25, 32, 40, 50, 63 , Maximum operating pressure: 0.7MPa , Ambient temperature: -10 to 60C, CYL, RODLESS, CLEAN ROOM, ACTUATOR, CY3R MAGNETICALLY COUPLED CYL, G5, 15MM CY3R CLEAN ROOM, .96214 lb, ModelBore size (mm)Port sizeLubricationStandard stroke (mm)Maximum manufacturable stroke (mm)Cushion RubberAir12-CY3R1515M5 x 0.8Non-lube50, 100, 150, 200, 250, 300, 350, 400, 450

COUPLED, ACTUATOR, CY3R MAGNETICALLY COUPLED CYL, H5, 20MM CY3R CLEAN ROOM, 1.32277 lb, ModelBore size (mm)Port sizeLubricationStandard stroke (mm)Maximum manufacturable stroke (mm)Cushion RubberAir12-CY3R2020Rc1/8 NPT1/8 G1/8Non-lube100, 150, 200, 250, 300, 350,400, 450, 500, 600, 700, 8001300(Both sides)?

Please contact us for the latest version.sales@ocaire.com, CYL, RODLESS, CLEAN ROOM, ACTUATOR, CY3R MAGNETICALLY COUPLED CYL, I5, 25MM CY3R CLEAN ROOM, 1.87392 lb, ModelBore size (mm)Port sizeLubricationStandard stroke (mm)Maximum manufacturable stroke (mm)Cushion RubberAir12-CY3R2525Rc1/8 NPT1/8 G1/8Non-lube100, 150, 200, 250, 300, 350,400, 450, 500, 600, 700, 8001300(Both

COUPLED, ACTUATOR, CY3R MAGNETICALLY COUPLED CYL, I5, 25MM CY3R CLEAN ROOM, 1.93603 lb, ModelBore size (mm)Port sizeLubricationStandard stroke (mm)Maximum manufacturable stroke (mm)Cushion RubberAir12-CY3R2525Rc1/8 NPT1/8 G1/8Non-lube100, 150, 200, 250, 300, 350,400, 450, 500, 600, 700, 8001300(Both sides)?

COUPLED, ACTUATOR, CY3R MAGNETICALLY COUPLED CYL, I5, 25MM CY3R CLEAN ROOM, 2.31485 lb, ModelBore size (mm)Port sizeLubricationStandard stroke (mm)Maximum manufacturable stroke (mm)Cushion RubberAir12-CY3R2525Rc1/8 NPT1/8 G1/8Non-lube100, 150, 200, 250, 300, 350,400, 450, 500, 600, 700, 8001300(Both sides)?

COUPLED, ACTUATOR, CY3R MAGNETICALLY COUPLED CYL, I5, 25MM CY3R CLEAN ROOM, 1.97376 lb, ModelBore size (mm)Port sizeLubricationStandard stroke (mm)Maximum manufacturable stroke (mm)Cushion RubberAir12-CY3R2525Rc1/8 NPT1/8 G1/8Non-lube100, 150, 200, 250, 300, 350,400, 450, 500, 600, 700, 8001300(Both sides)?

Please contact us for the latest version.sales@ocaire.com, CYL, RODLESS, MAG.COUPLED, ACTUATOR, CY3B MAGNETICALLY COUPLED CYL, GD, 15MM CY3B DOUBLE-ACTING, 1.10231 lb, ModelBore size (mm)Port sizeLubricationStandard stroke (mm)Maximum manufacturable strokeCushion RubberAir12-CY3B1515M5 x 0.8Non-lube50, 100, 150, 200, 250, 300, 350, 400, 450, 5001000(Both sides)?

Please contact us for the latest version.sales@ocaire.com, CYL, RODLESS, MAG.COUPLED, ACTUATOR, CY3B MAGNETICALLY COUPLED CYL, GD, 15MM CY3B DOUBLE-ACTING, 1.10231 lb, ModelBore size (mm)Port sizeLubricationStandard stroke (mm)Maximum manufacturable strokeCushion RubberAir12-CY3B1515M5 x 0.8Non-lube50, 100, 150, 200, 250, 300, 350, 400, 450, 5001000(Both sides)?

