CE

9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating Range Auto switch model Bore size (mm) 12 20 32 40 50 63 D-A7/A80 D-A7H

Sine Cylinder Series REC

26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Exhaust port type 1 Common exhaust 17 17 stations Manifold Specifications Common exhaust Manifold type B mount 17 stations Note) Max. number of stations Applicable solenoid valve VO325-00(-Q) Port location/Port size Port direction P Exhaust port type P R A A R Base Base Base Common Side Side/Bottom Side 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , Option Blanking plate (With gasket, screw) DXT083-21A

Auto Switch Guide

Auto Switch Internal Circuit D-C73 LED Brown OUT (+) Contact protection box CD-P11 CD-P12 Brown Resistor Reed switch Zener diode OUT () Blue Weight Blue (g) D-C73 D-C76 D-C80 Auto switch model 0.5 3 5 9 46 76 10 50 9 46 D-C76 Lead wire length (m) DC (+) Brown LED (+) Resistor Reed switch Reed switch Load DC OUT Black Reverse current prevention diode Dimensions () DC () Blue D-C80 Contact

Auto Switch Guide

Auto Switch Internal Circuit D-C73 LED Brown OUT (+) Contact protection box CD-P11 CD-P12 Brown Resistor Reed switch Zener diode OUT () Blue Weight Blue (g) D-C73 D-C76 D-C80 Auto switch model 0.5 3 5 9 46 76 10 50 9 46 D-C76 Lead wire length (m) DC (+) Brown LED (+) Resistor Reed switch Reed switch Load DC OUT Black Reverse current prevention diode Dimensions () DC () Blue D-C80 Contact

Auto Switch Guide

Auto Switch Internal Circuit D-C73 LED Brown OUT (+) Contact protection box CD-P11 CD-P12 Brown Resistor Reed switch Zener diode OUT () Blue Weight Blue (g) D-C73 D-C76 D-C80 Auto switch model 0.5 3 5 9 46 76 10 50 9 46 D-C76 Lead wire length (m) DC (+) Brown LED (+) Resistor Reed switch Reed switch Load DC OUT Black Reverse current prevention diode Dimensions () DC () Blue D-C80 Contact

Auto Switch Guide

Auto Switch Internal Circuit D-C73 LED Brown OUT (+) Contact protection box CD-P11 CD-P12 Brown Resistor Reed switch Zener diode OUT () Blue Weight Blue (g) D-C73 D-C76 D-C80 Auto switch model 0.5 3 5 9 46 76 10 50 9 46 D-C76 Lead wire length (m) DC (+) Brown LED (+) Resistor Reed switch Reed switch Load DC OUT Black Reverse current prevention diode Dimensions () DC () Blue D-C80 Contact

Auto Switch Guide

Auto Switch Internal Circuit D-C73 LED Brown OUT (+) Contact protection box CD-P11 CD-P12 Brown Resistor Reed switch Zener diode OUT () Blue Weight Blue (g) D-C73 D-C76 D-C80 Auto switch model 0.5 3 5 9 46 76 10 50 9 46 D-C76 Lead wire length (m) DC (+) Brown LED (+) Resistor Reed switch Reed switch Load DC OUT Black Reverse current prevention diode Dimensions () DC () Blue D-C80 Contact

Compact Manifold Regulator Series ARM5

Option 56 17 50 SRF Symbol Description 42 17 Nil 3 None Oil-free ARX20 Note) The oil-free type has non-greased fluid contact areas. 3-way valve common supply block + Pressure switch block (W) VCHR 3-way valve common supply block (V) 5.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Weights (g) Bore size (mm) 10 16 Basic 22 46 Axial piping 22 46 Double clevis (including clevis pin) 24 54 Head-side bossed 23 48 Additional weight per 15 mm of stroke 4 7 Basic weight (When the stroke is zero) Single foot 8 25 Double foot 16 50 Rod flange 5 13 Head flange 5 13 Mounting bracket weight Single knuckle joint 17 23 Double knuckle joint (including knuckle pin) 25 21 Rod end cap

7

17 20 20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

IDG

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Hexagon width across flats 14 Hexagon width across flats 17 IDG3, 5 IDG3H, 5H With fitting for purge air discharge (Option: P) 73 40 Dew point indicator (Option: S) (98) 38 30 Purge air 12 2.3 6 17 22 IN OUT 11 Bracket (Accessory: B) 140 Purge air for dehumidification 118

HRX-OM-X037

(Recommended tightening torque178 to 185Nm) Gasket (1) CH1 particle filter Fig. 3-17 CH1 side Installation of particle filter HRL Series 3.3 Installation 3-33 HRX-OM-X037 Chapter 3 Transport and Setting Up 3. Attach the CH1 filter bracket.

VXA21/22

42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 1 station 2 stations 3 stations 4 stations 1 () SOL.A 14 () SOL.A 2 () 1 SOL.A 14 15 () 2 SOL.A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 5 stations 16 17 18 19 20 21 22 23 24 25 SOL.B 16 () SOL.A 4 () 6 stations SOL.B 17 () SOL.A 5 () 7 stations SOL.B 18 () SOL.A 6 () 8 stations SOL.B 19 () COM. 13 (+) Connector terminal no.

Digital Flow Switch ( compatible)

No.PF-OMZ0002-A PRODUCT NAME Digital Flow Switch ( compatible) MODEL / Series / Product Number PF2MC7## Contents Safety Instructions 3 Model Indication and How to Order 11 Summary of Product parts 13 Definition and terminology 15 Mounting and Installation 17 Installation 18 Piping 20 Wiring 21 Outline of Settings [Measurement mode] 29 Flow Setting (set value only) of OUT1 OUT2 [3 step setting

CY1F

9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 LL LW LZ Model KC KA KB KH KW LA ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13

Large Size Vacuum Module: Series ZR

(mm) Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Weight (With bracket) (kg) Model ZR1-W10S ZR1-W13S ZR1-W15S ZR1-W18S ZR1-W20S 0.132 0.134 0.136 0.154 0.156 46 78 95 150 185 22 38 54 62 84 1.0 1.3 1.5 1.8 2.0 ZA ZX Model/Max. Vacuum Pressure 53 kPa (L: Large flow type) ZR Nozzle dia.