PFA/PFW

DC (+) 1 OUT 2 2 DC () 3 OUT 1 4 Flow direction 14 Digital Flow Switch for Water Series PFW Dimensions (mm)/ Separate Type For water 1in = 25.4mm Scale:70% PFW3mm mm-A Display unit Panel mount 3 x 7.2 (= 21.6) 41.8 8-M3 40.3 40 6.4 4.3 1 2 3 4 SMC FLOW SWITCH 35.8 19.4 40 UNIT RESET SET 5 6 7 8 Panel cutout dimensions 36 + 0.5 0 + 0.5 0 36 PFW3mm mm-B Display unit DIN rail The applicable

PA300/500/700

Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

Process Pump

= (10-3 m2/s) = (mPas)/(kg/m3) 603 PAF Series Performance Curve: Air Operated Type PAF3413 Flow Rate Characteristics PAF5413 Flow Rate Characteristics 0.5 0.5 Cycle 4 Hz Cycle 3 Hz Cycle 2 Hz Cycle 3 Hz Cycle 2 Hz Cycle 1 Hz SUP = 0.5 MPa SUP = 0.4 MPa SUP = 0.5 MPa 0.4 0.4 SUP = 0.4 MPa Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.3 MPa 0.3 0.3 SUP = 0.3 MPa SUP = 0.2 MPa

RSH/RS1H

The lever is released to allow rotations in 90 increments. 20 32, 50, 63, 80 Guide rod Set screw (M3) 10-9-14 14 Series RSH/RS1H/RSA Specific Product Precautions 2 Be sure to read before handling. Selection (RSA) Selection (RSH, RS1H) Caution 1. Do not allow pallets to strike the lever when it is standing up.

RSH/RS1H

The lever is released to allow rotations in 90 increments. 20 32, 50, 63, 80 Guide rod Set screw (M3) 10-9-14 14 Series RSH/RS1H/RSA Specific Product Precautions 2 Be sure to read before handling. Selection (RSA) Selection (RSH, RS1H) Caution 1. Do not allow pallets to strike the lever when it is standing up.

Ejector Valve Unit Series ZYY/ZYX 1

High vacuum High pressure ZSE1--14/-15/-18/-19 Set pressure ON Hysteresis can be set using the hysteresis setting trimmer. The setting is increased by turning it clockwise, and the range is 1 to 10% of the ON pressure. When the hysteresis setting trimmer is moved after setting the ON pressure, it must be set again.

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

Width across flats 3.5 M3 x 0.5 4 9h9 6.4 12.5 6.5 5.5 2.4 5.5 2.4 2.5 Rod end nut part no.: NTJ-006A 4 Series CUJ Dimensions (mm) 8 Double Acting/Single Acting 1in=25.4mm Without magnet/CUJB8 Note) The angular position of the width across flats is not fixed with respect to the tube. 2-M3 x 0.5 (port size) M3 x 0.5 effective depth 6 Element 3 6 3.5 Width across flats 10 Width across flats

IDX-OM-W029

) (EVAPORATING TEMP) 5-2 5-2 (6 ) AC200V AC230V L1 L2 L3 PE L N PE M3 6.5mm 1.25mm M3 6.5mm 1.25mm 2 2 IDU Series 1-1 1 3 IDX-OM-W029 1 () IDU Series 1-1 1 4 IDX-OM-W029 2 2 2-1 IDU22E75E 90170kg 2-2 2 2 1 2000m 240 050 600 mm 600 mm 600 mm 600 mm 600 mm ( ) IDU Series 2-1 2 1 IDX-OM-W029 2 2 2 2 6 6-3 IDF-AB501 14 1 IDU22E,IDU37E,IDU55E,IDU75E 2 2 3 80 80 OUT IN

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16 18 22 RA 18 24 26 WA VB 2 2 3 XA 2H9 2H9 3H9 XB 2 2 3 +0.025 0 +0.025 0 +0.025 0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025 0 +0.025

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

LEF-OM007xx

LEFS25S LEFS32S LEFS32 Speed 500mm/sec 0 [/min] LEFS40 Speed 500mm/sec 0 [/min] 10,000,000 20 [/min] 20 [/min] 10,000,000 30 [/min] 40 [/min] ISO4 50 [/min] ISO CLASS4 ISO5 ISO CLASS5 ISO6 1,000,000 ISO CLASS6 1,000,000 Particle concentration [particles/m3] Particle concentration [particles/m3] 100,000 100,000 10,000 10,000 1,000 1,000 100 100 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle

3 Port Air Operated Valve

VP300-224-1 (M3 x 36) VP500-224-1 (M4 x 46) VP700-224-1 (M5 x 66) Thread type Series For valve mounting 3 5 7 VPA344 VPA544 VPA744 Nil F N T Rc G NPT NPTF Caution Tightening Torque of Mounting Screw Port size Symbol 1 2 VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 M3: 0.8 Nm M4: 1.4 Nm M5: 2.9 Nm 1565 VPA300/500/700 Series VPA300 Series/Base Mounted/Dimensions Standard/VPA344-101 02 A B

Lightweight and Compact

Reset the accumulated time here. 14 Anti-freezing function Circulating fluid is protected from freezing during winter or at night. Set beforehand if there is a risk of freezing. i [ ] lamp Equipped with a timer for start and stop.

MRHQ

90 MRHQ25S MRHQ25C 14 25 1560 180 Note) Values do not include auto switch weight.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M3 x 0.5 depth 6 (Bracket mounting screw) 7 8 47.5 2-4.5 (Bracket mounting hole) 15.5 20 25 49 4 L3 7 7 L Dimension n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70 5 6 130 122 108 7 149 141 127 8 168 160 146 9 187 179 165 10 206 198 184

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

14 10 210.5 200 181 15 11 223 212.5 191.5 16 12 235.5 225 202 17 13 248 237.5 212.5 18 14 248 237.5 223 12.5 15 260.5 250 233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: G DIN terminal: D 4-Rc(PT) 1/8 (ports P, R) Manual override (non-locking) Applicable cord O.D. 4 to 6.5 Max .10 71.5 78.5 71 Light (DZ type only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3

Ejector Valve Unit, Series ZYY/ZYX

Installation and removal of connector ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise. To install the connector, hold the lever and connector unit between your fingers and insert it straight onto the pins. Then lock it by pressing the pawl of the lever into the slot on the housing.

80

15.5 30.15 VDW2 M5, 1/8 4 33 14 39 20 17 36.2 2 x J thread depth K VCH VDW VDW Body material Stainless Steel SX10 2 x 3.4 Mounting hole W Y Grommet VQ LVM X U D 300 Q F Full wave rectifier (AC type) [mm] C R E G Mounting method Model Port size P A B B1 C D E F J K M VDW1 M5 12 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 15 22 11 51.7 20 8 13.5 M3 5 15 B B1 2 x P Port size A Mounting bracket