C76

10 25 50 100 150 200 250 Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract 10, 25 50, 100 150, 200 66.7 56.3 66.7 40.7 66.7 14.7 66.7 19.6 66.7 18.1 66.7 19.6 32 10, 25 50, 100 150, 200 250 76.5 50 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 76.5 65.9 40 6-10-20 21 Series C76 Air Cylinder: Standard/Non-rotating

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

Escapements Series MIW/MIS

by scraper (g) Model Model Stroke (mm) Mass (g) Bore size Stroke 8 12 20 25 32 8 mm 3 110 6 8 MIW8-8D 12 mm 20 mm 5 240 10 12 MIW12-12D 25 mm 10 650 30 20 MIW20-20D MIW 32 mm 20 1550 30 25 MIW25-25D For MIW, same stroke as bore size 2650 100 35 32 MIW32-32D Single finger type/MIS (mm) 62 10 MIS8-10D Bore size Stroke 3 2 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 10, 20, 30 mm 130 10 MIS12-10D

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa

Compact Manifold Regulator Series ARM5

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the handle is unlocked.

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

3

Allowable Moment of Inertia (32, 40) 10-1 New MK series Current MK series Current MK2 series Allowable moment of inertia [kgm2] New MK series (Standard) 10-2 Current MK2 series (Heavy-duty type) 10-3 Current MK series Overall Length Dimensions Standard arm Bore size Shortened dimensions (compared to the current MK2 series) 20 25 32 40 50 63 MK series overall length (at 20st) 10-4 50 100 200

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

MHKL2-16 MHK2 -20 MHKL2-20 MHK2L-25 MHKL2-25 5 8 1.3 3.3 M5 x 0.8 M4 x 0.7 2.1 10 M5 x 0.8 4.3 M6 x 1 5.9 MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHW -X MRHQ MA D537

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Series KP/KPQ/KPG

D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58 46 31.4 L1 22 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58 46 31.4 L1 22 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5 12.8 22.8 Connection threads 10 (R) 8 (R) 15.2 18 26 21.5 12 26.3 Applicable tubing 10 18.5 29 41 24 29.4 M L1 17 17 12 20.9 46 58 25 31.4 22 D1 Reference dimension for R threads after installation

REC

to 700 20 M10 X 1.25 25 6 8 37.5 5.5 22 19.5 17 10 13 10 45 150 to 700 26 M10 X 1.25 32 6 8 46.5 5.5 22 19.5 17 12 13 11 45 150 to 1000 26 M14 X 1.5 40 8 10 56.2 7 24 21 22 14 16 12.5 50 200 to1000 32 20, 25 NA S TD TT TX TY TZ Z ZZ NN P N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 8 10 32 32 52 192 202 150 to 700 20 1 8 34.5 M26 X 1.5 25 146 9 10 40 40 60 196 206 150 to 700 20 1 8 42.5

Air Cylinder Series MB

11 14 20 20 27 16 19 24 34 34 42 40 50 64 80 80 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 12.5 16.5 23.5 23.5 100 119 28.5 Combinations of Support Brackets Available combinations Refer to below picture together.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

300 (Mounting holes) 2-3.2 (Mounting holes) 35 35 15 28 34 45.1 [60.6] 21.6 28 34 [40.5] 31.1 31.1 15 21 21 25 25 10 10 97.6 18 18 97.6 [ ] for AC Other dimensions are the same as the grommet style

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 NA 2 2 2 2 2 4 4 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111 KA 125.5 179.5 HA 40 40 40 25 36 72 76 13-/22-MXS12L-10 13-/22-MXS12L-20 13-/22-MXS12L-30 13-/22-MXS12L-40 13-/22-MXS12L-50 13-/22-MXS12L-75 13-/22-MXS12L-

2-Color Display Digital Flow Switch Series PFM

(kPa) Pressure loss (kPa) 0.8 0.25 0.6 0.20 0.15 0.4 0.10 0.2 0.05 1 2 4 6 8 10 0 5 10 15 20 25 0 Flow rate (l/min) Flow rate (l/min) PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 4 14 12 Pressure loss (kPa) Pressure loss (kPa) 3 10 8 2 6 4 1 2 5 10 20 30 40 50 0 10 20 40 60 80 100 0 Flow rate (l/min) Flow rate (l/min) Flow Characteristics PFM710, 510 / For 10 (l/min) PFM725

Pin Cylinders Series CJP2/CJP

, 15, 20, 25 5, 10, 15, 20, 25, 30, 35, 40 5, 10, 15, 20, 25, 30, 35, 40 CJP2 CJP Note 1) A stroke of 20 is available with a standard product only.

HRX-OM-X010

to 10V] [-100 to 100deg C:-10 to 10V] +15V 100 + ANALOG CIRCUIT 10 10 Output DI PV Analog Output*3 DI PV Analog Output*3 -15V 22 22 Output ANALOG COM [0 to 20 M:0 to 10V] [0 to 20 M:0 to 10V] +15V 12 Intput Temp.SP Analog Input*3 Temp.SP Analog Input*3 12 + -15V 1M 24 Intput [-100 to 100 deg C:-10 to 10V] [-100 to 100 deg C:-10 to 10V] 24 ANALOG COM 13 Output EMO signal EMO signal 13 25