Fieldbus System

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) M5: M5 thread n: Stations (Maximum 24 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 223.5 234 244.5 255 265.5 276 286.5 297 104.2 114.7 125.2 135.7 146.2 156.7 167.2 177.7 188.2 198.7 209.2

MXS Series Air Slide Table

M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5 MXS16 Mounted to table 16.5 M5 X 18 19 M5 X 18 12 5 21 14 37 11 MXS-AS16-X11 15 34.5 M10 X 1 MXS-AS16-X12 25 44.5 Q MXS-AS20 5 27.5 MXS20 M12 X 1.25 21 M6 X 20 24 M6 X 20 13 6 25 17 13 45.5 MXS-AS20-X11 15 37.5 I MXS-AS20-X12 25 47.5 J H MXS-AS25 5 32.5 MXS25 MXS-AS25-X11 15 42.5 25.5 M8 X 25 M8 X 25 17 6 31 19 26.5 M14 X 1.5

Compact Cylinder with Lock Series CLQ

x 0.8 Rod side cylinder port 2 x 5.4 through 2 x 2 x 9 depth of counterbore 7 depth VH Q H thread effective depth C 5.5 M5 x 0.8 unlocking port (Unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 K M E S 3.2 2 x 2 x M5 x 0.8 3.2 Head side cylinder port 16 16 W Dust cover (Manual unlocking unit) L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (Manual unlocking unit) M5

LX

Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3. T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

21

32 10 13 10.5 6 8 4 6.8 28 96 17.5 15 6 34 33.4 Width across flats 10 length 3.5 47 17 32 12 13 10.5 6 8 4 6.8 28 102 17.5 15 8 34 37.4 Width across flats 12 length 3.5 54 22 41 14 16 13.5 8 10 4 7 30 113 23.5 20.5 8 42 46.4 LX 40 LZ MM NA 24 NN M20 x 1.5 P M5 x 0.8 S 55 X 20 Y 8 Z ZZ 114 LT 3.2 Bore size 20 25 32 40 55 M8 x 1.25 11 40 30 M26 x 1.5 M5 x 0.8 56 20 8 118 3.2 55 M10 x 1.25

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

KS/KX

(mm) Applicable tubing KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S M5 x 0.8 M6 x 1 36.5 9 12 37 33 8 10.4 16 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6 12.8 14 17

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

FZ L Inch Metric 24 25.5 28.5 32.5 B 22 22 29.5 32.5 A 35.5 35.5 44 47.5 B 17 17 19.5 22.5 A 30.5 30.5 34 37.5 12 16 20 25 21.5 21.5 22.5 24.5 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 13.5 13.5 14.5 15 5, 10 Rear Flange With auto switch Withoutauto switch L1 Bore (mm) Stroke range (mm) FD FT FV FX FZ L Inch Metric 14 15.5 18.5 22.5 B 17 17 19.5 22.5 A 31 31 42 45.5

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

11.7 12.7 17 31.1 27.1 32.1 36.1 14.2 14.3 R 1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 35.4 29.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L3 L2 D1 L1 H T Max.

Electric Actuator

Body fixed A L Maintenance L (mm) A (mm) 20 24 30 31 Model Bolt Warning LEF;16 LEF;25 LEF;32 LEFS40 3.5 4.5 5.5 6.6 M3 M4 M5 M6 Maintenance frequency Perform maintenance according to the table below.

MGP

X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5 25 53.5 37.5 11.5 M6 X 1.0 M6

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

M5 x 0.8 3 position 4 position 65 Note) Please contact SMC for the weight of elbow fittings.

Rotary One-touch Fittings Series KS/KX

M5, M6 Weight (g) M5, M6 D1 D2 L1 L2 A M Nylon Urethane M5 0.8 M6 1.0 KXL04-M5 KXL04-M6 KXL04-01S KXL06-M5 KXL06-M6 KXL06-01S KXL06-02S KXL08-01S KXL08-02S KXL08-03S KXL10-02S KXL10-03S KXL10-04S KXL12-03S KXL12-04S 22.5 23 24 8 11 4 10.4 13 16 2.5 3.5 3.5 22 1 8 M5 0.8 M6 1.0 12 16 24 23.5 24 25 28 29 32 33 38 39 42 40 43 25 2.5 3 3.5 5.0 3.5 5.0 8 26 15 6 12.8 15 24 17 1 8 1 4 28 20 26

80

dimensions (XD) Electrical entry Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17 15.5 30.15 VDW2 M5, 1/8 4 33 14 39 20 17 36.2 M 2 x J thread depth K 465 VDW Series Glossary of Terms Pressure Terminology Others 1.

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows