EX500

24VDC/650mA 16 VOLTAGE INPUT US C TYPE1 IP CODE IP65 R C US R R R R R R R US C US C US C US C US C US C US C SERIAL NO.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

] 100 L/min type 100 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

SZ3B60 [N.C. valve x 2pcs.] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3B60K/With back pressure check valve 4 (A) 2 (B) 5 (R) SOL.a SOL.b 3 (R) 1 (P) 5 (R) 1 (P) 3 (R) SZ3C60 [N.C valve, N.O. valve 1pc. each] SZ3C60 [N.C. valve, N.O. valve 1pc. each] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3C60K/With back pressure check valve 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) 5 (R) 1 (P) 3 (R

Fieldbus System

S Z NS NZ r Pilot type Nil R Internal pilot External pilot Only Nil is available for M5. !

Vacuum Regulator

gauge port (mm) Fitting size VAC/SET Straight R Elbow S Elbow T Elbow U 6, 1/4" 8, 5/16" 10 12 19 20 26 28 3 6 N P A B IRV10-lllZ : With digital pressure switch 55 Air 30 VAC SET VAC side 10.5 35 U 28 57 37.5 S T 16.5 Elbow fitting 5 R l30 10.5 x 4.5 Panel cut Panel plate thickness: Max. 3 34 35 R R 34 15.4 x 5.4 One-touch fitting Pressure switch 4.5 83 63 (mm) Fitting Part Dimensions 21

Basic Type/Direct Mount Type

2 r i q @5 o u y t #0 @0 @8 !9 @2 @3 @7 18b @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q 2b 3b CY3RG15 to 63 !9 @2 @0 @3 #0 @5 @8 @7 o u !7 t 18b CY3RG15 CY3RG15, 20 CY3B CY3R CY3B CY3R !9 !8 @2 @1 CY1S CY3RG15 CY1L Switch Rail Accessory CY1H CY1F Switch Rail Accessory Kit B 100 (N) CYR 15 E Bore size (mm) 6 10 15 Kit no.

ISA2

Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element. PF2 IF Data Switching element OFF Caution R C Leakage voltage Power supply 1.

Compressed Air Preparation Filter

Activated carbon filter Bracket B Bracket A Mounting screws Bracket mounting view Accessories Sold Separately/ International Standard Specific Product Precautions 22 AMK Series Dimensions AMK20 AMK30 AMK40 S N T J D M S N T U D J M U 2 x P 2 x P Q R Q R (Port size) (Port size) G B V C V C B IN OUT IN OUT Maintenance space A Maintenance space A E G AMK50 AMK60 D M J N T S U 2 x P R (Port size

5 Port Solenoid Valve

> 34.5 47.7 P 1 R 3 3 R X 12 P = 25 65.5 U side n PE B 2 A 4 3 SMC A B B 2 A 4 2 SMC A B A 4 B 2 1 SMC A B Stations PE D side P 1 12 X 2n x 1/4" 4(A), 2(B) port Other dimensions are the same as the side ported type.

Sine Rodless Cylinder Series REA/REB

23 25 4 x M8 x 1.25 Effective thread depth 12 CY C 0.1 14.5 B S + Stroke 2 2 CX ZZ + Stroke MQ B Q x R S TC x R W X ZZ C D E(h8) I K NA L P TN Model Nil TF RHC REA50 REA63 Rc 1/4 G 1/4 NPT 1/4 0 86 32 53 30-0.033 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 Rc 1/4 G 1/4 NPT 1/4 0 100 38 66 72.2 26 122 69 32-0.039 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 RZQ Mounting Nuts

SL5200

Ports 2 ports 3 ports 4 ports Code w q w q 2PW 3PW 4PW 2) Refer to gauge guide (P.94) for gauge specifications. 2PW 3PW Sample Order Number Port r e SL5502S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 4PW 40 Specifications SL5502mmA SL5502 SL5510 SL5506 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 1 to 30

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

r p g n i t a r e p o . x a M ) 7 . 0 ( 0 0 1 g i s p * e g n a r g n i t a r e p o l a i t n e r e f f i d e r u s s e r P ) a P M ( ) 6 . 0 ~ 1 . 0 ( 0 9 ~ 5 1 e g n a r . p m e t g n i t a r e p O F 0 4 1 ~ 0 4 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T l w o B e t a n o b r a c y l o P T L A N k n a T d e e F o t u A 5 T L A N 1 * S 1 5 T L A

SFOD-OMT0010

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position mode (mm/s) (mm) (mm/s2) (mm/s2) Selection (mm) (mm) (mm) Axis 1 ABS 100 30.00 1000 1000 0 0 0 0.5 Axis 2 ABS 100 10.00 1000 1000 0 0 0 0.5 1 Axis 3 Axis 4 Axis 1 CIR-L 100 0.00 1000 1000 0 0 0.5 Axis 2 CIR-L 40.00 0 0 0.5 2 Axis 3 0.00 Axis 4 20.00 Axis 1 CIR-R 100 0.00 1000 1000 0 0 0.5 Axis 2 CIR-R 0.00 0

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 ABS 100 30.00 1000 1000 0 0 0 0.5 2 ABS 100 10.00 1000 1000 0 0 0 0.5 1 3 4 1 CIR-L 100 0.00 1000 1000 0 0 0.5 2 CIR-L 40.00 0 0 0.5 2 3 0.00 4 20.00 1 CIR-R 100 0.00 1000 1000 0 0 0.5 2 CIR-R 0.00 0 0 0.5 3 3 0.00 4 20.00 () 2 Step3

58

-500 Basic weight 12.45 (kg) Additional weight 2.23 (kg/100 mm) Cylinder stroke 500 (mm) 12.45 + 2.23 x 500/100 = 23.60 (kg) 3/4 28 to 30 160 3.

Direct Operated

terminal B2 B1 J K J K J K M J K M N Q R S T N.C., N.O., COM.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

DSM-60S DSM-60S DSM-75S DSM-75S (H) Cast iron r t y u i o !

ALF400 to 900, ALT-5/-9

i s p e r u s s e r p g n i t a r e p o . x a M ) 7 . 0 ( 0 0 1 g i s p * e g n a r g n i t a r e p o l a i t n e r e f f i d e r u s s e r P ) a P M ( ) 6 . 0 ~ 1 . 0 ( 0 9 ~ 5 1 e g n a r . p m e t g n i t a r e p O F 0 4 1 ~ 0 4 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T l w o B e t a n o b r a c y l o P T L A N k n a T d e e F o t u A 5 T L A

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.