Mechanically Jointed Rodless Cylinders MY316 300 400 500 500 400 300 950 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 240 N 100 100 30 40 50 50 40 30 20 20 10 10 1 2 3 4 5 10 20 30 10 5 4 3 2 1 0.2 0.4 0.3 m1max m3max m1max m2max m3max m2max Weight (kg) Weight (kg) MY320 MY340 500 400 300 300 400 500 370 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 1500 N 100 100 50 40 30 30 40
0.49 to 4.90 m/s2 0.98 to 9.80 m/s2 1.96 to 19.6 m/s2 Nominal size:16 4(5)kg 1.25(1.25)kg 6(10)kg 2.5(2.5)kg Maximum load weight NOTE 1) Nominal size:25 11(20)kg 4(5)kg 8(10)kg 2.5(2.5)kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (mechanical stoppers), 1 intermediate position 0.01mm Both ends Repeated Positioning
Insulation resistance 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller. Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Noise resistance 200 g 240 g Weight Note 3) Port size (Rc, NPT, G) 1/8, 1/4 3/8 1/2 Note 1) The system accuracy when combined with PF2A2/3.
Type of impact 16 12 s 20 15 m 25 15 32 19 40 1 2 24 m2 Kinetic energy E1 50 30 63 37 Thrust energy E2 Fs Fs + mgs Fs mgs 80 40 100 40 Absorbed energy E E1 + E2 Rubber Bumper (10 only) Positive Stroke from One End Due to Pressure Symbol : Speed of impact object (m/s) F: Cylinder thrust (N) s: Shock absorber stroke (m) m:Weight of impact object (kg) g: Gravitational acceleration (9.8 m/s2
Acceleration Deceleration Can be set in units of 1mm/s2.
S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light/surge
P1 LED lever meter Sensor S1 S3 Red is on: Output OFF Green is on: Output ON S4 S2 + P2 Red 1 Gap too big S1, S2: Fixed orifice S3: Variable orifice (Set via adjustment knob) S4: Detection nozzle Red 2 Green 1 BEST POSITION The bridge circuit is constructed as shown in the diagram. Position the work piece in front of the nozzle (S4).
Dimensions 4-3.2 circuit board mounting hole Circuit board type DC24V MADE IN JAPAN + PCW-EC16Z00 4 4 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 DC24V MADE IN JAPAN + PCW-EC16Z01 28.3 YMX-F4 45 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 4.1 2 3 4 (48.5) 5.1 (50) 133 10.5 10.5
SEMI S8 SEMI S8 is a guideline on ergonomics which is more detailed than the ergonomic requirements in Section 14 of SEMI S2. SEMI F47 SEMI F47 is a SEMI standard which stipulates guidelines regarding voltage sag immunity. Semiconductor manufacturers require this standard for temperature control equipment, just like SEMI S2.
Without release valve Without pressure sensor/switch for vacuum With pressure sensor 30 m/s2 Vibration resistance Note 1) Pilot operated dual 2 port Pilot operated 2 port Valve configuration 20 m/s2 0.3 to 0.6 MPa Operating pressure range With switch for vacuum Poppet seal Valve construction Without pressure sensor/switch for vacuum With pressure sensor 150 m/s2 Impact resistance Note 2)
-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.
Do not drop, bump, or apply excessive impacts (300 m/s2 or more for reed switches and 1000 m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.
Parts list * is different from standard type (C(D)S2) No.
Max acceleration/deceleration [mm/s2] Positioning repeatability [mm] 0.01 Lost motion[mm] Note3) 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] Note4) 50/20 Actuation type Ball screw (LEKFS)Ball screw + Belt (LEKFSR/L) Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor output [W]/size [mm] 100W/40
Impact/Vibration resistance (m/s2) Note) 150/50 Enclosure Dustproof Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.
Standard Specifications VQ7 Compact yet provides a high flow capacity 1/4: C: 3.4 dm3/(sbar) Low power consumption: 1.8 W DC Fluid Air/Inert gas Maximum operating pressure Minimum operating pressure 1.0 MPa 0.1 MPa EVS Valve specifications Electricity specifications Ambient and fluid temperature 1.5 MPa Proof pressure VFN 10 to 60C (1) Non-lube (2) Non-locking push type (Flush) 150/50 m/s2
without control unit and bracket mounted, Others 30 m/s2, whichever is smaller for 2 hours in X, Y, Z direction each (De-energized) Vibration resistance Without control unit and bracket mounted: 980 m/s2, Others: 150 m/s2 in X, Y and Z direction, 3 times each (De-energized) Nil: Rc 1/8, N type: NPT 1/8, F type: G 1/8 4-core, oil resistant, cable (0.64 mm2) with M12, 4-pin pre-wired connector
Note 3) For detailed specifications other than the above, refer to the separate technical operation manual that can be downloaded from SMCs website (http://www.smcworld.com/). 10 to 150 Hz with a 0.035 mm amplitude or 4.9 m/s2 in each X, Y, Z direction for 2 hrs (De-energized) 147 m/s2 in each X, Y, Z direction, 3 times (De-energized) Standard CE marking, UL (CSA) Communication connector
Compatible Compatible Compatible ORIG direction Set in units of 1/s Speed during return to origin position Set in units of 1 mm/s ORIG speed No setting required Set in units of 1/s2 Acceleration during return to origin position Set in units of 1 mm/s ORIG ACC Continuous operation at the set speed can be tested while the switch is being pressed.
Address Description of bytes tion unit range Input Mode D0410 4 Target position [m] Note 1) 1 Note 1) No D0412 2 Positioning time [0.01s] 1 0 to 6000 No D0413 2 Speed [mm/s] 1 0 to 400 No D0414 2 Acceleration [mm/s2] 1 0 to 60 No D0415 2 Deceleration [mm/s2] 1 0 to 60 No 1 to 20, Pushing speed [mm/s] D0416 2 1 No 32768 to Note2) 32788 Thrust setting value Note 3) More than D0417 2 1 Yes [