) 30 18.5 11 B A XT34-60/67 2 x Rc1/8 (Port 2, 4) 38.2 26.2 2 x M5 x 0.8 (Port 3, 5) Rc1/8 (Port 1) 14-E624 0.2 32 A 2 x M5 x 0.8 (Port 3, 5) 39.2 33.2 27.2 XT34-60/67 2 x Rc1/8 (Port 2, 4) Rc1/8 (Port 1) 3 x 6.5 mounting hole 53 XT34-67 (Without lock) 159 3 x 6.5 mounting hole MODEL VM2 SMC 54 71 177 152 T.T. 2.5 (70) 30 18.5

Stability of suction position,

material N/U/CL S F ZP3E-YF40BMJB10 82.6 126.6 208 207 214 ZP3E-YF40BMJB30 107.6 151.6 224 223 230 ZP3E-YF40BMJB50 127.6 171.6 237 236 243 ZP3E-YF50BMJB ZP3E-YF63BMJB Width across flats 17 Bushing B A 8 8 50 Width across flats 14 Bushing Bushing B A 9 9 35 Width across flats 30 M22 x 1.5 Bushing Rc1/8 M18 x 1.5 Width across flats 27 D D M5 x 0.8/Effective thread depth 5 50 32 40 17 D D 67

ZP

(for Ball Spline) Buffer assembly model Applicable pad model Series ZP Page ZP02U ZP04U ZP06U ZP08U P. 77 ZP2B-T3S6 67 Series ZP2/ZP Adapter/Buffer Applicable Pad List Buffer Assembly Part No.

CRB2/CRBU2/CRB1

(mm) C2 F2 D1 G C3 A1 A2 B1 B2 B3 C1 D2 E1 E2 F1 R Model (size) CVRB1BW 50 CVRB1BW 63 CVRB1BW 80 CVRB1BW100 120 (136.5) 104 (120.5) 12 25 60 (61) 78 67 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 102 (136.5) 104 (120.5) 16 27.5 60 (61) 98 82 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 140 (155) 124 (139) 17 36 70 (71) 110 95 22 48 4 100 29 14 38 62 (63) 1/8 140 (155) 124 (139) 23.5 42.5 70 (71) 140 125

Table of Contents

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60