V

Double Max 10ms Max 15ms 3-position Max 20ms Max 25ms Life 200 million cycles or more Ambient and Fluid Temperature ( N o t e 3 ) -10 to +50C (14~122F) -5 to +50C (23~122F) Lubricant ( N o t e 4 ) Not required Not required Manual Override Non-locking, Push Non-locking, Push Protection Dustproof Dustproof ( N o t e 2 ) Calculated on the basis of JIS B 8375-1981 (Supply pressure 0.5 MPa {5.1

Digital Flow Switches

0 to 50C Linearity Note 1) 5% F.S. or less 3% F.S. or less 2% F.S. or less 1% F.S. or less Repeatability Note 1) 2% F.S. or less (15 to 35C based on 25C), 3% F.S. or less (0 to 50C based on 25C) Temperature characteristics Pulse output, N channel, open drain, output for display unit PF2W3.

PF2A/PF2W

0 to 50C Linearity Note 1) 5% F .S. or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.

Table of Contents

Model ZR1-FX Vacuum to 0.5 MPa 5 to 50C 30 m PVF 0.1 kg Operating pressure range Operating temperature range Filtration efficiency Element Weight (With bracket) Note) If not operated within the specified range of pressure and temperature, trouble may be caused.

Digital Flow Switches, Series PF2A, Series PF2W

0 to 50C Linearity Note 1) 5% F.S. or less 3% F.S. or less 2% F.S. or less 1% F.S. or less Repeatability Note 1) 2% F.S. or less (15 to 35C based on 25C), 3% F.S. or less (0 to 50C based on 25C) Temperature characteristics Pulse output, N channel, open drain, output for display unit PF2W3.

Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32/40, 16), Stroke: 300mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting:

Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 50mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (

Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32/40, 16), Stroke: 50mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7

Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: C (LEY25, 3; LEY32/40, 4), Stroke: 200mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting:

Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: C (LEY25, 3; LEY32/40, 4), Stroke: 150mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 600mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 50mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 50mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 100mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw

Size: 25, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 400mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw

Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 400mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw Mounting

Size: 25, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 50mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw

Size: 25, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32, 16), Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32, 16), Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32, 16), Stroke: 300mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw