Electric Actuator Triple Axis P&P Unit

Ball screw allowable rotation X axis specifications in-line mount (side mount) 200 20 40 W mm Motor Ball screw lead Guide Maximum work load Maximum speed Repeatability 400 750 20 40 4000 Allowable rotation rpm 20 40 3000 High rigidity direct acting guide 2000 kg mm/s mm 30 1000 15 2000 50 1000 25 2000 100(75) 1000 50(37.5) 2000 1000 0.05 (897) 1) When axes are combined, select each axis considering

Air cylinder (Series compatible with secondary batteries)

trunnion (Different surfaces and same surfaces) 15 80 85 90 75 1 D-A9-900 75 40 (n 4 85 40 (n 4 80 40 (n 4 90 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 15 80 85 90 95 D-M9-900 1 D-M9W-900 80 40 (n 4 90 40 (n 4 85 40 (n 4 95 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8

F

(100) 116 Reference dimensions after PT thread installation.

LX Series Compact Electric Actuators

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

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AR20K tJ 60K AB1010 40.

XL-OMV0002

XL-25 XL-40 XL-50 XL-63 AC90240V Ass'y XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 Ass'y 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 Ass'y XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 Ass'y 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y

Sine Cylinder Series REC

MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width

Sine Cylinder Series REC

MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width

Process Pump

50 5 0 10 15 20 25 Discharge rate (L/min) Discharge rate (L/min) PAF3410 Air Consumption PAF5410 Air Consumption 200 SUP = 0.5 MPa 300 SUP = 0.5 MPa Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 0 10 15 20 25 5 0 20 30 40 50 10 0 Discharge rate (L/min) Discharge rate (L/

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

Digital Flow Switches Series PF2A

, 521 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 q w e r w t w e Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts

Compressed Air Preparation Filter

42.5 Size 40 2 1/4, 3/8, 1/2 145.2 35.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 Size 50 2 3/4, 1 186.2 43 93.1 30 45 70 50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

Compact

F MXZ12 MXZ16 160 100 OUT side IN side OUT side IN side 140 0.7/ 80 0.7/ Supply pressure [MPa] Supply pressure [MPa] 120 Pressing force [N] Pressing force [N] 100 0.5/0.67 60 0.5/0.67 80 40 0.3/0.4 0.3/0.4 60 40 20 20 0 0 0 20 40 60 80 0 10 20 30 40 Allowable overhang L [mm] Allowable overhang L [mm] MXZ25 MXZ20 400 250 OUT side IN side OUT side IN side 350 0.7/ 0.7/ 200 Supply pressure [

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

SQ1000/2000

CAT.ES11-79 A 5 Port Solenoid Valve Series SQ1000/2000 SQ2000 Plug lead SQ2000 Plug-in SQ1000 Plug-in SQ1000 Plug lead Low profile compact manifold Compact with high capacity Pressure: 0.5MPa/Load factor: 50% Cylinder bore size (mm) Cv factor Series CJ2 Base mounted (with sub-plate) Cylinder speed (mm/s) Series CM2 Series MB/CA1 Rubber seal Metal seal 40 32 40 50 63 80 100 20 25 32 16 6 10

PF-OMM0004_C

PVC PVC PVC PVC PVC , -10No.PF-OMM0004-D -11No.PF-OMM0004-D N M8 M8 R / ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET

1

(CM2) 32 350 g 188 g 46% 40 720 g 378 g 48% Refer to page 15 for details. 2 Air Cylinder Double Acting, Single Rod JCM Series 20, 25, 32, 40 RoHS How to Order BZ 20 100 JCM Without auto switch BZ 20 100 M9BW JCDM With auto switch With auto switch (Built-in magnet) Number of auto switches Nil 2 S 1 n n Mounting Basic (Female thread on rod cover) Auto switch Bore size BZ Nil Without auto switch

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

ZP

Male thread Female thread 40 40 6 tube 06 50 50 8 tube 08 M5 x 0.8 A5 Pad type (Refer to Table (1) for applications.)

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke B AF AP E A AA AB AC AD AE BP BZ C D F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 32 35 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 28 135 118 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 19 104 75 37 40 50 29 160 140 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5