C95

6.5 15 9 18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12 50 15 16 50 65 33 30 45 21 45 12 20 9 10.5 15 63 15 16 52 67 37 35 50 21 50 12 23 9 10.5 15 80 18 20

3 Port Air Operated Valve Series SYJA300 1

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

M A B C D E F G H P U Load [kN] Weight [g] Angle 32 JA30-10-125 M10 x 1.25 49.5 19.5 24 5 8 8 17 9 0.5 2.5 70 0.5 40 JA40-12-125 M12 x 1.25 60 20 31 6 11 11 22 13 0.75 4.4 160 50, 63 JA50-16-150 M16 x 1.5 71.5 22 41 7.5 14 13.5 27 15 1 11 300 80, 100 JAH50-20-150 M20 x 1.5 101 28 31 59.5 11.5 24 16 32 18 2 18 1080 125 JA125-27-200 M27 x 2 123 34 38 66 13 27 20 41 24 2 28 1500 * Black color

Aluminum High Vacuum Angle Valve

65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Intrinsically Safe Valve

53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

204 162 41 35 45 115 70 48 17 18.5 39 111 3/4 1 Up to 1200 M20 x 1.5 M45 x 1.5 63 60 20 226 46 182 35 50 115 74 48 17 18.5 39 111 Lube Non-lube Up to 1200 M24 x 1.5 M56 x 2 71 67 277 25 56 225 60 41.5 140 86 60 20 23 49 141 Up to 1200 M30 x 1.5 M64 x 2 80 76 330 30 65 270 51.5 70 140 96 60 20 23 1 49 146 With Auto Switch: 125 to 200 Only Without rod boot l With rod boot S Without rod boot

Air Cylinder Series CS1

16 15 31 35 Up to 1000 160 161 128 212 112 255 M14 x 1.5 M30 x 1.5 56 53 40 90 59 43 14 19 20 17 36 39 Up to 1200 180 182 144 236 118 275 18.5 M16 x 1.5 M36 x 1.5 63 60 45 70 48 17 24 25 20 41 39 Up to 1200 200 204 162 265 132 320 18.5 M18 x 1.5 M40 x 1.5 115 63 60 50 74 48 17 24 25 20 46 39 Up to 1200 225 226 182 115 280 150 335 18.5 M20 x 1.5 M45 x 1.5 Lube Non-lube 71 67 60 86 60 20 29

Series KG Stainless Steel One-touch Fittings

A M Weight (g) L D Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9

AIR COMBINATION

Standard specifications C E F G J Bracket mount Model Note) P1 P2 A B M Q1 Q2 R S U V M50.8 1/81/4 1/43/8 AC10A-A 1/16 56 59.9 47.4 28 25 12.5 25 20 27 4.5 6.8 3 24.5 AC20A-A 1/8 83.2 87.6 67.4 41.6 60 23.4 30 24 33 5.5 12 3.5 29 AC30A-A 1/8 110.2 115.1 83.5 30 55.1 80 30.5 41 35 7 14 4 41 AC40A-A 1/8 145.2 147.1 100 38.4 72.6 110 36.1 50 40 9 18 5 48 1/43/81/2 AC40A-06-A 1/8 155.2 149.1

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

C76

CM2 CG1 MB MB1 (mm) (mm) CA2 Thread e M10 x 1.5 M12 x 1.75 b 10 12 d 40 48 f 10 12 g 18 23 c 20 24 j 12 15 a 20 24 0 l3 14 16 Bore Model GKM10-20A GKM12-24A Thread d3 M10 x 1.5 M12 x 1.75 h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA dH71 10 12 32 40 10.5 12 13 13 CS1 C76 C85 C95 Floating joint/Series JA JA25/40 CP95 NCM NCA D-X 20(mm) Data M Max. operating

C76

(mm) Data Rod foot (Flange), Rod and head foot AB 7 9 Rod trunnion NB Rod clevis AB 7 9 Bore AO AU 14 20 TDe8 TZ 49.9 62.3 CW 13 17 LT 4 5 XB 47 57 CZ 57.9 72.3 NH 28 33 LT 4 5 TF 28 30 CE CG 41 52 XB 47 57 TR 52 60 CH 35 40 UR 49 58 US 66 80 CO 4 3 CR 24 30 WH 34 40 CT 20 28 XS 48 60 CU 10 0.025 0.047 12 0.032 0.059 32 40 34.5 46.8 9 12 7 10 42.5 58.2 Rod foot (Flange), Rod and head foot

Profile Design ISO/VDMA Air Cylinder Series CP95

6.5 45 16 16 9 8.5 75 70 40 80 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47

KG

(mm) Connection thread R (1) A Weight (g) 2-applicable tubing L1 M D1 D2 L2 L3 Model Nylon Urethane MS KGY04-M5 KGY04-01 16 25.5 36 13 13.5 22 15 M5 x 0.8 3.5 4.6 4.6 9.5 7 1 8 4 13 M5 x 0.8 14 10 10 18 10.4 6.4 4.4 16 T 1 4 KGY04-02 26 38 19 4.3 12 KGY06-M5 KGY06-01 29 14 39 14.5 17.5 23 17.5 4.6 4.6 7 11.5 VMG 1 8 10 6 10 20 12.8 1 4 KGY06-02 27 41 17 17 14 13.4 10.6 20 3 8 KGY06

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) 7 5 5 5 3 7.5 5 3 5 3 90 90 5 90 5 A MHZ 20 20 20 20 (3 x SA) 20 20 MHF Section SD SD MHL MHSJ3-63D MHSJ3-80D MHR MHK 4 MHS 10 4 11 MHC 3 5 3 5 90 90 MHT 5 MHY 20 20 20 20 MHW -X (mm) L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2 to 22 2 to 22 40 18 to 30 18 to 30 18 to 30 18 to 30 Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2

CATALOG VC10

PORTS . (2) PLACES 1.00 (25.4) .30 (7.5) Standard valve porting is NPT. .56 (14.3) .20 (5.2) .41 (10.3) .30 Nominal Power: (7.5) Mtg.

Table of Contents

DC () IN (1 to 5 V) ZSP ISA2 Analog output or auto shift input Gray 2 DC () Blue 1 20 2 m 20 IS ZSM With bracket A PF2 30 IF 20 46 Data 4.2 10 15 40 31.5 26.5 1.6 7.2 22 35 41 A View ZS-28-B Bracket With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 7 34.5 24 11 Panel thickness 0.5 to 6 ZS-27-D Panel mount adapter + Front protective cover 8.75 ZS-27-C

5 Port Solenoid Valve Series SV1000/2000/3000/4000

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Stainless Steel One-touch Fittings Series KG

A M Weight (g) D L Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9