[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Conduit terminal: VT317-T DIN terminal: VT317-D 2 x M6 mounting hole For top mounting (M4) Coil fitting position 4 positions per 90 Coil fitting position 4 positions per 90 Manual override (Non-locking) 2 x M6 mounting hole For top mounting (M4) Manual override (Non-locking) DIN terminal facing upward (101.6) VV061 VV100 V100 Max. 10 3 x 1/4 (Coil positioning pin) (Coil positioning pin) S070

VQ4000

Cylinder Speed Chart Enclosure Enclosure Bore size IP65 compatible IP65 compatible Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm Series MB/CA1 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series Average speed (mm/s) 40 50 60 80 100 125 140 160 180 200 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Individual wiring type Horizontal actuation VQ4100

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Note) Except size 30 Auto switch Rotating angle 90 90 180 180 100* 100 190* 190 Nil Without auto switch (Built-in magnet) * For applicable auto switch model, refer to the table below. * Flange type is not available for T, J, K. * T, J, K are made to order. Type * Except size 30 Nil Pneumatic H* Air-hydro Made to Order Refer to page 189. * Except size 30.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (pilot air supply port) 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN 1/2, 3/4 1/4 5 Series PA3000/5000 Process Pump

Process Pump Series PA3000/5000/PAX1000 Series PB1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 5 Process Pump

HRX-OM-Q026

100 110 120 Circulating fluid flow [L/min] Fig. 8-16: Pump capacity (HRSH100-A-20/40-, HRSH100-W-20/40-) 8.5.2 HRSH150/200-A-20/40HRSH150/200/250-W-20/400.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-17:

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

LTF6 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 Load point distance (mm) 100 1000 Load point distance (mm) LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load

Vacuum Pad

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

Vacuum Pad

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

Vacuum Pad

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

Vacuum Pad

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

LA-OMP0023

5 90 5 90 5 20 5 Measurement Accuracy [ m] Note 4) Note 5) 100 10 100 10 100 10 40 10 Maximum speed [mm/s] Note 6) 400 Operating temperature range [oC] 5 to 40 (No condensation) Operating humidity range [%] 35 to 85 (No condensation) Weight [g] Note 7) 130 190 250 360 Table weight [g] 50 70 90 110 Note 1) Continuous thrust can be generated and maintained continuously.

Guide Cylinder Series MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

ZP

How to Order B01 H N 40 25 ZPT A18 J Pad diameter (mm) Mounting thread 40 50 40 50 A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Buffer stroke (Rotating) Pad type H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 100 N S NBR Silicon rubber Spring Force U Urethane rubber 40 to 80 Pad diameter 100, 125 F Fluoro rubber E EPR 6.9

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

MHF2

Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 12-3-5 6 Series MHF2 Model Selection Effective Gripping Force: Series MHF2 Step 2 External Gripping Internal Gripping The air gripper should be operated so that the amount of overhang "H" will stay

MHF2

Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping point L mm 12-3-5 6 Series MHF2 Model Selection Effective Gripping Force: Series MHF2 Step 2 External Gripping Internal Gripping The air gripper should be operated so that the amount of overhang "H" will stay

MHF2

force N Gripping force N 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping point L mm 2 Series MHF2 Model Selection Effective gripping force: Series MHF2 Step 2 External gripping Internal gripping The air gripper should be operated so that the amount of overhang "H" will stay within the range

ALF400 to 900, ALT-5/-9

AV AU AF AR ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63 VE 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 VY1 G Dimensions: Auto Feed Tank PPA AL Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b Width across

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

100 100 100 239 247 296 320 339 345 44 46 48 51 59 63 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 Dimensions: Auto Feed Tank Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b M Width across flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382