13

43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU 1 8 1 8 1 8 6/Rc 6/Rc 6/Rc Body ported type (Without silencer) 48 1.0 1.3 1.5 1.8 2.0 88 ZL 1 8 1 8 1 8 1 8 6/Rc 8/Rc 10/Rc 12/Rc 12/Rc 6/Rc 10/Rc 8/Rc 10/Rc 1 4 1 4 ZY 1 4 3 8 3 8 12/Rc 12/Rc Body ported type (Without silencer) 88 53 3 8 3 8 Supply

Air Cylinder CP Series Cylinder Positioner Assembly

14) (401 402 (1021 1.07 (73) 0.98 t25l 205 (52) t.55 (14) 0.83 121\ 1 4 3 t 1 1 ) M22x1 5 1.46 (37) 457 ( 1 1 6 1 1.73t 6 3 i16t 0.53 113.5) 2 5 6 t65l 8 0 3 1204\ 2.80 (71) 9.72 1247\ 2 5 6 t65l 0.49 '12.5\ 3 . 1 5 l80J 10.08 (256) l40l 457 a 1 t 6 ) 3.62 192) 0.98 /30) 2.05 (52) 0.55 (14) 0.83 t21) Ml2x1 75 1 4 3 ( 1 1 ) M26x1.5 1 5 7 (40) 4 9 6 (126) 1.69 i43l t.67 (1?

Table of Contents

") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3

Prevents Micro-Bubbles

PAX Metric 4, 6 6, 8, 10 10, 12 Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type PB Basic type N.C.

SMC Basic Pneumatics

F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT

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F 3 COMPRESSED AIR THEORY Units Pressur Prooerties of Gases lsothermic change (Boyle's Law) lsobaric change Charles Law Law of Gay Lussac lsochoric change Adiabatic (lsentropic) change Standard Volume Flow Bernoulli's Equation Air Humidity Relative humidity Pressur and Flow Use of the diagram: Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT

HRX-OM-Z002

Option . 6-1 6.1 OPTION LIST . 6-1 6.2 OPTION C [WITH INVERTER FOR COMPRESSOR] . 6-1 6.3 OPTION M [DEIONIZED WATER (PURE WATER) PIPING] . 6-1 6.4 OPTION P [WITH INVERTER FOR PUMP] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 ALARM NOTIFICATION . 7-1 7.2 ALARM SOUND STOP . 7-3 7.3 TROUBLESHOOTING . 7-4 7.3.1 Alarm details, causes, and troubleshooting . 7-4 7.3.2 How to

KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58

Series KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58

Series KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58

IDX-OM-W028

References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 2 6 3 External Dimensions . 6 3 6 4 Electrical Circuit . 6 4 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 6 Table of Contents 1 Air Dryer Table of Contents Chapter 7 Option Specification C 7 1 Specifications . 7 1 7 2 Precautions for the installation and handling of the product . 7 1 Chapter

High Purity Chemical Valve

Symbol Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8 Nil Variations N LVC20 LVC30 Model LVC40 LVC50 LVC60 Orifice diameter 4 8 10 16 22 Tubing O.D. Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 12, 19 19, 25 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Basic type N.C. PB PA PA N.O.

Compressed Air Preparation Filter

MPa 0.1 Nominal filtration rating*1 m 0.1 (99% filtered particle size) Oil mist concentration on the outlet side*2, *3 mg/m3 1 ( 0.8 ppm) or less Compressed air purity class*4 ISO 8573-1:2010 [ 2 : 7 : 3 ]*5 Max. flow capacity*6 L/min (ANR) 300 750 1500 2200 3700 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4, 1 1 Weight kg 0.19 0.39 0.79 1.23 1.46 Bowl material Polycarbonate Stainless

KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 K 10 10 19.5 22.8 12.8 10 D2 H Connection threads 8 15.2 18 26 21.5 26.3 12 M (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 H 17 20.9 12

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2 to 20 stations per 1 station: 18 SY 2 stations: 86 C4(4) C6(6) M5(M5 thread) VQZ2l20 VQZ2l21 addition Rc(PT) 1/8 Top VQZ2000 2 to 20 stations SYJ VV5QZ22lll per 1 station: 26 SX 2 stations: 181 C6(6) C8(8) C10(10) Rc(PT)1/4 VQZ3l20 VQZ3l21 addition Rc(PT) 1/4 Top VQZ3000 2 to 20 stations VK VV5QZ32lll per 1 station: 53 VZ VF VFR VP7 How to Order Manifold Assembly (Example) VP4 VQ VQZ21205MC6

Direct Operated

AC/Class B coil (Built-in full-wave rectifier type) DC 1 5 G N 1 1 G N R VX02 VX02 Series Series Rated voltage Note) 1 2 3 1 2 3 VX31 VX32 VX33 VX31 VX32 VX33 1 2 3 4 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz Rated voltage Note) 5 6 24 VDC 12 VDC Note 1) Refer to Table (1) for available combinations.

V

ZPT04U 4 4.8 1.6 3 6 5 8 0.8 D E E P T Y P E ZPT06U 6 7 2.5 3 6 5 8 0.8 Model A B C D E F G Y ZPT08U 8 9 2.5 3 6 5 8 1 ZPT10D 10 12 15 24 35.5 58.5 71.5 6 ZPT16D 16 18 16 25 36.5 59.5 72.5 7 Courtesy of Steven Engineering, Inc. !

MGC

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 Material Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Note Clear hard anodized Clear hard anodized Chromated No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

0 Magnet Rare earth @1 High carbon chrome bearing steel Steel balls !1 Magnet holder Steel Nickel plated @2 Electroless nickel plated Brass Plug !2 Replacement Parts: Seal Kit Contents Kit no. Bore size (mm) MXP6-PS 6 2 pieces each of no. !3 and !5 and 1 piece of no. !4 MXPJ6 No.

Rotary Actuator

9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.