Vacuum Pad

60 200 180 120 0 20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong

Vacuum Pad

60 200 180 120 0 20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong

Free Mount Cylinder Series CU

Control circuits, including auto switches, may malfunction due to 180 Auto switch / Common Precautions 3 Be sure to read before handling. Refer to the main text for precautions for each series.

Fieldbus System

2 B 2 B 2 B 2 B 2 B 2 B 2 55.5 69 3 1 54 12 X 4 A 4 A 4 A 4 A 4 A 4 A 4 A 22 17 19 34 69.5 1/2" 1(P) port 34.5 48 3/8", 1/2" 4(A), 2(B) port 68.5 1/8" External pilot port Formula: L1 = 41n + 77 L2 = 41n + 175 * L2 dimension: Without I/O unit For additional I/O unit, add 47 mm. * n2: I/O unit stations Dimensions n: Stations (Maximum 12 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 118 159 200

FHIA

HOW Replacement Element Part No. 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Element size Port size (Nominal size) 04 (1/2B) 06 (3/4B), 08 (1B) 10 (1 1/4B), 12 (1 1/2B) 16 (2B) 20 (2 1/2B), 24 (3B) 28 (3 1/2B), 32 (4B) 65 x 90 85 x 110 100 x 160 120 x 180 140 x 200 180 x 260 EM001H-074N EM101H-074N EM201H-074N EM301H-074N EM401H-074N EM501H-074N EM001H-105N EM101H-105N EM201H-105N EM301H

Exhaust Cleaner for Clean Rooms AMP Series

(Houston) 9001 Jameel, Suite 180 Houston, TX 77040 Tel: (713) 460-0762 FAX: (713) 460-1510 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (Cincinnati) 4598 Olympic Blvd. Erlanger, KY 41018 Tel: (606) 647-5600 FAX: (606) 647-5609 SMC Pneumatics Inc.

Vacuum Pad

60 200 180 120 0 20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong

Vacuum Pad

60 200 180 120 0 20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

.: GR-S-010 (10 g) 72 Compact Cylinder/Large Bore Size: Double Acting, Single Rod Series CQ2 Replacement Procedure is 125, 140, 160 180, 200 P.290 Construction Standard Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters !2 !3 !

Compact Cylinder/Standard Type: Double Acting, Double Rod

Contents Bore size (mm) CQ2WB125-PS CQ2WB140-PS CQ2WB160-PS CQ2WB180-PS CQ2WB200-PS 125 140 160 180 200 CQ2WB125-PS CQ2WB140-PS CQ2WB160-PS CQ2WB180-PS CQ2WB200-PS !1 !2 !3 Piston seal Rod seal NBR Set of left nos. !1, !2, !3. Tube gasket Seal kit includes !1, !2, !3. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

Compact Cylinder with Lock Series CLQ

90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB32-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB40-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB50-10D -15D -20D -25D

Pin Clamp Cylinder Series CKQ/CLKQ

Clamp arm position can be selected from 4 different positions, depending on the installation condition. 90 Clamp arm Port side 180 Round Diamond 270 Clamp position height can be adjusted by selecting an appropriate shim. 4 body shape options are available which offer extensive installation flexibility.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt

Floating Joint

, 200) Basic, Foot, Flange Hydraulic cylinder 3.5 MPa or less 20, 25, 32, 40, 50, 63, 80, 100, 125 140, 160, (180, 200) JAH Series (Heavy load) Hydraulic cylinder 7 MPa or less 40, 50, 63, 80, 100 Basic, Foot, Flange Refer to the Web Catalog or Best Pneumatics.

Series 12-REA Sine rodless cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke will be available upon request as special product.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

160, 180, 200, 250 0.7 AS800-12 1 4 35,400 1 540 38,500 586 1.4 AS900-14 1 2 52,000 1 792 47,500 724 300 3.3 AS900-20 57,800 2 880 60,800 926 3.3 Note) Flow rate values are measured at 0.5 MPa and 20C.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Indicator window AS-FG AS-FP 1 180 Indicator window AS-FM Note) Orientation of indicator direction is fixed when manufacturing, and cannot be changed by the user.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

62 Z ZZ G H (NN 1) x H 16 34 16 34 A B 11 12 6.6 12 38 2 7 A B NN x M8 x 1.25 thread depth 16 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

50 63 80 100 125 Series ZPT ZPX Related 25 50 75 100 Equipment Pad Material and Characteristics Characteristics Operating temperature range (C) Oil resistance gasoline Oil resistance benzol Base resistance Acid resistance Weatherability Ozone resistance Abrasion resistance Waterproof Solvent resistance (Benzene, toluene) Durometer HS (5C) Material 50C 50C 50C 60C 60C NBR 0 to 120 30 to 200

Safety Instructions

In accordance with the dissolution method, carry out the quantitative study of fluorine ions. 0.4 0.2 0.0 Metal ion elution (ng/cm2) Note 4) 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 Kind Al Fe Ni Na Ca Operating temperature (C) Amount of elution 0.1 or less 0.1 or less 0.1 or less 0.1 0.1 or less Clean the inside of fluoropolymer tube with ultrapure water.