3 Port Air Operated Valve Series SYJA300

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

0.55

15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 tp 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) 22 to 102 (0.15 to 0.7) 15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 to 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) Single Double Single Double Single Double 20 12 23 15 20 12 30 23 15 33 30 15 50 33 18 53 45 12 48 15 45 12 55 48 15 58 55 15 75 58

Series SV

Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Terminal plug EX500-AC000-S Attach a terminal plug when an input unit is not connected. 6 6 EX500 Decentralized Serial Wiring Series SV Valve Manifold Common Specifications Manifold Specification Sheets Valve Manifold Specifications

Rotary Table/Rack & Pinion Style Series MSQ

84 37 6.5 33.5 65h9 67h9 32H9 9 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 14 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 10 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1

Compact Cylinder with Lock Series CLQ

style: CLQG32 MLGP ML1C 54.2 48 34 B + Stroke 32 7 4 x 5.5 8 56 65 A + Stroke Head Side Flange Style (mm) Stroke range Without auto switch With auto switch Bore size (mm) A A B B 80 23 33 70 80 10 to 50 75, 100 32 33 Rod end nut 28.5 Double clevis style: CLQD32 4 x M5 x 0.8 Cap bolt Hole: 10 H10 Shaft d9 5 52.7 14 Double Clevis Style (mm) DB + Stroke 32 7 20 10 18 36 +0.4 +0.2 CL+ Stroke

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

] Unlocked Locked Unlocked Locked AS12l1FSGl-M5-01 1/8" 7.2 9.4 17.2 21.7 16.9 39.0 36.5 35 33.5 13.3 13.6 15.1 5.5 9.6 7 AS12l1FSGl-U10/32-01 AS12l1FSGl-M5-03 5/32" 8.2 AS12l1FSGl-U10/32-03 AS12l1FSGl-M5-07 1/4" 11.2 18.6 23.1 16.5 8 AS12l1FSGl-U10/32-07 M5 x 0.8 10/32UNF 8 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation 692 Speed Controller with Indicator

CNG

40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

holes) 34 4 34 4 (Mounting hole pitch) (Mounting hole pitch) (Mounting hole pitch) (Mounting hole pitch) A A 24 24 P R P R 34.7 34.7 (Lead wire length) 300 65.5 51.9 55.9 [57.2] (Lead wire length) 44.5 62.1 [68.6] 300 21 32 38.6 44.5 49.5 [56] 48.1 48.1 32 21 8.5 8.5 6 6 42 17 9 17 9 15 3-Rc (PT)1/8 15 (Piping port) 24 42 24 32 32 3-Rc (PT)1/8 (Piping port) [ ] for AC Other dimensions

CNG

40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20

CJ2X/CUX/CQSX/CQ2X/CM2X

, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed

5 Port Solenoid Valve

, 32 outputs, Negative common (PNP) EX260-SEC2 EtherCAT, M12 connector, 32 outputs, Positive common (NPN) EX260-SEC3 EtherCAT, M12 connector, 16 outputs, Negative common (PNP) EX260-SEC4 EtherCAT, M12 connector, 16 outputs, Positive common (NPN) EX260-SPN1 PROFINET, M12 connector, 32 outputs, Negative common (PNP) EX260-SPN2 PROFINET, M12 connector, 32 outputs, Positive common (NPN) EX260

MTS

0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-F9W, D-F9WV 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-A9, D-A9V 0 (15) 0 0 40 40 (55)

Magnetically Coupled Rodless Cylinder

32 Oil-free exterior specifications (with dust seal) 700 With floating joint bore size Bore size 600 Minimum Operating Pressure 500 25 25 25 400 0.2 Minimum operating pressure (MPa) 20 20 0.16 0.16 300 0.14 0.15 0.12 0.15 15 15 200 0.1 100 0.05 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0 10 15 20 25 32 40 Supply pressure (MPa) Bore size (mm) Main Material Weights kg 15 20 25 32 40 Description

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

CLQ

CLQ 157 245 402 629 982 1559 2513 3927 M5 x 0.8 Rc 1/8 Rc 1/4 MLGP Symbol Specifications Equivalent to 0.5 MPa -XA Change of rod end shape RLQ Standard Stroke MLU Bore size (mm) Standard stroke (mm) 20, 25 32, 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 ML1C DManufacture of Intermediate Stroke -X Description Part no.

Stainless Steel One-touch Fittings Series KG

Nylon Urethane L3 D1 D2 L1 L2 M M5 0.8 KGV04-M5 KGV04-01 KGV06-M5 KGV06-01 KGV06-02 KGV08-01 KGV08-02 KGV08-03 KGV10-02 KGV10-03 KGV12-03 KGV12-04 2.9 6 14 26.5 18.5 3.8 3.8 14.5 22.5 9.8 20.5 11 15 4 2.9 8 10.4 13.4 22 16 1 8 M5 0.8 7 15 26 24 30 47 40 49 63 80 18.5 26.5 31 28.5 31.5 36.5 35.5 36.5 38.5 41.5 9.8 13.4 23.5 24 12 15 14.5 22.5 18.5 25 8 1 8 17 12.8 15.3 23.5 6 7.5 7.5 1 4 10

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

32 Oil-free exterior specifications (with dust seal) 700 With floating joint bore size Bore size 600 Minimum Operating Pressure 500 25 25 25 400 0.2 Minimum operating pressure (MPa) 20 20 0.16 0.16 300 0.14 0.15 0.12 0.15 15 15 200 0.1 100 0.05 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0 10 15 20 25 32 40 Supply pressure (MPa) Bore size (mm) Main Material Weights kg 15 20 25 32 40 Description

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 28 28 (43) 18 18 (33) 0 0 (15) 12 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 28 33 (45) 18 28 (35) 0 5 (17) D-A9, D-A9V 0 (15) 0 32 32 (47) 22 22 (37) 0 0 (15) 16 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 32 37 (49) 22 32 (39) 0 5 (17) D-A9, D-A9V 0 (15) 0 38 38 (53) 26 26 (41) 0 0 (15) 20 D-M9, D-M9V D-M9W, D-M9WV 30 (37) 0 38 38 (

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

CJ2X/CUX/CQSX/CQ2X/CM2X

, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed