MXW

depth 12 (N 1) x H G Bottom through-hole 5.1 GG HH H 7 NN-M6 x 1 thread depth 12 depth 5.5 6H9 +0.030 0 Bottom through-hole 5.1 F E 6H9 +0.030 depth 5.5 0 (mm) H HH Z NN N L K J GG G F E Model MXW20-150 48 412 1 6 66 41 169 29 101 216 113 MXW20-175 52 462 1 6 91 66 194 50.5 128.5 237 140 MXW20-200 48 512 1 7 116 91 219 56 152 264 164 MXW20-225 52 562 1 7 141 116 244 73.5 177.5 288 189

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

F . Bponse time 1.zms .LeadwiE Oil pr@f vinyl, 63.4, 0.008 in.'? 2 wne (Red Black),20 inx . lmpacl rAislance " 30G . tNularion Esistance 50m or more under the lest voltag 500VDC (BeMen case and cable) . Wirhsland vohaSe 1500VAC 1 min (BeMeen .6e and cabls) . Amb enl lenpralur 10 60'C 04'l4O"F) . Prol*lion slruciure.

REA/REB

due to Roll Moment Load Guide central axis (1 axis type) F F A F For the double axis type, this is the cylinders central axis.

MXW Series Long Stroke Slide Table

hole 5.1 F E 6H9 +0.03depth 5.5 0 HH H Model E F G GG J K L N NN Z 48 MXW20-150 113 216 101 29 169 41 66 6 1 412 52 MXW20-175 140 237 128.5 50.5 194 66 91 6 1 462 48 MXW20-200 164 264 152 56 219 91 116 7 1 512 52 MXW20-225 189 288 177.5 73.5 244 116 141 7 1 562 48 48 MXW20-250 215 312 203 59 269 141 166 8 2 612 151 MXW Series Long Stroke Slide Table Dimensions MXW 25 Stroke: 100, 125

Cylinder

20 8 29 5.5 24 1 9 8 28 131.7 1 6 1 25 L. 15 Series CJP Accessories Single Knllckle Joint : Pliluble lf!

VZS

Electrical entry F: Plug-in Option Port size Nil 01 Without sub-plate Rc 1 8 02 Rc 1 4 2 50 01 F Z VZS3 1 Plug-in 5 G 50 VZS3 01 Non plug-in 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Symbol Coil rated voltage Thread type Option 2 position single 1 2 3 4

VZ100/300/500

N T Rc F: With foot bracket G NPT SYJ NPTF Port size VK 01 1 8 Light/Surge voltage suppressor Note) Bracket is not mounted.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

'i,-.1-)^' l z N F Noz l!

REC

7 1 1 Head cover Aluminum alloy Rod seal B NBR White anodized w !8 1 1 Cylinder tube Aluminum alloy Piston seal NBR Hard anodized e !

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

VM

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

CY1

6 @4 @1 @8 @3 @5 @6 e y r u q o !1 #2 i @9 w $1 #1 #0 @7 CY1L10 to 40 @2 #9 @0 $0 t !4 !5 !9 #5 $2 #8 !2 !0 !6 !7 @4 @1 !8 @8 $1 #6 #7 F Enlarged view F 10,15 $1 @3 @5 @6 e y r q #2 !3 !1 o i u w #1 @7 #0 10 Parts list Parts list No. Description Slide block No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1 !

3 Port Air Operated Valve Series SYJA300

(Value in the initial state) VA Body ported SA Series SYJA500 VA With Bracket VM VR Air operated valve type SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not mounted.

LV50-OMQ0002

E Electric conductivity This means "full span" or "full scale", and indicates varied analogue output range at rated value.For example, when analogue output is 1 to 5 V, F.S.=5[V] 1[V]=4[V]. (Reference: 1%F.S. = 4[V] 1% = 0.04[V]) F F.S.(full span/full scale) Fluid contact part A part that comes into physical contact with the fluid. Fluids The fluid(s) that the product can measure.

Vacuum Unit

C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

IDU/IDF

Model Primary voltage Secondary voltage A B C D E F Capacity FUSE B IDF1D-1 to 11C-1 IDU3D-1 to 11C-1 IDF15C-1 IDU15C-1 IDF1D to 11C-1 IDU3D to 11C-1 IDF15C-1 IDU15C-1 380, 400, 415VAC (50Hz) 380 to 420VAC (60Hz) IDF-TR500-3 15 500VA OUT PUT IN PUT Single phase Single turn 100VAC (50Hz) 110VAC (60Hz) 22 IDF-TR1000-3 1kVA 230 207 190 210 160 9 E D 4-F 420, 440, 480VAC (50Hz) 420 to 520VAC

Title not found

/8 M6 x 1 1/2 Hex 10-32 Thd. 1/2 Hex M6 x 1 1/2 M6 x 1 10-32 to M5 (F) EX-M6 (M-F) 92 10-32 to 1/8 (F) M6 to 1/8 BSPT (F) M6 to 1/8 (F) 1/2 1/8 NPT 11/16 13/16 Ref. 13/16 Ref. 5/16 9/32 5/16 1/2 5/16 1/2 7/16 Hex 45 1/4 .314 Major Dia.

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.