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See page 6-13-12 for dimensions. See page 6-13-12 for dimensions.

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol Internal pilot SYJ312 4 SYJ32 2 4 Grommet (G), (H), L plug connector (L), M plug connector (M), M8 connector (W) Electrical entry (A) 2 (A) 2 DC AC 50/60 Hz Coil rated voltage (V) 24, 12, 6, 5, 3 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation 1 (P) 3 (R) 1 (P) 3 (R) Standard With power saving

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

(Equivalent lead (5)Storke [mm] (7)Cable type (6)Motor option Size Without cable Nil Nil Without option Standard cable 16 25 S R B With lock Robotic cable (Flexible cable) 50 100 150 (10)I/O cable length * (9)Driver type * [m] (8)Cable length * [m] Power supply Without cable Nil Nil Without cable Compatible driver voltage(V) Without cable (Connector only) H 2 2 Nil Without driver 1

M plug connector, With lead wire With light/surge voltage suppressor M M plug connector, Without connector With light/surge voltage suppressor MO Grommet G L plug connector Note) Grommet: No latching type, AC and large flow M plug connector Grommet 4-12-6 7 3 Port Solenoid Valve Series VQ100 Standard Specifications Standard type (1 W) High pressure type (1.5W) Low wattage type (0.5 W) Type

Float type auto drain AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) N.C. Note 1) Assembly includes a bracket and set nuts. Note 2) in part numbers for a round pressure gauge indicates a type of connection thread. No indication is necessary for R; however, indicate N for NPT.

6 and !7 from the table above. o Head cover Anodized Aluminum alloy !0 Seal kits consist of items !5, !6 and !

19.4 Load Load UNIT RESET SET 12 to 24VDC + PFA30-(-M) 3 x 7.2 (= 21.6) Panel fitting dimensions 6.4 8-M3 36 +0.5 0 Sensor Blue Brown Black N.C. 1 2 3 4 1 2 3 4 36 +0.5 0 5 6 7 8 OUT1 OUT2 Load Load 12 to 24VDC + 5 6 7 8 PFA31-(-M) The applicable panel thickness is 1 to 3.2mm.

a M O DE SET1 SET2 Maximum suction flow AMJ 2 0 0 4 6 8 10 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) Misc.

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Specifications 0.01m (95% filtered particle diameter) Outlet air filtration degree Max. 0.1mg/m (ANR) (0.08ppm) Note 1) Outlet air oil mist concentration (prior to oil saturation 0.01mg/m (ANR) or less (0.008ppm or less) Note 1) With inlet air oil mist concentration of 30mg/m (ANR) (24ppm) Applicable models IDG3V to IDG50V (standard dew point 20C) (4F)) IDG3HV to IDG50HV (standard dew point

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 [Robotic cable, standard cable with lock and sensor for step motor (Servo/24 VDC)] LE-CP/Cable length: 1.5 m, 3 m, 5 m 1 3 5 LE CP 1 B Actuator side Controller side (8) Connector A (14.2) B1 (Terminal no.) Connector C (Terminal no.)

I1 = 0.03 x (0.02 + 0.01)/12 = 1.25 x 10-kgm I2 = 0.006 x (0.005 + 0.005)/12 + 0.006 x 0.007 = 0.32 x 10-kgm I = 1.25 x 10+ 0.32 x 10-6 I1 = m x (a + b)/12 I2 = m x (a + b)/12 + m x H I = I1 + I2 Inertial moment = 1.57 x 10-kgm Kinetic energy 6 1/2 x I x Allowable energy = 2 /t (: Terminal angular velocity) : Rotation angle (rad) 1/2 x 1.57 x 10-6 x (2 x ( /2)/0.2) Confirm that the load's

For manifold type 30, 31 Large flow type (Cv: 0.012) 1 SY1 3 A 5 L M3 : Body ported Large flow type (Cv: 0.012) 5 SY1 4 A M 1 : Base mounted 3 port Rated voltage Port size 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Nil: Without sub-plate M3: With sub-plate Sub-plate type For manifold type S41 Large flow type (With gasket and screws) Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3

unit DIN rail 8-M3 3 x 7.2 ( = 21.6) 36 2-3.4 6.4 15 1 2 3 4 6.5 26 FLOW SWITCH SMC 35.5 m30 56 (4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 7 Series PFA Digital Flow Switch for Air Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70 % PFA5 0-m m (N) 1 5 Sensor Unit 98 56 82 60 42 6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.