VXP21/22/23

183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Note 6) At rated voltage Series SYJ7000 Cylinder Maximum Operating Speed 1000 E 900 D 800 B C SY 700 Piping length 1m Max.operating speed (mm/s) SYJ 600 Piping length 5m SX A B 500 VK 400 VZ 300 VF 200 VFR 100 VP7 20 25 32 40 40 50 63 80 100 VP4 CM2 cylinder CA1 cylinder Cylinder bore size (mm) System Figure a VQ Solenoid valve VQ4 Fitting Air cylinder VQZ VQD Silencer VZS Speed controller

Series VQ Base Mounted Metal Seal/Rubber Seal

Lead wire color 24VDC 100, 110 200, 220 V AC V AC Black (Yellow) [Yellow] Lead wire color 24VDC 100, 110 200, 220 VAC VAC SOL.A SOL.A () () Black (Blue) [Red] Red (Blue) [Red] COM(+) COM(+) Red (Blue) [Red] SOL.B White (Gray) [Gray] () Single solenoid VQ0 double VQ1000 double solenoid Note: ( ) is for 100, 110VAC. [ ] is for 200, 220VAC Plug connector lead wire length Note) The length of

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

/N.C. 2.2 0.40 0.55 2.6 0.31 0.60 163 (100) 4 position dual N.O./N.O. 2.7 0.24 0.57 2.3 0.36 0.54 Note 1) [ ]: Denotes normal position.

ZQ

(Stations 5 to 8) ZY Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) ZQ 20 -80 -80 The stations are sequentially numbered.

AMF

AMF 1 20 80 AMF 0 Body size Body size 80 90 80 90 Port size Port size 100 Vessel shape 20 2B flange 30 3B flange 40 4B flange 20 2B flange 30 3B flange 40 4B flange Vessel shape Piping support type Self-standing type 60 6B flange Model Selection Max.

AMF

AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket 20 2BFlange 30 3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style Standing style 60 6BFlange How to Select Max.

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

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REAR CLEVIS DIMENSIONS PART # sDdg L 2 m od NUMBEF BORE BORE n,z -0.002 v -' -0 0037 2 1 9 1.87 o 1 2 CDP.34 50 40, 50,63 (55 5) (47 s) (4) (3) CDP.44 63 0,63 2 8 0 240 0 2 0 0 1 6 ( ro .1339) (71) (61) (5) (4) CDP-5A 80 0 7'l 3 0 1 0 2 0 0 1 6 r a -u.usu I '" -D 093 ' (76 5) (66 s) (5) (4) CDP.6A 80 100 o 7s -9 99?

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 K P 88 97 108.5 113.5 72 80 95 100 95 95 97 97 62 62 64 64 17-3-67 8 The VX series will be revised shortly. Series VXZ22/23 Construction N.C. N.O.

Series MXP Precision Air Slide Table

20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L=100mm L=100mm L=100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150

1.63

0.1 MGPW MGPW MGPWA25-50 0 0 MGQ 0 80 20 40 60 0 20 40 60 80 100 Load from lateral direction (N) Load from lateral direction (N) MGG Note 1) The guide rod and self-weight for the plate are not included in the above displacement values.

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position)

70pvpump

kPa 27 to 80 kPa 4.5 to 28 VDC (ZSM1-115) to 100 VDC to 100 VAC 24 to 125 VDC 100 to 250 VAC 24 to 220 VDC 100 to 550 VAC Voltage 100 VAC/DC or less (ZSM1-121) Repeatability 0.05 MPa 0.05 MPa 3% F .S. 3% F.S. 3% F.S. 3% F.S. 10% F.S. 15 kPa or less (ZSM1-115) 0.02 to 0.35 MPa (Without pointer scale) 0.03 to 0.4 MPa (Without pointer scale) Hysteresis (Calibration range of ISG) 0.08 MPa or

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

Coolant Valve

A B C D E F H Note) Model 1 4 1 4 VNC81 -65F VNC91 -80F 210 240 305.5 341.5 175 185 204 235 140 150 65 80 387.5 (389.5) 423.5 (425.5) Note) ( ): CE-compliant product (-Q) 623 A VNC Series How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 1 Q SF4 5 D 5 D 23 Q VO307 CE-compliant Coil rated voltage CE-compliant Coil rated voltage CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200

VNC

Air operated LVC (1) (2) (1) (2) LVA Port size Flow characteristics Weight (kg) External pilot solenoid Cv Orifice size (mm) Model Effective area (mm2) 880 1260 1400 1800 1 4 VNC1 VNC12 Flange Note) LVH 12 (P1) 12 (P1) 45 65 56 80 49 70 73 100 VNC814-65F VNC811-65F VNC914-80F VNC911-80F 65 15.7 External pilot solenoid LVD (1) (2) 80 21.2 (1) (2) LVQ Note) The companion flange is JIS B 2210

COQ2BP

~d ~ ~ Part Number 50 Rod End ConfiguraUon CQ2B5o-PS 'j Female thread 63 ~ CQ2863-PS 80 .. ~ CQ2BBO-PS , , Standard Stroke Mounting Bracket Part No [ ~Size(mm) t'I Standard Str'"'!'~~" '~~. 40 25,30,35,40.45,50,75, 100 BoroS.

CNS

500 400 300 200 100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100