High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

DOC1001322

Circulating fluid flow rate Circulating fluid flow rate . 5-12 Circulating fluid discharge pressure Press PV . 5-12 Compressor circuit High pressure side High Press. . 5-12 Compressor circuit Low pressure side Low Press. 5-13 Circulating fluid electrical conductivity DI PV . 5-13 Key lock condition display KEYLOCK . 5-13 Startup operation status display START UP . 5-14 Anti-freezing status

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

•

B ZZ -t2 xstrokes.1 12 + 2X!

CG1

14 16 18 Bore (mm) ZZ GB S HH GA PD HD (17.5) (11.5) 20 25 32 40 50 63 20 25 32 40 50 63 70 70 72 80 95 95 (19.5) (11.5) 1 12 12 12 12 13 13 10 (12) 24.2 6 6 6 8 10 10 107 13 13 13 16 20 20 0.25 stroke (22.5) 1.25 2 3 10 (12) 26.7 112 (13) 10 (12) 30.2 114 (13) (25) 10 (12) 13 13 34.6 132 (13) (25) 11.5 14.5 40.6 155 47.1 155 The minimum stroke for rod boot equipped style is

Compact Cylinder with Lock Series CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

SMC Pneumatic Clean Series

42 S 9.5 9.5 7 T 3 20.5 20.5 24.5 5 5 12 28 28 28 17 17 20 16 10 6 15 15 15 18.3 15 15 18.3 12 20 14 5 4 8 8 8 55 54 57.5 83 82 85.5 5 5 M10 x 1.0 M4 x 0.7 M5 x 0.8 M12 x 1.0 With air cushion With air cushion type is not available for 21/ 22CJ2.

3 Port Solenoid Valve Series SYJ300/500/700

For sub-plate style, manifold type 41, S41, 42, S42, 42R, S42R (With gasket and screws) Body option Nil: Individual pilot exhaust style Electrical entry Manual override 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Nil: Non-locking push type Grommet L plug connector M plug connector M8 connector R port P, E port G: Lead wire length 300 mm MN: Without lead wire WO: Without

Manifold Specifications

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

0.4

mA), 0.5 W DC (21 mA) 24 VDC VQ5 12 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) VQC Note 1) Use dry air to prevent condensation at low temperatures.

MHZ

12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 12-2-59 59 Parallel Style

MHZ

12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 Courtesy of Steven Engineering

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

12 12 12 12 12 How To Order Series SYJ3000 Preferred Option Program How To Order: Manifold (Common SUP/Common EXH) Type 20(5 Port / Body ported type) Applicable solenoid valve: SYJ3 20-M3 SYJ3 23-M3 SS5YJ3--20-05 AB Port M3 0.5 Applicable blank plate ass'y: SYJ3000-21-1A Valve stations 02 2 stations : : P Port M5 0.8 R Port M5 0.8 20 20 stations Type 31(4 Port / Base mounted type) Type

MU

159 197 235 30 46 83 IN 25 12 15 Cushion Rubber bumper 650 218 283 348 413 42 88 153 IN 32 14 24 Thread tolerance JIS Class 2 1056 366 472 578 683 56 155 261 IN 40 16 30 Equivalent tube I.D.

CG5-S

10 AS4311FG-04-10 AS3311FG-02-12 -03-12 AS4311FG-04-12 R 1/4 10 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 12 In-line Type AS-FG JIS symbol SUS303 Model Model In-line type Applicable tubing O.D.

CG5-S

10 AS4311FG-04-10 AS3311FG-02-12 -03-12 AS4311FG-04-12 R 1/4 10 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 12 In-line Type AS-FG JIS symbol SUS303 Model Model In-line type Applicable tubing O.D.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

, 24 VDC, 100, 110, 200, 220 VAC (50/60 Hz) (A) 4 (B) 2 (A) 4 (B) 2 Allowable voltage fluctuation 10% of rated voltage Coil insulation type Class B or equivalent 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 24 VDC 1 W DC (42 mA), 0.5 W DC (21 mA) 3 position exhaust center 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) 2 position double (Metal) (A) 4 (B) 2 (A) 4 (B) 2 100 VAC Inrush 1.2 VA (12 mA), Holding