CJP

10 Flange style 5, 10, 15, 20, (25), 30 15 Foot style 5 mm spacer is installed in the 30 mm stroke cylinder.

High Vacuum Angle Valve, XL Series

25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

VCC13-00 45.90.1 38.40.1 230.1 1.2 to 2 hole 16.50.1 4 hole 4 hole Leakage detection port RETURN port 1.2 hole Pilot port IN port OUT port 30 R0.2 230.05 22.50.05 M26 x 1.5 3.8 hole 240.05 220.05 C1 30 30 30 2.5 8.5 32.70.05 40.50.1 480.1 550.05 Recommended surface roughness of inner surface where the valve is inserted is Rz6.3. 11 VCC Series Dimensions Single valve unit VCC12(D)-02(F) 38.7

SV

50% 70% 10% 30% 50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke

RQ

Example) RQA 20-30 does not exist.

ITV

, Hyteresis Repeatability With 50% of signal input 1 0.8 1 Output deviation factor (% F .S.)

KJ

to 30 5 to 7 11 to 13 14 to 16 20 to 22 VMG Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand Recommended tightening torque (Nm) Nominal size of Uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2.

Compact Cylinder with Air Cushion Series RQ

, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 Made to Order (For details, refer to pages 1420 and 1470.)

MHC2

MHZ MHC2/MHCA2/MHCM2 MHF MHL F MHR L MHK MHS F MHC MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S MHT Pressure 0.6MPa 4 4 2 MHY Pressure 0.6MPa 0.5 Pressure 0.6MPa MHW Gripping force N Gripping force N Gripping force N 3 3 0.4 MRHQ 0.5 0.5 Misc. 2 2 1 0.3 0.4 0.4 D0.2 1 1 0.3 200 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/

MHC2

Number of fingers and therefore, mg F 2 x With "a" as the safety margin, F is determined as follows: mg F = x a 2 x When = 0.2 When = 0.1 mg F = x 4 2 x 0.2 mg F = x 4 2 x 0.1 = 10 x mg = 20 x mg 10 x workpiece weight 20 x workpiece weight (Note) Even in cases where the coefficient of friction is greater than = 0.2, for safety reasons, SMC recommends selecting a gripping force which

HEC_001W-E

A l a r m S e q u e n c e M O D E < O f f 7-10 Operation 7.6.3 Setting mode, Level 3 1.Unit Number Setting range : 0 to F (Hex decimal) Indicated content : Unit number (Ex. : 0) Function : Sets unit number used. This item is applicable only when multiple units are used. U n i t N u m b e r M O D E < 0 2.

70pvpump

N T, F, N are options.

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

CP95

16 128 8 4 11.5 14 46 218 300 95 72 30 5 M20 x 1.5 100 40 55 30 G 1/2 19 M10 x 1.5 10 21 38 16 138 8 4 17 15 51 233 320 114 89 32 5 6-13-9 9 Series CP95 Dimensions: Cylinder Mounting Accessory L, F, G, C and D [First angle projection] Mounting style (L) XA + Stroke SA + Stroke Mounting style (F, G) Head side mounting (G) ZF + Stroke Rod side mounting (F) Mounting style (C) Mounting style

CP95

8 30 5 4 11.5 14 46 218 300 95 72 M20 x 1.5 100 10 16 138 40 55 21 38 30 G 1/2 19 M10 x 1.5 8 32 5 4 17 15 51 233 320 114 89 6-13-9 9 Series CP95 Dimensions: Cylinder Mounting Accessory L, F, G, C and D [First angle projection] Mounting style (L) XA + Stroke SA + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 Up to 1000 Up to 1000 Up to 1000 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 208 228 254 39 42 52 8-25-17 17 Series MGZ With Mounting

Pilot Operated

(R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (DC, AC) Port size P Model N A B C D E F H J K L M Q 19.5 19.5 22.5 N 64 70.5 84.5 Q 40 40 43 N 63.5 70 84 Q 58.5 58.5 61.5 R 46.5 46.5 49.5 N 64 70.5 84.5 Q 92 92 95 R 61 61 64 Normally open Rc Normally closed VXD2142 VXD2152 VXD2262 VXD2140 VXD2150 VXD2260 3/8, 1/2 3/4 1 30 30 35 19.5 19.5 22.5 34 43 47 29 37 43 14

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Table displacement due to yaw moment load Displacement at "A" when load is applied at "F" Table displacement due to roll moment load Displacement at "A" when load is applied at "F" A A F F A F L L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement