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CN5 parallel I/O connector CN4 serial I/O connector 150 132 141 CN3 encoder connector CN2 motor power connector CN1 power supply connector 4.6 for body mounting b) DIN rail mounting (LEC6D-) Refer to page 19 for L dimension and part number of DIN rail. (11.5) (81.7) 35 66 1 31 64.2 35 167.3 (When locking DIN rail) 173.2 (When removing DIN rail) 150 132 (91.7) Note) When two or more controllers

CV/MVGQ

30 32 40 40 52 52 10 10 10 14 14 30 35 35 40 40 9 9 11.5 13.5 13.5 4 4 0 0 0 12 12 15 18 18 60 70 86 102 116 80 90 105 130 150 27 32 32 37 37 71 81 101 119 133 60 70 86 102 116 42 50 59 76 92 100 110 130 160 180 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 The minimum stroke of the one with rod boot is 20 mm or more.

Table of Contents

ASN AQ ASV AK ASS ASR ASF 15-15-5 1 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ Air consumption reduction ratio (%) 40 Working stroke pressure (MPa) 40% reduction in air consumption 40% reduction in air consumption 30 0.9 0.7 20 0.5 10 0.3 Cuts air consumption by operating the return stroke at a reduced pressure.

Micro Mechanical Valve Series VM1000

(EXH port) 40 2333 Series VFM300 Series VFM300 Push button (Mushroom) VFM350-02-30R/B/G/Y O.T. T.T. P.T. Panel mounting hole 40 1.5 29.5 1.5 Max. 6 3 18.5 M5 x 0.8 (Pilot exhaust port) (141.7) PE EXH.1 SUP.

CLQ

Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 t Applicable bore size (mm) Applicable snap ring 20 25 32, 40 50, 63 80 100 Part no.

CLQ

Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction

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SCFM Flow Length of Run Feet Compressor HP 25 50 75 100 150 200 300 500 100 6 1/2 1/2 1/2 1/2 1/2 1/2 1/2 3/4 3/4 1 18 1/2 1/2 1/2 3/4 3/4 3/4 3/4 1 1 3 30 3/4 3/4 3/4 3/4 1 1 1 1-1/4 1-1/4 5 45 3/4 3/4 1 1 1 1 1-1/4 1-1/4 1-1/4 7-1/2 60 3/4 1 1 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 10 90 1 1 1-1/4 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 2 15 120 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 1-1/2 2 2 20 150 1-1/4 1-1

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SCFM Flow Length of Run Feet Compressor HP 25 50 75 100 150 200 300 500 100 6 1/2 1/2 1/2 1/2 1/2 1/2 1/2 3/4 3/4 1 18 1/2 1/2 1/2 3/4 3/4 3/4 3/4 1 1 3 30 3/4 3/4 3/4 3/4 1 1 1 1-1/4 1-1/4 5 45 3/4 3/4 1 1 1 1 1-1/4 1-1/4 1-1/4 7-1/2 60 3/4 1 1 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 10 90 1 1 1-1/4 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 2 15 120 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 1-1/2 2 2 20 150 1-1/4 1-1

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

Compact Cylinder with Lock Series CLQ

Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction

ZPT/ZPX

ZPX40HBN-B01-B8 -B10 ZPX50HBN-B01-B8 -B10 ZPX63HBN-B01-B10 -B12 ZPX 80HBN-B01-B10 -B12 ZPX100HBN-B01-B10 -B12 ZPX125HBN-B01-B10 -B12 150 275 40 50 63 80 100 125 +1 0 +10 152 271 1 +1 0 +19 166 464 2 +2 0 +37 164 460 3 +2 0 +61 235 648 6 +4 +1 +121 225 644 12 +7 +3 +228 22 How to Order ZPX 40 HB N B01 B10 Pad diameter (mm) Mounting thread 40, 50 63, 80 100, , 125 40 40 50 B 8 50 M8 x 1.25

XM, XY

XMH-16-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 492 Stainless steel High Vacuum Angle/In-line Valve XMH, XYH Series Specifications XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 XMH-16 Model Flange (valve) size 16, CF034 25 40, CF070 50 Valve type Manual type Fluid Inactive gas under vacuum Operating temperature (C) 5 to 150 1 x 10-6 up to atmospheric pressure Operating pressure (Pa

MRQ

) 1000 100 Size 0.15 0.3 0.3 0.4 0.5 0.6 0.7 40 32 40 0.34 0.45 0.68 0.9 1.13 1.36 1.58 400 500 40 50 32 0.64 0.85 1.27 1.7 2.12 2.54 2.97 200 250 300 20 25 30 Graph of effective output CRB1 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 3 150 15 CRBU 2.5 100 10 Effective torque (N/m) MRQBS40 2 CRA1 40 40 50 4 5 1.5 32 CRQ 20 25 30 2 2.5 3 1 MRQBS32 MRQ 0.5 15 1.5 0 MSQ 0.4

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Single 3 4 100 or less Double Exhaust center 2 100 or less 4.78 (4.61) VFR620 VFR621 0.17 9.7 0.14 9.2 41 40 3 4 Double (B) (A) 4 2 (B) (A) 4 2 Closed center 1 150 or less 4.72 (4.55) VFR630 VFR631 0.15 9.3 0.17 9.3 39 39 3 4 42 [40] 0.12 [0.15] 9.6 [9.4] Exhaust center 4.72 (4.55) (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 VFR640 VFR641 1 0.14 8.9 38 3 4 150 or less 0.10 [0.44] 8.7 [5.7] 38 [20

MB1

Standard Stroke CA2 Maximum manufacturable stroke 700 Symbol Specifications Bore size (mm) Standard stroke (mm) CS1 -XA Change of rod end shape -XB5 Oversized rod cylinder 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C76 Heat resistant cylinder (150 C) -XB6 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 -XB13 Low speed cylinder (5 to 50 mm

Air Cylinder NCA1 Series

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212

Rotary Table/Rack & Pinion Style Series MSQ

200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ50 MSQ7A MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement

180° Angular Style Air Gripper Series MHY2/MHW2

30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 658 180 Angular Style Air Gripper Series MHY2/MHW2 MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 200 0.5 0.5 0.5 60 15 0.4 0.3 0.4 150 0.4 40 0.3 10 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40 Gripping

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 15 0.4 0.3 150 0.4 0.4 MHK 40 10 0.3 0.3 100 0.2 0.2 0.2 MHS 5 20 50 MHC 0 0 40 Gripping point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHT MHW2-25D MHW2-40D 160 50 MHY Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 Gripping force (N) Gripping force (N) 120 MHW 0.5 0.5 100 30 0.4 0.4 80 MRHQ 0.3 0.3 20 60 0.2 0.2 Misc. 40 10