Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

AC Servo Motor Driver (CC-Link Type ）

0.3 Encoder Cable (Note 3) ETFE SVP 70/0.08 (AWG#22 or equivalent)-3P Ban-gi-shi-16824 LE-CSE-RB LE-CSE-RA 2 to 10 AWG22 6 (3 pairs) 70/0.08 56 or less 1.2 7.1 0.3 LE-CSM-SA 2 to 10 AWG18 4 34/0.18 21.8 or less 1.71 62 0.3 HRZFEV-A(CL3) AWG18 4-cores LE-CSM-SB 2 to 10 Motor cable LE-CSM-RA 2 to 10 (Note 5) AWG19 or less 1.63 5.7 0.5 (Note 4) RMFES-A(CL3X) AWG19 4-cores LE-CSM-RB 2 to 10

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-03A AS12l1FG-M5-07A 1/4" 11.2 18.6 23.1 16.5 6 AS12l1FG-U10/32-07A 17.2 21.7 16.9 M5 x 0.8 10/32UNF 8 9.4 26.5 25.4 23.5 22.4 13.3 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation 672 Speed Controller with One-touch Fitting Stainless Steel Type For M5, 10-32UNF AS-FG Series Dimensions/ Universal type Seal method: Gasket seal For M5, 10-32UNF Applicable

Free Mount Cylinder for Vacuum Series ZCUK

Proper Tightening Torque Hexagon socket head bolt diameter (mm) M3 M4 M5 M6 Bore size (mm) Proper tightening torque (Nm) 10 16 20, 25 32 1.08 10% 2.45 10% 5.10 10% 8.04 10% 1251 Series ZCUK Standard Stroke Mounting Stroke (mm) Double acting style/Single rod type/Non-rotating rod Applicable cylinder Stroke (mm) Vertical mounting (Body through-hole) Bore size (mm) 10 16 20 25 32 5 10 15

Precautions 1

Part no. 13 5 26 8 10 26 28 SN-020B TN-020B M20 x 1.5 M20 x 1.5 15.0 12.5 M8 x 1.25 30 25.5 25.5 17 6 32 8 32 10 34 SN-032B TN-032B M26 x 1.5 M32 x 2 M26 x 1.5 19.6 16.5 37 31.5 31.5 M10 x 1.25 22 8 41 10 41 10 45 SN-040B TN-040B M32 x 2.0 M14 x 1.5 25.4 21.0 47.3 40.5 40.5 1578 Valve Mounted Cylinder Series CVM5 Auto Switch Proper Mounting Position (Detection at Stroke End) and Mounting

PA300/500/700

1/2 n: Station n L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 5-5-24

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 0.3 35.7 37 5.5 5.5 10 K 21 NA x M5 x 0.8 thread depth 6.5 5.5 10 KA 21 M 30 3 x M6 x 1 thread depth 10 5H9 ( ) depth 5 +0.030 0 14 2 N 1 x F 6.5 41 4 x M5 x 0.8 thread depth 7 12.5 (Extension end adjuster) F 3.5 49 1 24 14.5 24.5 24.5 28 29 58 6 Retraction end adjuster 5H9 ( ) depth 5 +0.030 0 11 5.5 N x M5 x 0.8 thread depth 6 Note 1) Note 2

Compact Cylinder

Basic (Through-hole/Both ends tapped common): CQUB F Q 2 x M5 x 0.8 Y 4 x M6 x 1 depth 10 4 x 5.4 through 15 KA H H1 Rod end nut Width across flats B1 NY EY D X C1 K NX A + Stroke B + Stroke L EX L1 Rod end male thread Basic (mm) Size Stroke range (mm) A B D EX EY F H K KA L NX NY Q Y 20 25 32 40 5 to 50 49 42.5 10 22 47 11.5 M5 x 0.8 depth 8 5 8 6.5 5.5 36 15 3 5 to 50 49 42.5 10 24 53 11

Air Slide Table Series MXP

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 40 Load (N

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

Title not found

(M5) Type 41 NVVsZ3-41-(05 )1-M5 =r _T Stationsa aslze ot A, B port TtlZ statro^Ms-lto-3, fiomlMst i l : 20 I 20 stations TypE 42 Nvv5z3-42-60rrfrD -.T:tI g"tion"l lfiire ot a, B po* ofr | % NPTF _ B7T | one touch fitting lor /4" tube Type 43 NVV5Z3-4g-6S1-esr --l_T Ststionsa .Slze ot A, B port otTtstatrc.s -T, 20 | 20 stations 83il ffi hrclr fittl.g l"V t b" NVZ3000 Proper Combinatiott"s

Rotary Gripper Series MRHQ

G DA R I 25 11 6 6 29 Side A Side B 41 727 Series MRHQ Dimensions MRHQ20 A 48 59 B 78 38.5 4 x M6 x 1 depth 10 51 0 0.074 54h9 26.3 opened +2.2 0.2 8 0 0.1 0 0.05 10 M5 x 0.8 Finger closing port 16.3 closed 0 0.7 4 x M4 x 0.7 (attachment mounting screw ) 5 24.5 20 9 Max. 9.2 51 4 x M6 x 1 depth 9 (two on opposite side) M5 x 0.8 Finger opening port 24 3.4 62 16.5 27 19 26 9 39 36 6.5 2 x

Auto Switch Guide

, D-A44C-10 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 7.5 8.5 10.5 12.5 15.5 44 52 64 78 92 6.5 6.5 7.5 9.5 9.5 69 77 91 107 121 M5 x 0.8 x 16 20M5 x 0.8 x 20 Data M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head

Series IDG

Page 41 Precautions .

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

CL

12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86

Slide Unit Series CX2/CXWM/CXWL

x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.

Slide Unit Series CX2/CXWM/CXWL

x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l