Flow Control Equipment Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.
SymbolTube size l\,lodel Note) Replacemont Ong sal included with reolacement elefienls @3h6" NZFBl Ol srze Symbol Flow SCFM (N/min) @1/4" NZFBl Ol NZFB2Ol s3/8" NZFB3Ol Inch 3ize' MAX 0.7 (20) MAX 1.1 (30) MAX 2.1 (60) r\rAX 3.5 (100) @1/2" NZFB4Ol lnch slze' (Rebase butlon: Fed) o4mm zFB100 oGmm zFB100 zFB'200 oBmm zF8.200 zF8300 o10mm zFB300 can o8mm can be used with 5/16'tubing. iti slze
SymbolTube size l\,lodel Note) Replacemont Ong sal included with reolacement elefienls @3h6" NZFBl Ol srze Symbol Flow SCFM (N/min) @1/4" NZFBl Ol NZFB2Ol s3/8" NZFB3Ol Inch 3ize' MAX 0.7 (20) MAX 1.1 (30) MAX 2.1 (60) r\rAX 3.5 (100) lnch slze' (Rebase butlon: Fed) @1/2" NZFB4Ol o4mm zFB100 oGmm zFB100 zFB'200 oBmm zF8.200 zF8300 o10mm zFB300 can o8mm can be used with 5/16'tubing. iti slze
cke1 ARlolo 60, AR20K ro AR2010 60. AR20K tJ 60K AB1010 40.
override Rated voltage Nil Push type 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz B Locking type (Slotted) C Locking type (Manual) 110 to 120 VAC, 50/60 Hz 4 Surge voltage suppressor Option 220 VAC, 50/60 Hz Indicator light 24 VDC 12 VDC 5 6 Light/Surge voltage suppressor E EZ Nil None 7 240 VAC, 50/60 Hz With light/surge voltage suppressor (Type E, T, D, or Y only) 9 Other Z Option S With
Rated voltage Electrical entry 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz G Grommet C Conduit 3 110 VAC 50/60 Hz D DIN terminal 4 220 VAC 50/60 Hz T Conduit terminal 5 24 VDC Refer to the table (1) given below for availability. 6 12 VDC 7 240 VAC 50/60 Hz 8 48 VAC 50/60 Hz 9 Other (Contact us for inquiry) Refer to the table (1) given below for availability.
Minimum strokes for mounting of auto switches 40 50 63 Number of auto switches mounted Auto switch type Auto switch models 60 2 pcs. (same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs.
SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 0 Discharge (mL/min) 0 Discharge (mL/min) 200 400 600 800 1000 0 Discharge (mL/min) 200 400 600 800 1000 Air Consumption: Built-in Solenoid Valve/Air Operated Calculation of Air Consumption Air Consumption 45 Find the air consumption for operation with a 5 Hz switching cycle and pilot air pressure of 0.35 MPa from the air consumption
Q = (V x 60) /T1 + QL = (0.0031 x 60) /0.3 + 0 = 0.62 L From the formula on the front matter 8, the maximum suction flow rate Qmax is Qmax = (2 to 3) x Q = (2 to 3) x 0.62 = 1.24 to 1.86 L/min (ANR) According to the maximum suction flow rate of the vacuum ejector, a nozzle with a 0.5 diameter can be used.
Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03 04 5 24 VDC VP450 6 12 VDC 06 (20A) 3 4 10 (25A) 1 7 240 VAC, 50/60 Hz 9 Other 12 (32A) 1 4 1 14 (40A) 1 2 1 VP470 Option Note) There is no 3 position type for Series VP470.
81.5 83.5 2-M6 X 1 X Depth 9 1 2 3 4 60 143.5 62.5 156.5 36.5 16.5 20 Center 116.5 70 25 VEX5700 VEX5701 1 4 1 4 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 13 88.5 86.5 18 4-M6 X 1 X Depth 6 136.5 60 17 82 c Bracket mounting dimensions g Grommet h Grommet terminal i Conduit terminal j DIN connector a Model b d e f VEX5500 VEX5501 19 130 110 9 12 2.3 187 187.5 205.5 205 32 VEX5700 VEX5701
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
49 60 9 M10 x 1.5 Rc(PT) 1/4 89.5 35 19 64 Refer to page 11 regarding the rod end nut which is included.
range 100 to 200 kPa Displayable range (Pressure value) 3 -20 to 220 kPa Repeatability 0.005 mm or less 0.010 mm or less 0.020 mm or less Temperature characteristics (Reference: 25 oC) 0.010 mm or less 0.015 mm or less 0.030 mm or less Hysteresis 0 to variable (Default: 3) 0 to variable (Default: 20) Rated pressure range 0 to 200 kPa Setting pressure range -20 to 220 kPa Minimum display/
60 50 0 to 120 30 to 200 0 to 60 0 to 250 20 to 150 X X X X The above table covers only general characteristics of subject rubber materials.
Yes A90V Grommet IC circuit 100 V or less No Yes No Yes No 100 V, 200 V Relay PLC 200 V or less 12 V Connector 2-wire 24 V IC circuit 24 V or less PLC Terminal conduit 100 V, 200 V Yes Relay PLC DIN terminal Grommet Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance
, 250, 300, 350 M8 11 12 39.5 107 14 44 M10 13.5 16.5 46 115 16.5 49 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st 25 25 < st 100 100 < st 200 200 < st 300 300 < st 350 38 47 55 30 40 50 13 9 14 18 104 44 60 70 72 92 110 40 50 63 1/8 1/4 1/4 20 22 22 6.6 8.6 8.6 124 124 128 11 14 14 200 200 200 24 24 28 7.5 9 9 48 48 52 300 300 300 86 110 124 118 146 158 106 130 142
, 250, 300, 350 M8 11 12 39.5 107 14 44 M10 13.5 16.5 46 115 16.5 49 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st 25 25 < st 100 100 < st 200 200 < st 300 300 < st 350 38 47 55 30 40 50 13 9 14 18 104 44 60 70 72 92 110 40 50 63 1/8 1/4 1/4 20 22 22 6.6 8.6 8.6 124 124 128 11 14 14 200 200 200 24 24 28 7.5 9 9 48 48 52 300 300 300 86 110 124 118 146 158 106 130 142
100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 ** Non-Standard Product, consult factory for lead time.
, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25