COUPLED, ACTUATOR, CY3B MAGNETICALLY COUPLED CYL, GD, 15MM CY3B DOUBLE-ACTING, 9.36964 lb, ModelBore size (mm)Port sizeLubricationStandard stroke (mm)Maximum manufacturable strokeCushion RubberAir12-CY3B1515M5 x 0.8Non-lube50, 100, 150, 200, 250, 300, 350, 400, 450, 5001000(Both sides)?

Digital Flow Switches

PF2A711,511 3.0 1.0 10 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.5 0.8 8 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 Flow rate (l/min) 0 100 10 25 50 75 5 2.5 7.5 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) PF2A721,521 PF2A751,551 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450

PF2A/PF2W

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Component Parts No. q w e r t Description

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Component Parts No. q w e r t Description

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Protective ON/OFF, 11.5 Power supply with/without load Three phase AC200/200-280V10% (50/60Hz) 5.2 54.8% (50%/50%) Dimensions 700 (450) W x 845D x 1705H ( ): in case single type Conventional type: INR-499 Safety EMI S2, EU EMC directive conformity Circulating fluid gauge, Back flow prevention of circulating fluid, etc.

Vacuum System Peripherals:

At compressor discharge concentration 30 mg/m3 (ANR) Modular, Mist separator Series AFM Rated flow rate (l/min (ANR)) Oil mist concentration at outlet side 200 450 1100 Filtration (m) Port size Rc Model AFM20 AFM30 AFM40 AFM40-06 1 8 1 4 , , , , Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) 1100 1 4 3 8 0.3 1 4 3 8 1 2 3 4 At inlet pressure 0.7 MPa (Rated flow depends on inlet pressure.)

VQ4000

Dust-tight, Jet-proof Enclosure: Enclosure: Optional IP65 rating Optional IP65 rating Cylinder operation speed Cylinder bore size mm Valve width mm Cv Rubber seal (Metal seal) Cylinder speed mm/s Individual wiring style 40 50 63 80 100 125 140 150 kit (Connector) C 300 24.5 2.2 (2.0) 450 600 750 Pressure: 0.5MPa, Load rate: 50% Note) Cylinder speed varies according to piping construction

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Pressure: 0.5MPa Pressure: 0.5MPa speed Effective area Load ratio: 50% Load ratio: 50% (mm/s) mm2 Cylinder stroke: 60mm Cylinder stroke: 300mm (Cv) 6 10 16 20 25 32 40 150 300 VQD1151U M5 X 0.8 (Large flow 1.5 450 capacity) (0.08) 600 Characteristic values mentioned in the catalog are typical values and are not to be guaranteed. 750 1.13-1 Series VQD1000 Precautions Be sure to read before

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

light 96 MAX.10 64(67.5) 92.5 Cover dia 1.5 Cross section 0.23mm2 Pg.7 R P Applicable cord O.D. 3.5 to 7 3 1 : AC 93.5 86 M plug connector (M) R P 69.5(74.5) 300 (Lead wire) 86(87) 3 1 82.5(83.5) 98.5 Indicator light Cover dia 1.5 Cross section 0.23mm2 : AC Dimensions n: Stations (Max.20) Equation L1=20n+8 L2=20n+26 L n 2 48 66 87.5 98 18 368 386 412.5 423 19 388 406 437.5 448 20 408 426 450

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The earth's acceleration equals, on a lalitude of 450 (Standard lor Europe and N. America), 9.80629 m.s'" or 32.17 ft sec?. With a horizontal movement the weight is a zero load as it is fully born by the construction.

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Theretore, if lhe conditions of application fall within these factors, the calculation is nol necessary. 1348 O Kinetic energy at load will be worked out aslollows: Ek: Kinetic energy at load (kglcm) z ; eoo -. 675 450 er2$v, w: Load weight (kgf) g: Acceleration of gravity 980 (cm/s'z) v: Piston speed (cm/s) {Average speed x 1.2, refer to particle 3) O ll piston speed exceeds average speed

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D0I/$[E lln fiee|ficrilotr ltr tdts ltU ||UT & $lt tmwoil fi[hry 1200 psi (8.3 Mpa) Proof Pressur 450 psi (3.1 Mpa) -40.F 200'F G40'C 93'C) 7 Ncm3/min, or less ANSUASME 1.20, 1-1983 (NPT thread) Applicable Tubing hftEllf,] elcmenfi mobrlNl SIVIC CorDoration of America has a policy of continual product dsvlopment and resrws rhe dgm to change diflEnsions or specilications without prior notilication