Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105 115 125 130 95 104 55 99 94 45 89 109 114 119 124 129 139 149 154 159 169 179 25 35 45 95 90 85 80 75 70 105 110 120 130 135 140 150 160 100 8-29-8 9 Dual Rod Cylinder: Basic Type Series CXS Dimensions

CXS

CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang l (mm) 25 Graph (9) Up to 50 st 0.1 20 0.05 V = Up to 100 mm/s V = Up to 300 mm/s 0.05 0.04 15 10 0.03 0 0.01 Weight m (kg) 20 40 60 80 100 Overhang l (mm) 0.02 Graph (12) V = Up to 400 mm/s; Up to 30 st 2 CXSM CXSL 1 CXSL6 CXSM6 0 0.01 20 40 60 80 100 Weight m (kg) Overhang l (mm) 32 25 0.1 20 0.05 15 10 0 0.01 20 40 60 80 100 Overhang

CXS

60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph (15) V = Over 400 mm/s; Up to 100 mm stroke CXSJM CXSJL Graph (14) V = Over 400 mm/s; Up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 8-28-9 9 Series CXS Courtesy of Steven Engineering, Inc.-230 Ryan

AC Servo Motor Driver (Network card type ）

PF50 100 5 11 5.

Free Mount Cylinder

, 90, 100 Weight/( ): Denotes the values with D-A93.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10

Integrated Controller

/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000 mm/s2 0 0 Speed: V [mm/s] 140 Speed: V [mm/s] 12 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) EQFS40HH/Ball Screw Drive Horizontal/Lead

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

7ND9071en

No, Yes MENU 2 Signal Direction Open, Close 3 Position Limit Low 0.0% [0..100%] METHOD 4 Position Limit High 100.0 % [0..100%] 5 Travel Rate Open 0.0 %/s [0..1000%/s] Editable variable 6 Travel Rate Close 0.0 %/s [0..1000%/s] 7 Low Cut-off 2.0 % [0..100%] Read-only variable 8 High Cut-off 100.0 % [0..100%] 9 Split Range Low 0.0 % [0..100%] in ND9000HT only Split Range High 100.0 % [0..100%

ITV

Count ARP Pressure Characteristics Flow Characteristics Set pressure: 10 kPa IR 0 1 10 kPa 20 kPa Output deviation factor (% F .S.) 20 IRV 0.5 40 kPa Set pressure (kPa) 40 VEX Out 60 kPa 60 0 SRH Return 80 kPa 80 SRP 0.5 100 kPa 100 SRF 100 80 60 40 1 4 20 0 1 1.5 0.5 2 2.5 3 3.5 120 VCHR Supply pressure (kPa) Flow rate (L/min (ANR)) ITV ITV IC ITVX PVQ VEF VEP VER VEA VY1 VBA VBAT AP100

Basic type / Direct mount type Series CY3B/CY3R

Caution Theoretical Cylinder Thrust 6, 10 15, 20, 25, 32, 40 50, 63 63 63 1200 40 40 1100 H 3000 100 90 80 70 60 50 40 30 20 10 Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) Bore size 10 Bore size 2500 1000 900 800 700 10 50 50 H 32 32 2000 1500 600 25 25 500 400 300 200 100 1000 6 6 20 20 15 15 500 0 0.1 0.2 0.3 0.4 0.5

Air Cylinder Series CM2

100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber bumper Rubber bumper (Basic cylinder

Series AP500

psig (0.69 MPa) 60 psig (0.41 MPa) Inlet pressure: 80 psig (0.55 MPa) 100 0.69 60 0.41 90 0.62 50 0.34 80 0.55 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 70 0.48 40 0.28 60 0.41 50 0.34 30 0.21 40 0.28 20 0.14 30 0.21 20 0.14 10 0.07 0 10 0.00 0.07 0 0.00 0 100 200 300 400 500 600 Flow rate (slpm, N2) 0 50 100 150 Flow rate (slpm, N2

PF2A/PF2W

mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (With load current of 80 mA) PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (With load current of 80 mA) Switch output Note 4) Output specifications NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulse Pulse width: 50 msec Accumulated Note 4) pulse output Output voltage

2-Color Display Digital Flow Switch Series PFM

of needle rotations PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 60 120 300 (kPa) 100 300 (kPa) Flow rate (l/min) Flow rate (l/min) 750 (kPa) 100 (kPa) 40 80 750 (kPa) 60 100 (kPa) 20 40 20 0 5 10 15 0 5 10 15 0 Number of needle rotations Number of needle rotations 930 2-Color Display Digital Flow Switch Series PFM7/PFM5 Parts Description PFM7 Description Item Button Button

Environment

39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 55 30 Note 1) Range within which the rod can move.

Air Cylinder Series CS1

56 53 20 40 90 59 43 14 17 36 80 39 36 Up to 1200 M16 x 1.5 M36 x 1.5 182 144 18.5 0.1 0.3 +0.3 +0.1 +0.100 0 100 40 50 63 60 23 45 70 48 17 20 41 90 39 44 Up to 1200 M18 x 1.5 M40 x 1.5 204 162 115 18.5 0.1 0.3 +0.3 +0.1 +0.100 0 100 50 40 63 60 25 50 74 48 17 20 46 90 39 44 Lube Non-lube Up to 1200 M20 x 1.5 M45 x 1.5 226 182 115 18.5 0.1 0.3 +0.100 0 +0.3 +0.1 63 126 50 1 71 67 30 60

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

46 63.5 53 55 21 M36 x 1.5 Y-18 +0.1 0 +0.3 +0.1 0.1 0.3 50 40 100 8 70 125 M40 x 1.5 42.5 54 69.3 57 60 23 M40 x 1.5 CP95 Y-20 +0.1 0 +0.3 +0.1 0.1 0.3 8 70 125 M45 x 1.5 42.5 54 50 40 100 80.8 67 70 27 M45 x 1.5 Y-25 +0.1 0 +0.3 +0.1 0.1 0.3 9 86 160 M56 x 2 53 81 63 50 126 98.1 82 85 34 M56 x 2 NCM Y-30 +0.12 0 +0.3 +0.1 0.1 0.3 9 105 175 M64 x 2 66 87 80 63 160 110.0 92 95 38 M64 x 2

Air Cylinder

32 mm 40 40 mm 45 45 mm 50 50 mm 56 56 mm 63 63 mm 67 67 mm 80 80 mm 85 85 mm 100 100 mm For applicable auto switches, refer to the table below.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64