IZx-OMX0087

800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

Safety Instructions

Connection thread size NPT , NPT, R NPT, R NPT, R NPT, R Standard torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 Connecting Female Thread: Rc, NPT, NPTF 1 16 1 8 Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 4 3 8 1 2 1 8 1 4 3 8 1 2 30 to 60 30 to 60 15 to 45 15 to 30 5 to 7 11 to 13 14 to 16 20 to 22 Courtesy of Steven Engineering

Sine Rodless Cylinder Series REBR Direct Mount Type

6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

Series HAW Water Cooled Aftercooler 1

Description Housing Outside tube Body Flower fin tube assembly Material Note SGP, SS400 STK FC200 C1220T Flower fin Flower fin q w e r q w e r Water chamber cover FC200 t AFF AM Replacement Parts Replacement Parts Misc. HAW22 HAW55 HAW75 HAW37 HAW110 No. Description HAW2 HAW7 Material No.

High Vacuum L Type Valve

Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used, changing only the seal may prove inadequate.

XL-OMY0003

R Kalrez Chemraz VMQ R PLASMA R Perfluoro No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R R Kalrez Greene, Tweed Technologies, Inc.

Compact Manometer Series PPA 1

AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX Maintenance and Other Warning AMR 1. Perform maintenance and inspection on a regular basis.

Series GS40 Digital Pressure Sensor 1

Bracket (Option) AV R 1/8, 1/4 Dedicated mounting screw AU 22 14 (Hex. width across flats) (M4 x 0.7) M5 x 0.8 38 AF 2 26 2-4.5 600 8 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Product weight Model LEJS100 Stroke [mm] 200 300 400 500 600 800 1000 1200 1500 Product weight [kg] 17.6 19.7 21.8 23.9 26.0 30.2 34.3 38.5 44.8 -7- 1.3 Construction *Motorless type Component parts Maintenance parts/Grease pack No. Description Material Remarks Apply for Order No.

VER2000/4000

6 q w e r t y u i Block packing !

VXZ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact, lightweight and large valve capacity Diaphragm VX3 ! VXA VN Wide variations enables a wide range of fluids control.

MQQ

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

AL800/900

(Example) 23-R Nil N F Option Combinations Available Not available Accessary, Option Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right Left Note) -1, -1S-1 and -1S-2 are with metal bowl

EXxx-OMK0006

(R) EEPROM = Memorize data although power is off. (R/W) RAM = Actual memory the SI unit is working with. (R/W). 1. Reset node, Reset com or Power cycle: EEPROM is copied into RAM 2. STORE: Copy RAM (with modified/non modified values) into EEPROM 3.

ML1

, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases

Information

/www.smcpneumatics.ca (800) SMC.SMC1 (762-7621) e-mail: sales@smcusa.com For International inquires: www.smcworld.com 2012 SMC Corporation All Rights Reserved 11-E597 QT -RRD-5M Information AC Servo Motor Driver Series LECSm Power Supply Voltage 100 to 120 VAC 200 to 230 VAC Motor Capacity 100/200/400W Series LECSA (Pulse Input Type/Positioning Type) Incremental Type Absolute Type Up to 7

Low Friction Cylinders Series MQ

6 r t !3 w q e !5 !0 !1 !

20

1 Note Component Parts i u r e q w Description No. Material o Body L Body R Main valve Valve guide Nozzle holder Port Elbow Cover Ring Arm Spring Main valve seal Lever 1 2 3 4 5 6 7 8 9 10 11 12 13 PBT PBT PBT POM t Aluminium alloy Aluminium alloy Anodized Anodized Only for the VMG12 PBT Stainless steel Stainless steel PBT !4 Stainless steel !5 !0 HNBR PBT !

VNH

VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping Caution VX3 When high temperature fluids are used, use fittings and tubing with heat resistant features. (Self-align fittings, Teflon tubing, Copper tubing, etc.)