New

F G G 2 x P Port size 2 x P Port size DIN terminal A B D C J K I Q Cable 6 to 12 S T R (44) U G1/2 L H E 1/4 Exhaust port F G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF21A< VXF22A< VXF23A< 19 23.5 35 40 47 77 53.5 64.5 95 29.5 29.5 32 68.5 68.5 71 39 39 39 16.5 16.5 16.5 30 30 35 3/4 1 1 1/2 73 84 132 66 74 110 66 74 110 36 45 63 107 118 154.5 Grommet

17

D 40 55 74 H 3.2 4.5 4.5 J 35 40 47 MM 5.5 6.5 6.5 A 63 76 92 B 78 94 112 C 39 47 56 F 100 124 144 Ea 1 1 1 Eb 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 55 60 72 22 22 32 M6 x 1 M6 x 1 M8 x 1.25 5.5 5.5 6.5 12 12 16 9.5 9.5 11 Mounting direction (2) B1 28 40 44 Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Applicable cylinder MY1B25 MY1B32 MY1B40 A2 B2 C2 D2 F2 K2 Q2 Part

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1.6 (PE port) 1/8 (P, R1, R2 port) B A 17 One-touch fitting (A, B port) (4.9) 36 Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (3.6) L plug connector (L): SYJ7120-L-01 (-F) M plug connector (M): SYJ7120-M-01 (-F) M8 connector (W0): SYJ7120-W0-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1

Digital Flow Switch (Integrated display type)

2] [oUt2] Page 40 [ ] 5% of maximums rated flow PF2M701: 0.05 L/min, PF2M702: 0.1 L/min PF2M705: 0.25 L/min, PF2M710: 0.5 L/min PF2M725: 1.3 L/min, PF2M750: 2.5 L/min PF2M711: 5 L/min, PF2M721: 10 L/min [H_2] Hysteresis 2 [dt2] Delay time setting 2 [0.00] 0.00 s [CoL] Display colour setting 2 [1SoG] ON: Green OFF: Red [F 3] [FiL] [FiL] Digital filter setting [1.0] 1.0 s Page 44 [F 4] [

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

x P (Rc, NPT, G) NA AL F Width across flats B1 H1 2 x NN Standard port Relief port M5 x 0.8 H2 I Relief port D C B 4 x LD LH MM 2 x 4 3.2 N X Y N X Y S + Stroke LX LS + Stroke Z LZ ZZ + Stroke (mm) AL LH LS LZ MM G NA N LX LD D C A B 16 13 13 13 8 F Bore size K H1 H 8 6 6 5 H2 I 41 32 32 26 B2 54 47 47 40 B1 Stroke range 50 45 45 41 M10 x 1.25 M8 x 1.25 30 40 32 25 20 5.5 5.5 5 200 to 1000

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

114 186 340 405 485 660 870 20 40 60 30 60 10 40 60 L1 16 40 L2 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D 146 98 158 178 116 226 138 238 278 166 1010 1175 1645 1840 1850 80 40 80 100 50 60 20 40 60 MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 25 198 216 150 198 242 298 336 220 318 402 2720 2935 3070 3985 4820 100 120 70 120 160 188 246 286 40 30 32 20

JA/JAH/JB/JS

How to Order JA 40 F 14-150 X11 Option Mounting style X11 High temperature specifications 5 to 100C Nil F L Basic style Flange style Foot style Applicable cylinder nominal thread size Thread nominal size (Standard) Nominal thread size Applicable bore size (mm) M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M36 x 1.5 3-050 4-070 5-080

JA/JAH/JB/JS

How to Order JA 40 F 14-150 X11 Option Mounting style X11 High temperature specifications 5 to 100C Nil F L Basic style Flange style Foot style Applicable cylinder nominal thread size Thread nominal size (Standard) Nominal thread size Applicable bore size (mm) M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M36 x 1.5 3-050 4-070 5-080

LG1H

Refer to page 57 for mounting. 30 A B Stroke Model LG1H21NC500-F LG1H21NC600-F LG1H21NC700-F LG1H21NC800-F LG1H21NC900-F LG1H21NC-1000-F 360 460 560 660 760 860 500 600 700 800 900 380 480 580 680 780 880 95 B 95 100 8(4) x 6.2 (170) () () 1000 20 95 A 95 110 (150) () () Positioning Time Guide Positioning time Positioning time (sec.)

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

4-MM thread depth J L 0 0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N S + Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26

240

40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Horizontal/Bottom 160 160 160 160 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 120 120 120 120 Me m Y 80 80 80 80 40 40 40 40 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1

HRX-OM-W002

1000 40 1000 1000 1000 1000 500 500 500 500 500 500 500 500 500 500 0 0 0 0 0 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 0 10 20 30 40 0 0 0 0 10 20 30 40 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] 0 10 0 10 20 30 40 Circulating fluid temperature[] Circulating

High Power Cylinder:

2 1 n S n Mounting Basic Axial foot Front flange Rear flange B L F G Bore size 20mm 25mm 32mm 40mm 20 25 32 40 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

5 Port Air Operated Valve

EXH port EXH port VF 000 75 A 2 3 Series Thread type Nil F N T Rc Symbol 3 5 Series Port size VFA3000 1/8 G VFA5000 1/4 NPT NPTF 1520 VFA3000/5000 Series 5 Port Air Operated Valve Base Mounted/Manifold Dimensions: VFA3000 Series Type 40: VV5FA3-40-2-02: Common exhaust L2 L1 19 6 SYA 13 4 x 5.5 (For mounting) 0.5 SYJA 49 33 40.5 33 33 R P R R P R 23 23 97 VZA 81 24 66 VFA VFA 1/4 [1 (P), 5

Table of Contents

VQ1000 (VV5Q13)-Plug-in Unit, Flip Type (F, P, J, L, S kit) . VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

Digital Flow Switches

How to Order Integrated Display Type PF2W7 20 03 27 M Flow rate range Thread type 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to 100 l/min 04 20 40 11 Unit specification Nil N F Rc NPT G Nil M With unit switching function Fixed SI unit Note) Port size Lead wire (Refer to page 35.)