Digital Pressure Switch ( compatible)

Lower level screen 0x044D (1101) 0 R/W During 2 value setting Selection of display item Left side 0x044E (1102) 0 R/W Y U8 0 Refer to Table "Selection of display items during 2 value setting".

High-precision Digital Pressure Switch ( compatible)

During Std setting Selection of display item 1101 0x044D 0 R/W U8 0 Y During 2 value setting Selection of display item Left side 1102 0x044E 0 R/W U8 0 Y Refer to Table "Selection of display items during 2 value setting".

Digital Pressure Switch ( compatible)

(1060) 0 R/W N S16 0x0 (0) 0: Std 1: dUAL (2 value display) 2: o1Lv (OUT1 level bar) 3: o2Lv (OUT2 level bar) 4: LinE (Line name) 5: oFF (No display) Setting of lower level screen 0x044C (1100) 0 R/W Y U8 0 During Std setting Selection of display item Y U8 0 Refer to Table "selection of display items during std setting". 0x044D (1101) 0 R/W Lower level screen During 2 value setting Selection

High-precision Digital Pressure Switch

During Std setting Selection of display item 1101 0x044D 0 R/W U8 0 Y During 2 value setting Selection of display item Left side 1102 0x044E 0 R/W U8 0 Y Refer to Table "Selection of display items during 2 value setting".

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

R P R R P R L (10) 8 End plate side End plate side (24) (35) 5.5 Silencer with One-touch fitting This is a silencer which can be attached to the R (exhaust) port of a manifold using a One-touch fitting. Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

High-precision Digital Pressure Switch ( compatible)

During Std setting Selection of display item 1101 0x044D 0 R/W U8 0 Y During 2 value setting Selection of display item Left side 1102 0x044E 0 R/W U8 0 Y Refer to Table "Selection of display items during 2 value setting".

VZ5000

P), 3/5(R) port 4(A), 2(B) port 1 8 , C6, C8 1 8 Port size Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1

42

(A) 4 (B) 2 VP4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 4/5 VQ 4/5 q w e q w VQC 1/2 VQC 4/5 VQZ SQ (A) 4 (B) 2 VQ5251 VQ5250 (A) 4 (B) 2 VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR r e q w e r q w VQ7 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (

Dual Rod Cylinder Series CXSJ/CXS

6 CXSWL (Ball bushing bearing) r u iy w !3 @2 @0 @3 @1 !7 !4 !5 !2 CXSWL6 r !5 !6 q !8 !0 !

New

2 x P Port size W Y W Y DIN terminal Conduit terminal U U1 U U1 X X1 X X1 2 x 5.3 Mounting hole 2 x 5.3 Mounting hole Cable 6 to 12 S Q F 34 D F Q2 S2 D G1/2 (44) 31.5 25 32 T R E C R E G1/2 IN OUT IN OUT 1.2 1.2 B B1 B B1 2 x P Port size 2 x P Port size (mm) For information on handling One-touch fittings and appropriate tubing, refer to page 39 and KQ2 series One-touch fittings in Best

A_HEC-OM-K001

M O D E N o r m a l Function P V < 2 3 . 0 C # 2 S V 2 3 . 0 C M O D E N o r m a l [Tips] No key-in operation for 1 min.

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

VHK

valve 3 port valve 12 12F 6 06F M5 x 0.8 M5 8 08F R 01S 02S 03S 04S 1 8 R 1 4 R 3 8 R 1 2 10 10F 12 12F M5 x 0.8 M5 R 01S 02S 03S 04S 1 8 R 1 4 R 3 8 R 1 2 Standard Type 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. No. 1 2 3 4 5 6 Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note White White White Description Note No.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

:g.*1ii1*,ii1r,.:.'' 4.5 Ports Solenoid Valve NVZ1000/3000/5000 NVZl000 o o ; NVZ3000 (Body ported type Cvo.2) NVZ5000 ::.:l L r r s L I 5 l r ' ' . .

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

S Couplers Series KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

LVQ

T) V 1 2 1 2 1 2 1 2 LVQ3 , LVQ4 LVQ5 , LVQ6 N M V A B U B A Z (Max.