LEF-OM007xx

Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard cable S* Standard cable S* 11-LEFS40 11-LEFS40 *Only Step motorcan be selected AC Servo motor 11-LEFS 25 B A1 100 2 S S2 ize I/O connector 25 25 None None Nil Nil 32 32 With connector With connector D D 40 40 Motor Controller type Vacuum port direction

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Mini Free Mount Cylinder

1 1 1 3 7 3 7 Note 1) Solid state switch D-M9/M9W: with 1 pc.

4/5 Port Air Operated Valve Series SYJA3000 1

P 45.5 24 32 1.8 (Bleed port) With fiflter (80 mesh) R2 21 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2-4.3 44 2-M5 x 0.8 (Pilot port) 2-M5 x 0.8 (Pilot port) (For mounting) A B 1 11 1 5 A B 1 24 A B 1 2-2.6 10 R P (For manifold mounting) 19 4 2 37.5 47 42 15 54 54 Manual override 24.5 23 20 11.5 3 2-2.6 (For mounting) 11 Manual override 2-1.8 (Bleed port) 46.5 1/8 33.5

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

8 10 10 12 12 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) With One-touch fittings Example) AS2002FS-04-X214 With indicator 10Clean Series 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

(#1 + #3) SMXP12, #2 (#2 + #4) L K J V H S G M W Model 24 22 68 59 40 15 76 10 29 55 MXP12-15 42 40 98 89 60 25 106 30 49 75 MXP12-25 11 Precision Air Slide Table Series MXP Dimensions MXP12/With Shock Absorber 2-M4 x 0.7 depth 6 Z 3 V K 5 Max. 15 7.5 M Stroke: S MXP12-15B Width across flats 12 H A 8.5 M8 x 1 40.8 14.3 7.1 14.4 MA 8 8.5 11 20.3 24 25 20 A 19 1.5 4-M5 x 0.8 Prepared hole

Step Motor Driver （ Pulse input type ）

100 100 100 100 Para protect 1 1 1 1 Enable SW 2 2 2 2 Unit name Part no. of each product W-AREA1 0.00 0.00 0.00 0.00 W-AREA2 0.00 0.00 0.00 0.00 ORG Correct 0.00 0.00 0.00 0.00 Sensor type 1 1 1 1 Option set1 1 1 1 1 Undefined parameter11 1 1 1 1 Undefined parameter12 1 1 1 1 The maximum speed varies depending on the stroke.

Step Motor Controller (Servo / 24 VDC)

0 0 1 0 0 0 9 0 0 1 0 0 1 9 0 0 1 0 0 1 10 0 0 1 0 1 0 10 0 0 1 0 1 0 11 0 0 1 0 1 1 11 0 0 1 0 1 1 12 0 0 1 1 0 0 12 0 0 1 1 0 0 13 0 0 1 1 0 1 13 0 0 1 1 0 1 14 0 0 1 1 1 0 14 0 0 1 1 1 0 15 0 0 1 1 1 1 15 0 0 1 1 1 1 16 0 1 0 0 0 0 16 0 1 0 0 0 0 17 0 1 0 0 0 1 17 0 1 0 0 0 1 18 0 1 0 0 1 0 18 0 1 0 0 1 0 19 0 1 0 0 1 1 19 0 1 0 0 1 1 20 0 1 0 1 0 0 20 0 1 0 1 0 0 21 0 1 0 1 0 1 21 0 1

VEX1

Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 1(P) 2(A) 3(R) 02 02 01 02 03 04 04 06 10 10 12 14 20 Port size 11 2 1 11 4 11 4 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 2 Air operated Solenoid 0.1 0.2 0.2 0.3 0.4 0.5 1.3 1.4 1.9 2.0 3.9 4.0 Mass (kg) Note) Non-lubricated specifications are not available for this product.

HRX-OM-W032

Blue (DC COM) 11 Terminal No. Black (Output 1) 3 Terminal No. Black (Output 1) Fig. 3-10 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue (DC COM) Brown (24 VDC) Brown (24 VDC) Terminal No. 14 Terminal No. 6 Flow switch Blue (DC COM) Terminal No. 13 Terminal No. 3 Black (Output 1) Black (Output 1) 11 Terminal No.

HRX-OM-Y120

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure *1 Alarm flag 1 6 Air exhaust fan failure *2 7 Reservation 8 CH1 abnormal rise of circulating fluid

Plug-in Unit

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

VZS

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

Dual Speed Controller with One-touch Fitting Series ASD

Suitable screw torque (Nm) Body size M3 0.07 M5 0.3 1/8 1 1/4 1.5 3/8 4 1/2 10 15-8-6 Flow Control Equipment Precautions Series ASN2 Handling of One-touch Fittings Caution Selection 1. Refer to page 15-1-11 for One-touch Fitting. Warning 1.

13

(Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without silencer) Box type: Type B Body ported type: Type D Box type (Built-in silencer) ZX Model

Ionizer Nozzle type IZN10 Series IZS

(mm) IZN1007 (inch) 3.5 2 x M3 x 0.5 depth 10 26 32 7 25.8 Note 1) 11 Note 1) Dimensions of the resin part stated in Provide Grounding on page 454.

3 Port Solenoid Valve/

pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 5 Safety Standard ISO13849-1 Certied 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection

3 Port Solenoid Valve/

pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 5 Safety Standard ISO13849-1 Certified 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.

IDG

8, 1/4 50 173 30 45 50 11 Drain Discharge With float type auto-drain (N.C.)