10

A B C +0.025 3H9 0 depth 3 2 x 5.5 through (Body mounting hole) 2 4 3 42 1 Dimensions of auto switch mounting groove (Enlarged view) 4 x M5 x 0.8 thread depth 10 (Mounting thread) +0.052 23H9 0 depth 1.5 4 +0.025 3H9 0 depth 3 M5 x 0.8 (Finger opening port) 4 x M6 x 1 (Piston rod and rack screw) Auto switch mounting groove (4 locations)1 M5 x 0.8 (Finger closing port) H 55 22.6 6.5 0.5 10

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Compact Cylinder with Air Cushion and Lock Series RLQ

CL1 100 M5 x 100 L 105 M5 x 105 L MLGC 110 M5 x 110 L 120 M5 x 120 L 9 CNG 130 M5 x 130 L 155 M5 x 155 L MNB 180 M5 x 180 L 120 M6 x 120 L CNA 130 M6 x 130 L 140 M6 x 140 L 13.5 CNS 165 M6 x 165 L 190 M6 x 190 L CLS 125 M8 x 125 L 135 M8 x 135 L CLQ 145 M8 x 145 L 12.5 170 M8 x 170 L RLQ 195 M8 x 195 L MLU Working Principle MLGP ML1C Locked Unlocked Brake spring Lock ring Piston rod FREE

KS/KX

(mm) 8 6 4 Model 10 12 Connection thread Male connector KSH KXH M5 x 0.8 M6 x 1 1 8 R K R 1 4 M R 3 8 H R 1 2 Male elbow KSL KXL D M5 x 0.8 M6 x 1 MS R 1 8 T R 1 4 VMG R 3 8 R 1 2 Precautions Be sure to read before handling.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Compact Cylinder with Air Cushion and Lock Series RLQ

Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

P JU JJ JC JD WE 3.5 4.5 4.5 5.5 Size 10 20 30 50 M8 x 1.25 12 15 15 18 M5 x 0.8 92 117 127 152 9 10 11.5 14.5 45 60 65 75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5

CA2

10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 10 12 16 20 25 16 19 23 28 36 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 8 11 11 13 16 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 6-8-36 37 Series CA2Q Air

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

) 2-M5 x 0.8 Thread depth 7.5 14 8-M5 x 0.8 thread depth 7.5 (same on reverse side) 4-Rc 1/8 thread depth 6.5 (piping port) (same on reverse side) 30 (Z) 15 6 13 8.5 Model S ZZ Z SS CXS25-10-XB19 10 106 82 CXS25-15-XB19 15 111 87 46 9 30 CXS25-20-XB19 20 116 92 CXS25-25-XB19 25 121 97 CXS25-30-XB19 30 126 102 (30) (Z) 2-M5 x 0.8 Thread depth 7.5 2-M8 x 1.25 Thread depth 12 CXS25-35-XB19 35

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

mounting groove (4 locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39 57 H 116 158 196 G 92 134 172 F 72

Model Selection 1

M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

ML2B

M5 x 0.8 L = 8 M6 x 1 L = 10 M8 x 1.25 L = 12 ML2B25 ML2B32 ML2B40 Note) Screw in after attaching a washer in the hexagon socket head cap bolt. 10-13-10 8 Stroke Reading Rodless Cylinder with Brake Series ML2B Cushion Capacity Cushion Selection Absorption Capacity of the Air Cushion and Stroke Adjusting Unit Stroke reading hy-rodless cylinder with brake is equipped with a standard

ML2B

M5 x 0.8 L = 8 M6 x 1 L = 10 M8 x 1.25 L = 12 ML2B25 ML2B32 ML2B40 Note) Screw in after attaching a washer in the hexagon socket head cap bolt. 10-13-10 8 Stroke Reading Rodless Cylinder with Brake Series ML2B Cushion Capacity Cushion Selection Absorption Capacity of the Air Cushion and Stroke Adjusting Unit Stroke reading hy-rodless cylinder with brake is equipped with a standard

ML2B

M5 x 0.8 L = 8 M6 x 1 L = 10 M8 x 1.25 L = 12 ML2B25 ML2B32 ML2B40 Note) Screw in after attaching a washer in the hexagon socket head cap bolt. 10-13-10 Stroke Reading Rodless Cylinder with Brake Series ML2B Cushion Capacity Cushion Selection Absorption Capacity of the Air Cushion and Stroke Adjusting Unit Stroke reading hy-rodless cylinder with brake is equipped with a standard

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PPS PTFE PFA N Pilot port thread type Symbol Nil 2 Body class 6 one-touch fitting M5 x 0.8 Tubing O.D. Body class 2 3 4 5 Tubing O.D. Symbol Metric sizes 06 10 12 19 6 10 12 19 Inch sizes 07 11 13 19 1/4 3/8 1/2 3/4 Variations LVD20-T Model LVD30-T LVD40-T LVD50-T Orifice diameter 4 8 10 16 Tubing O.D. Metric 6 10 12 19 Inch Valve type Type Symbol 1/4 3/8 1/2 3/4 Basic type N.C.

Compact Cylinder with Solenoid Valve/

Bore size (mm) Stroke range (mm) OB P1 P2 Q RA RB S V W Y Z 32 40 50 63 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 59 38 5 to 100 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 67 46 5 to 100 11 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 14 8 17 54 63 83 58 10 to 100 14 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 18 10.5 17 54 63 97 69 10 to 100 6 Compact Cylinder with Solenoid Valve/Guide Rod Type Series CVQM Auto Switch

17

Model Rc1/8 PC 55 PD 6 PG 7 VV QQ 16 SS 6 XX UU 18 MY1B25 MY1B32 MY1B40 60 30 12 206 42 15 10 14.5 23.3 11 15.5 38.5 46 220 Rc1/16 MY1B25 MY1B32 MY1B40 26.5 Rc1/8 80 35 70 10 16 8 51 16 10 16 28.5 12 20 55 280 Rc1/16 264 48 16 11 32 40 Rc1/4 100 85 12 18.5 9 59 23.5 14 20 35 14 67 340 Rc1/8 40 23.5 322 60.5 24 12 35 47 Port Variations Bottom Ported MY1BG Y Y Head cover piping connection

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8( 7.8) 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10( 9.8) 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60

VCA

15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

CXS

-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94 37 100.5 92 35 17.5 2-M6 x 1.0 75 45 8 16 4 30 16 18.5