2/3 Port Valve

1 2 4.2-8 VNA Construction VX Operation Principles VN VNA01, 11 (N.C.)

EX510

EX510-DX1) Mounting example 1 Mounting example 2 60 35.1 2 x M4 2 x M4 30.8 1707 Series EX510 Parts Description EX510-DX2 EX510-DX1 w r w u r i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12

Mini Free Mount Cylinder

Grease part no.: GR-L-005 (5 g) 11 Resin Damper B 12 Steel wire Nickel plated Rod end nut 13 NBR Piston seal 14 NBR Rod seal 15 NBR O-ring 14 Series CUJ Dimensions: 12, 16, 20 Double Acting; Single Acting, Spring Return Lateral Mounting Without Magnet: CUJB 2 x P (Port size) N Element (for 12, 16) Plug (for 20) NN GB GA Width across flats V K C J R D H 2 x Q 2 x 2 x QA F + Stroke E (E) B

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS-14AB 5 147 2 AS-15AB 7 191 2 AS-16AB 9 236 2 AS-17AB AS-25A Threaded stud kit for manifold AS-9AB 1 set (Adapter for manifold mounting is included.) 3 111 2 AS-24AB 3 119 2 AS-19AB 5 179 2 AS-20AB 7 236 2 AS-21AB 9 258 2 AS-22AB 9 277 2 AS-25AB 9 293 2 AS-43B r Threaded stud kit for manifold AS-30A M4 4 M4 4 Adapter for manifold mounting 119 2 AS-45B 179 2 AS-47B 236 2 AS-48B 277 2 e L-bracket

Plug-in Unit

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

HRX-OM-W032

Refer to the Operation Manual Communication Function for details. signal 1 11 (Common of contact input signal 1) 4 (Contact input signal 2) Run/Stop signal input Remote signal input External switch signal input*2 Contact input signal 2 12 (Common of contact input signal 2) *1: To use the power of the device, the total load current must be 500 mA or less.

VEX1

Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 1(P) 2(A) 3(R) 02 02 01 02 03 04 04 06 10 10 12 14 20 Port size 11 2 1 11 4 11 4 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 2 Air operated Solenoid 0.1 0.2 0.2 0.3 0.4 0.5 1.3 1.4 1.9 2.0 3.9 4.0 Mass (kg) Note) Non-lubricated specifications are not available for this product.

Step Motor Driver （ Pulse input type ）

Storoke +2 Storoke +2 Storoke +2 Storoke(-) -2 -2 -2 -2 Maximum speed 500 250 1000* 500 250 1200* 500 250 500 500 250 Maximum acceleration/ deceleration 3000 3000 3000 3000 Basic parameter default Default In position 0.50 0.50 0.50 0.50 ORIG offset 0.00 0.00 0.00 0.00 Max force 100 100 100 100 Para protect 1 1 1 1 Enable SW 2 2 2 2 Unit name Part no. of each product W-AREA1 0.00 0.00 0.00

VZS

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

HRX-OM-Y120

and before communication . 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14

IDX-OM-W025

11 Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Cautions for handling the motor type auto drain . 11 2 11 4 Electric circuit . 11 2 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12

Step Motor Controller (Servo / 24 VDC)

(The electric actuator starts the operation.) 9) AREA output is turned ON for the step data no.2 (at 170mm from the origin point). 10) AREA output is turned OFF for the step data no.2 (at 130mm from the origin point). 11) BUSY is turned OFF. (The electric actuator stops.) INP is turned ON. 49 - 11.

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

T

(mm) Thread Weight g H A B C E F D G I J Model MS M-3ALU-2 M-5ALHU-2 M3 x 0.5 M5 x 0.8 1.6 3.5 0.9 2.5 3 5 7 9 11 6.5 7.5 2.5 3.5 9.4 13.5 5 7 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 4 2 x 1 .2 T Width across flats H Applicable tubing 4 3 2 1 Component Parts

3 Port Solenoid Valve/

M12 connector pin number G1/2 terminal number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) 3(R) (31) e (11) q 3(R) (31) e (11) q 3(R) (31) e (11) q 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal

Ionizer Nozzle type IZN10 Series IZS

2 x 3.4 33 IZH 30 30 52 46 44 26 17 11 40 5 8 x 3.4 20 26 12 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Internal mounting Pivot mounting 21 33 (Mounting angle adjustable range) (90) 61 61 30 Pivoting bracket/IZN10-B2 20 3.4 56 64 28 20 (Mounting angle adjustablerange) 20 9.5 9 90 24 3.4 4 14 40 2 x Hexagon socket head cap screw M3 x 16 59 11 (Accessory) 18 457 IZN10 Series Dimensions

13

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 5 7 10 2 4 4 7 9 11 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 10 11 13 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 14 14 13 20 18 15 18 21 26 33 12 13 11 17

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 2.

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

IP8101 Series

alarm 2 mode(on), non-alarm mode(oFF), and change the set value if alarm 2 mode is selected.