RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

100

6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

Rotary Actuator/Vane Style Series CRB2

CDRB2BW10/15-S CDRB2BW20/30-S 6 x Q Circumference divided in 6 equivalents 3 x Q (CDRB2BW10) 6 x Q (CDRB2BW15) Including A port B port A port B port A port B port A port B port (34.5: Connector type) 2 x R 1 (30) 24 2 x R 25.5 Auto switch Auto switch 2 15 20.5 (26.5: Connector type) 1 The length is 24 when any of the following auto switches are used: D-90/90A/S99(V)/T99(V)/S9P(V) The length

AW

C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C1SF-6 AD17-6 C1SF-2 AD17-2 C2SF-C AD27-C C2SF-J C2SF-CJ C2SF-6 C2SF-6C AD27-6 AD27-6C C2SF-6J C2SF-6CJ C2SF-2 AD27-2 C2SF-2J C3SF-J C3SF-W C3SF-6 AD37-6 AD38-6 C3SF-6J C3SF-6W C3SF-2 AD37-2 AD38-2 C3SF-2J C3LF-8 AD37-8 AD38-8 C3LF-8J Polycarbonate Nylon Metal Metal bowl

MG

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

Dual Rod Cylinder Series CXSJ/CXS

6 @6 @3r !8 @4 !9 w !3 !0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

CM2

, refer to pages 6-4-21 to 6-4-22.

Digital Flow Switches

Note 6) When the current output is selected.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Fieldbus system EtherNet/IP compatible SI Unit

value PortConfig Port 1 0: Deactivated 1: IOL_Manual 2: IOL_Autostart 3: DI_C/Q 4: DQ_C/Q 6 0..7 PortMode 0: No Device Check 1: Type compatible Device V1.0 2: Type compatible Device V1.1 3: Type compatible Device V1.1, 7 0..7 Validation&Backup Backup+Restore 4: Type compatible Device V1.1,Restore 8 0..7 Reserved 0 0: Automatic setting 1 to 3: 0.4 ms 4 to 63: 0.4 to 6.3 ms (by 0.1 ms) 64

MXH Series Compact Slide

Q Q Q Q Q Q Q Q Q Q Q Q Q Q MXH Series 6, 10, 16, 20 The use of a recirculating linear guide produces a slide table with excellent rigidity, linearity and non-rotating accuracy.

KQ2

(mm) 3.2 4 6 Mass (g) D 2 x applicable tubing Model D L Q M KQ2L23-00 KQ2L04-00 KQ2L06-00 3 6 6 9.6 10.4 12.8 17.5 18 20 4.3 4.5 5.3 15.5 16 17 3 4.2 11.4 2.5 4.2 9.0 8 KQ2L08-00 15.2 23 6 18.5 21.6 14.9 10 10 KQ2L10-00 18.5 26.5 6.8 21 35.2 25.0 17 D 12 KQ2L12-00 20.9 28.5 7.5 22 50.2 39.7 21 16 KQ2L16-00 26.5 34 10 25 100 (84) 29 8 4.2 Note 1) D: Max. diameter Note 2) ( ): Valves for soft

VCC

RETURN RETURN RETURN 3 port valve IN IN IN IN PA PA PA PA IN PA IN PA OUT 2 pcs. 4 pcs. 6 pcs. 2 pcs. 4 pcs. 6 pcs.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A Ball bushing bearing #5 @5 #0 @6 @8 !7 !3 #8 !2 @1 !

Thermo-chiller

Q: Heat generation amount I: Current Users equipment q Derive the heat generation amount from the power consumption.

Series AK1000

However under Japanese regulation, only MPa is available in Japan. w w w q q q Sample Order Number Port AK1302S e q 6 6 6 w 6 6 6 r e 2P 3P 4PL 2P 3P 4PL V3 V3 MPA MPA qIN wOUT erGauge port (Outlet) 0 Specifications AK1302 1 to 30 psig (0.007 to 0.2 MPa) AK1306 2 to 60 psig (0.014 to 0.4 MPa) AK1310 2 to 100 psig (0.014 to 0.7 MPa) AK1315 5 to 150 psig (0.034 to 1.0 MPa) Operating Parameters

ZP

8 7 9 3.3 4.7 9.1 10.1 2.5 4 5 4 ZQ 5 6 8 32 34 29 39 57 ZPY32B Applicable Tubing Applicable Tubing ZF Q R Applicable tube P Q R Applicable tube P N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 13.5 15.5 5 7 1.8 2.5 ZP N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 14.5 16.5 5 7 1.8 2.5 13.5 15.5

Direct Operated

Class B coil: AWG20 Insulator O.D. 2.4 mm 2 2 Lead wire Light q Without electrical option With light w AC/Class H coil circuit Seal (VCW20-15-6) Wiring conduit (Bore size G1/2 Tightening torque 0.5 to 0.6 Nm) Grommet, Conduit terminal Grommet, Conduit, Conduit terminal ZNR Rated voltage Lead wire color 1 1 q w DC Red Black SOL.