Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1 MGZ R 100 40 Z Z73 Number of auto switches Without non-rotating mechanism Nil S 2 pcs. 1 pc.
Without auto switch CG5 L N 25 S R 100 CDG5 L N 25 S 100 G5BAL R With auto switch Built-in magnet Number of auto switches 2 pcs. 1 pc. n pcs.
Basic weight 0.40 kg (Foot style 20) Additional stroke weight 0.06 kg/50 ST Air cylinder stroke 100 ST Additional air cushion weight 0.02 kg 0.40 + 0.06 x 100/50 + 0.02 = 0.54 kg (Foot style 20, 100 stroke) 10-14-11 12 Series CG5-S Construction With rubber bumper 80, 100 80, 100 t e t q o i r y !
Construction Component Parts Description No. q w e r t y u i o !0 !1 !
C96A2G-0294Y-R 160 200 C95A6G-471AQ-R CS1-J16-300 300 200 200 C95B0G-472AQ-R C95B0G-0304Y-R 300 250 350 C95B5G-533AQ-R C95B5G-574EQ-R 450 200 C1SC2G-1468V-R CS1-J25-200 350 C1SC2G-1470V-R CS1-J25-530 530 320 Ambient temperature specifications With rod boot of silicone rubber material and without rod boot: -20 oC to 60 oC With rod boot of nylon tarpaulin: -10 oC to 60 oC (No freezing) (7)
e q w q w VQ5100 VQ5101 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P)
R. Fittings & Tubing Air Cylinders Rotary Actuators FT F 4 x FD 0 E0.05 FX0.15 B B FX0.15 (mm) FT 6 7 7 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 80 104 40 3 82 11 11 100 128 50 3 100 14 14 FD 5.5 5.5 6.6 6.6 FX 28 32 38 46 F 2 2 2 2 E 12 14 18 25 B 40 44 53 61 Bore size 20 25 32 40 Note) End boss is machined on the flange for E. Other dimensions are the same as basic type.
I sens ALM I sens ALM E (1-195) for the controlle r
MHF2-16D1 MHF2-16D2 MHF2-16D @0, @1, @2 MHF16-PS MHF16-PS MHF16-PS Seal kit e, r, t, y, !4, !6, !9 Mounting screw MHF-A1602 MHF-A1602-1 MHF-A1602-2 Finger assembly Kit no. Description Contents MHF2-20D MHF2-20D1 MHF2-20D2 MHF20-PS MHF20-PS MHF20-PS Seal kit @0, @1, @2 MHF-A2002 MHF-A2002-1 MHF-A2002-2 Finger assembly e, r, t, y, !4, !6, !
MHF2-16D2 MHF2-16D1 MHF2-16D @0, @1, @2 MHF16-PS MHF16-PS MHF16-PS Seal kit e, r, t, y, !4, !6, !9 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit no. Description Contents MHF2-20D2 MHF2-20D1 MHF2-20D MHF20-PS MHF20-PS MHF20-PS Seal kit @0, @1, @2 MHF-A2002-2 MHF-A2002-1 MHF-A2002 Finger assembly e, r, t, y, !4, !6, !
Effective area is larger than the former model. 6, 10, 16, 20 AS12l1F-M5 AS13l1F-M5 M5 X 0.8 6, 10, 16, 20 AS12l1F-U10/32 AS13l1F-U10/32 10-32UNF 20, 25, 32 AS22l1F-01 AS23l1F-01 R(PT)1/8 Tube swivels 360 20, 25, 32, 40 AS22l1F-02 AS23l1F-02 R(PT)1/4 40, 50, 63 AS32l1F-02 AS33l1F-02 R(PT)1/4 Universal style permits 360 piping swivel. 40, 50, 63 AS32l1F-03 AS33l1F-03 R(PT)3/8 63, 80, 100
EA MM BA TD UV E B AA A C FA G TT J LF + STROKE ZB + STROKE R WF TL TM TL E X119 Option (in) TD 0.001 0 Bore (in) MM KK A AA B BA C D DD E EA EE FA G J R TL TM TT UM UV WF Y LF P XI ZB 200 (2) 1 3/4-16 1 1/8 2.6 1.5 1 1/8 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1.26 1.06 1.84 1 1 3 1.18 5 2.56 1 3/8 2.09 3 5/8 2.40 3.29 5 1/8 250 (2.50 1 3/4-16 1 1/8 3.1 1.5 1 1/8 1/2 7/8 5/16-24 3 0 3/8 3/8 1.30
3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.
Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
Note 1) The chart above shows the leakage test results based on a test conducted using this cylinder construction. a t e l u g c Reduced initial particulate generation e i t 3 n r a e p r a Note 2) To allow fine stroke adjustments, O-ring seals are installed to separate vacuum and atmosphere.
(Refer to pages 2-5-40 to 2-5-43.) 26.4 48.7 3(R2) 5(R1) Rc 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Po Circuit diagram Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A 11.8 When different pressures, high and low, are supplied to manifold, a SUP block plate is inserted between the stations under different pressures. 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked
2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.