Brake mechanism added

Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Caution on Pneumatic Circuit Design Air balance Unlike the current pneumatic cylinder that performs a simple reciprocal movement, the stroke reading cylinder with a brake also makes intermediate stops.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

CE2

W Recommended Pneumatic Equipment CC Brake valve VFS21O VFS21O VFS21O VFS31O VFS31O Bore size (mm) Directional control valve VFS24OR VFS24OR VFS34OR VFS44OR VFS44OR Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Speed controller AS4000-02 AS4000-02 AS4000-03 AS420-03 AS420-04 Regulator AR425 AR425 AR425 AR425 AR425 Piping Nylon 8/6 or larger Nylon 10/7.5 or larger Nylon 12/9 or larger

33

Note 2) If tap water is used, use water that conforms to Water Quality Standards of the Japan Refrigeration and Air Conditioning Industry Association (JRA GL-02-1994 cooling water system circulating type make-up water).

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

HRX-OM-M090

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-R016

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-W038

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-O021

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-R005

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

100VAC(50/60Hz) 200VAC(50/60Hz) 110VAC(50/60Hz) 220VAC(50/60Hz) 24VDC 12VDC Others 13 Series VQZ How To Order Manifold Connector Kit Preferred Option Program How To Order: VQZ100 Base Mounted Manifold VV3QZ 1 5 08 N7T C Option Series None DIN rail mounting (DIN rail standard length) External pilot 1 VQZ100 D R Manifold type 5 Base mounted Kit C Connector Number of stations 2 stations 02

ZSE5/ISE5

Bracket 2S-22-D With four M3 tappings Digital pressure switch Ser,"es ZSE5 115E5 for general purpose fluid 1 ' How to Order Piping Piping '---r--'I Vacuum pressure switch Positive pressure switch ZSESB L ISESB L Switch specifications t~'1'~"o", 26 Anal 3-wire L Grommct:3m specifications specifications 02 Direct plpmg R(PT)1 /4 T2 Direct pin NPTF 1/4 27 2 out ut NPN 4-wire 67 20ul ul {PNP

90

Flow Rate Characteristics Relief Characteristics IR2020-02-A Supply pressure: 0.7 MPa IR2020-02-A Back pressure: 0.7 MPa ARJ 0.7 0.7 0.6 0.6 AR425 to 935 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 ARX 0.4 0.4 AMR 0.3 0.3 0.2 0.2 ARM 0.1 0.1 ARP 0 0 500 1000 1500 2000 0 0 150 300 450 600 IR-A IR-A Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] IR IRV Pressure Characteristics VEX Supply

HRL

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 2 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Circulating fluid flow rate: Rated flow, t Power supply: 200 VAC 3 q Ambient

HRX-OM-X037

Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRL100-A-40 Approx.18 305 155 HRL200-A-40 Approx.35 590 295 HRL300-A-40 Approx.45 760 380 3.2 Installation HRL Series 3-6

ZCUK

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Title not found

-diameier r-t, L, | , u, E 3/16" 1t4" 07 09 1 1 3/8" 1/2" 6mm 8mm 10mm 12mm 06 08 1 0 H , T , U , X , N '10-32 UNF Thread 1/16" NPT 1/8" NPT 1/; NPT H, L, W, T, Y, U, E Double branch \" Male run tee Double branch universal elbow Branch unNersal elbow Branch universal female elbow Triple branch universal elbow M5 x 0.8 M6 x 1.0 PT1/8 PT1/4 PT3/8 Pr1/2 M6 0 t 02 03 o4 a a a a a a a a a a a

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -