MGG

25 32 40 50 20 25 32 40 50 37 25.3 157 30 40 20 25 32 40 50 12 (14) 21 47.5 107 (115) 11 104 40 28.3 175 37 46 12 (14) 21 48 107 (115) 11 104 43 31.3 201 37 52 12 (14) 21 49 110 (118) 11 106 52.5 38.3 238 44 62 12 (15) 25 53 121 (130) 11 123 58.5 44.5 285 55 75 14 (16) 26 59 137 (149) 16 140 For long strokes Bracket mounting strokes Note) Dimensions inside ( ) are for long strokes.

smcmaintenancepartslist

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Flange type KF (NW), CF KF (NW) KF (NW), CF KF (NW) Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

ZP

-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

Basic Type/Direct Mount Type

11 14 14 F 6.5 8 9 8.5 10.5 13 17 18 HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 CB 2 2 3 3 3 5 5 5 GP 27 33 39 44 55 65 83 95 J x E M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

41 8 18.5 15.2 79 R3/8 19 23 9.5 1.5 47.4 19.8 52.6 79 19.8 52.6 AS321F-03-10ST AS321F-N03-09ST 18.5 1.5 47.4 5/16" 15.2 29.5 41 NPT3/8 19 23 9.5 31.8 43.3 10 21 18.5 81 81 AS321F-03-12ST AS321F-N03-11ST 21 3/8" 17.9 31.8 43.3 32.8 44.3 12 22 20.9 83 141 AS421F-04-10ST AS421F-N04-11ST 21 3/8" 17.9 33.6 47.9 33.6 47.9 10 21 18.5 141 24 28.6 12 1.5 55.8 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5

Round Type Hydraulic Cylinder

1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

LVQ

T) View Z Dimensions (N.O valve, double acting valve) (mm) A B C D M N T U V Model LVQ2 -S-2 LVQ3 -S-2 LVQ4 -S-2 LVQ5 -S-2 LVQ6 -S-2 2 1 25.5 46 31.5 58 7 15 35.3 10.6 7 2 1 23.5 47 29.5 59 7 15 36.9 16.5 10 2 1 23.5 47 29.5 59 7 20 37.9 22 2 1 17 35 70 41 82 7 20 64 25 2 1 35 70 41 82 7 20 66 32 17-5-72 11 Space Saving/Space Saving Connection Series LVQ How to Order VC LVQ 2 0 S 07 S VDW

VFR

Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

MXS Series Air Slide Table

3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5

25

Conditions: Ion generation frequency 30 Hz Supply pressure: 0.1 MPa High speed static neutralization cartridge Discharge time = 3.2 seconds (41% shortened) when installed at long distance (1000 mm) 11 10 9 8 7 6 5 4 3 2 1 Discharge time (s) Current model 41% IZS40 0 0 500 1000 1500 2000 Installation distance (mm) 412 Ionizer (High speed static neutralization specification) Feedback sensor

ZX

Filter Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JIS Symbol 41 51 2-R1.8 1 108.8 (Mounting hole) 3.6 19 4.8 (Mounting hole) Filter M5 (or M6) IN port M5 (or M6) OUT port 2-3.5 (Mounting hole) (62) 58 50 8 18 15.5 4 11 4.2 20 6.8 Pitch = 11 8.8 Bracket A (Standard

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48

Round Type Low Pressure Hydraulic Cylinder Series CH
M

13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

CJ5-S

58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 Up to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 Up to 1500 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 210 110 Flange bracket and plug bolt are installed

CJ5-S

58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 Up to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 Up to 1500 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 210 110 Flange bracket and plug bolt are installed

CG5-S

58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 to 1200 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 to 1500 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 210 131 110 Flange brackets and plug bolts are installed before

2/3 Port Valve

Refer to p.4.0-11 "Applicable Fluid Check List".

CG5-S

58 M8 x 1.25 7 18 5.5 M18 x 1.5 109 176 55 to 600 63 1/4 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 109 176 69 to 600 80 3/8 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 130 210 80 to 750 100 1/2 40 37 41 125 60 30 100 14 10 29 20 71 16 110 M12 x 1.75 10 26 8 M26 x 1.5 131 212 100 to 750 Flange brackets and plug bolts are installed before