Bearing Style: Slide Bearing, Bore Size: 63mm, Port Thread: Rc, Stroke: 75mm, Table Turn Position: 90° Rotation, 4 Detector Arms (a,b,c,d), Switch Bracket, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Table Auto Switch: -, Table Switch Lead Wire or Prewired Connector: -, Table Switch Number: -

Bearing Style: Slide Bearing, Bore Size: 63mm, Port Thread: Rc, Stroke: 75mm, Table Turn Position: 90° Rotation, 2 Detector Arms(a,c), Switch Bracket, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Table Auto Switch: -, Table Switch Lead Wire or Prewired Connector: -, Table Switch Number: -

Bearing Style: Slide Bearing, Bore Size: 63mm, Port Thread: Rc, Stroke: 75mm, Table Turn Position: 90° Rotation, 4 Detector Arms (a,b,c,d), Switch Bracket, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Table Auto Switch: -, Table Switch Lead Wire or Prewired Connector: -, Table Switch Number: -

Bearing Style: Slide Bearing, Bore Size: 63mm, Port Thread: Rc, Stroke: 75mm, Table Turn Position: 90° Rotation, 2 Detector Arms(a,b), Switch Bracket, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Table Auto Switch: -, Table Switch Lead Wire or Prewired Connector: -, Table Switch Number: -

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

Microspeed Cylinder

, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

LX Series Compact Electric Actuators

S C hwPmfile tlDD|niD Acilaton wiflr$uiiles $enies t)(P Specif ications Brake specifications 9troke (mm) 50, 75, '100, 125,150,175,200 Motor 2-phase stepping motor s-phase steppang motor Screw (mm) 08, Lead 6 08, Lead 12 @8.

Compact

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .

Air-hydro Unit

Table 1 CE-compliant Applicable model CCT160-400 to 800 CE marking applicable standard Directive 97/23/EC Category I Specifications CCT40 Effective oil level stroke Operating pressure 0 to 0.7 MPa Because the CCT40 is a converter for an actuator with a small capacity, it cannot be made into an air-hydro unit.

Process Valve

Note 1) Note 2) Note 3) Note 4) Note 5) VNB VNB Specifications (Vacuum pilot type) Fluid Vacuum SGC 101 kPa to Atmospheric pressure Pilot pressure range Operating pressure range Pilot Solenoid Valve Specifications 101 to 47.9 kPa SGH Port size 6A to 25A 32A to 50A VO307-1 VO307D DZ1-Q Symbol (Vacuum pilot type) Pilot solenoid valve Note1) SF4--23 SF4D DZ-23-Q VNC Valve type Type N.C.

CE2

64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600 80 40 19 25 14 76 52 31 41 25 92 30 15 21 11 37 131.5 116 56.5 35.5 36 198 16 M12 x 1.75 16.5 Without rod boot With rod boot W S P NN MM N Bore size (mm) h f e ZZ H ZZ 40 50 63 80 100 59 11.2 43 280.5

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

For more information, please refer to page 8-14-23.

Thermo-con/Rack Mount Type

0 10 Label 0 75 278 331 381 Circulating fluid inlet (Circulating fluid drain port) Rc3/8 Ventilation hole (air outlet) Circulating fluid outlet Rc3/8 3.

Rotary Table

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

MRQB-OM0002

2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101 135 202 270 337

LEC-T1_C

LEC-OM08003 // LEC-T1 Series LEC6 LECPA TB Ver2.1 .5 .7 1. .9 1.1 .9 1.9 2.10 1.2 .11 1.11 2. .12 3. .13 3.1 .13 (1).13 (2)Tree .13 3. .14 (1).14 (2)Tree .15 4.16 5. .17 5.1 .18 5.2 .19 (1).19 (2).19 5.3 .20 (1).21 (1-1) LECPLECA 22 (2) .23 (2-1) LECPLECA 23 (2-1-a) TB Ver1.**. 23 (2-1-b) TB Ver2.**. 25 (2-2) LECPLECA 27 (2-2-a) TB Ver1.**. 27 (2-2-b) TB Ver2.**. 29 (2-3) LECPLECA .32 1

240

6 5 MXJ 21.5 18 46 47 MXP 23 5 20 6.5 20 6.5 MXY MTS 5 NS 35 + Stroke 46.5 + Stroke 11 20 4 x M4 x 0.7 Depth 7.5 7.5 11.5 13 12.5 12 5 + Stroke 4 x M4 x 0.7 Depth 6 13 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

Dual Speed Controller with One-touch Fitting Series ASD 1

Flow Direction Symbols on Body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric size 4, 6 8, 10 1/8" 5/32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min}

ASD

Symbol indication of flow direction on the body Meter-out Meter-in Air Flow/Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric 4, 6 6 8, 10 6, 8 1/4" 5/16" 3/8" 1/8" 5/32" 3/16" 1/4" Tube O.D. 1/4" 5/16" 3/8" 3/8" Inch 500 600 700 1200 1300 175 295 350 75 Air flow (l/min(ANR)) Controlled (free)/Flow 7.6 9.1 10.7 18.3 19.8 1.1 2.7 4.5 Eff

CYPSeries

39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension