C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

Slider Type Ball Screw Drive/11-LEFS Series

Note 2) Check SpeedWork Load Graph (Guide) on page 42 for details. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m. Note 3) A reference value for correcting an error in reciprocal operation.

Series KP/KPQ/KPG

17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Series KP/KPQ/KPG

17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

KP/KPQ/KPG

17 12 25 31.4 40 20.9 50 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Vacuum System Peripherals:

17 Date issued: Photo copying this page is recommended.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

17 12 25 31.4 40 20.9 50 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Sine Cylinder Series REC

26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

SFOD-OMT0009CN

*ALARM3 17 1) 7 N.C. *ALARM4 37 1) 27 N.C. -COM3 18 1) 8 N.C. -COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

VXD21/22/23

53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

VCA

LVQ LQ LVN TI/ TIL PA PAX PB 17-2-19

VXZ

Refer to page 17-3-65 for ordering a coil only.

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

Self-seal Fittings Series KC

Nylon Urethane L1 L2 M 1 4 1 4 3 8 3 8 3 8 KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 2.6 32 36 42 79 105 2.6 6.8 16.2 25.6 35.4 M12 1 M14 1 M16 1 M20 1 M22 1 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 6.8 13.1 20.4 30.4 Straight: KCH Applicable tube O.D.

Process Valve

For DZ, the length is longer by 17 mm.

Coolant Valve

Refer to back page 50 for Safety Instructions and pages 17 to 19 for 2 Port Solenoid Valve for Fluid Control Precautions.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 29 29 30 31 32 34 34 35 36 38 42 42 43 43 44 44 45 46 46 47 48 49 50 50 51 52 54 56 56 57 58 58 59 60 How to Order . Specifications. Construction. Dimensions . Made to Order Specification . Related Products . About New air cushion mechanism.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601