OMS0020

If those values are input, the Return to Origin operation cannot be performed as the speed becomes 0 mm/s.

VM

VR2110-01 Model Supply pressure 0.1 to 1.0 MPa Signal pressure 0.25 to 0.8 MPa SA 0.5 to 60 s Time delay Repeatability 10% F.S.

A

I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS ON THIS

E-P HYREG ® Series VY1

3% F .S. 5% F .S.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Nil S n 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.

IDG

If the membrane air dryer,s body is cooled by the surrounding air, water drops may accumulate inside and reduce its dehumidification capacity. 14-19-8 5 Membrane Air Dryer Series IDG Precautions Be sure to read before handling.

Refrigerated Air Dryer

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

How to Order Valve Manifold Assembly Nil S R RS Internal pilot Internal pilot / Built-in silencer External pilot External pilot / Built-in silencer Ordering example (SS5J3-60SVl-l) There is no need to enter anything when the SUP/EXH block mounting position M is selected. For built-in silencers, the 3/5(E) ports are plugged.

Modular Type Regulators Series AR

Drain) PANEL FITTING IN OUT Z CC Bowl Detail EE (AW20) AA K L V U X W T J S Y Q F Bracket and Mounting Nut (Optional) H IN OUT Note: Sight glass not applicable to AW20.

48

Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Valve Single Unit

of 0.5 MPa) Type of actuation Without light/surge voltage suppressor S, Z type 26 or less 2 position single 18 or less 22 or less 2 position double 32 or less 38 or less 3 position 19 or less SX7000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) Type of actuation Without light/surge voltage suppressor S, Z type 38 or less 2 position single 27 or less

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

SMC Pneumatic Clean Series

to 1000 11 7 18 3/8 40 35 86 32 130 116 101 105 188 M10 x 1.25 M18 x 1.5 11.5 Head side flange style (G) / CA2G, CA2G 10112122Relief port 2-cushion valve M5 x 0.8 GA 6 4-FD 4-J GB Width across flats KA 2-RcP Width across flats B1 FV FY D B E MM H1 AL A N C 18 K N 7 B H S + Stroke FT FX ZZ + Stroke FZ (mm) AL Bore size Stroke range Symbol B B B1 C D E FV FD FT J FX FY MM M FZ P S ZZ A GAGB

Programless controller (with stroke study) Step motor (servo 24 VDC)

Speed Positioning operation 0mm/s 3) BUSY output turns off.

Series IDG

Order 1l/min = 0.035SCFM IDG 10 H 03 Optional specifications Flow rate by size Symbol Contents Size Outlet air flow rate Purge air flow rate l/min (ANR) Size 5 10 20 30 3 50 60 75 100 50/6 3 25/3 Nil P R None (standard) With fitting for purge air discharge Flow direction (rightleft) With dew point indicator 5 100/11 200/22 300/35 500/60 600/65 750/80 1000/110 10 20 30 50 60 75 100 S

EXxx-OMY0004

Safety Mode (Channel Passivation): In the event of a fault the affected channel(s) are passivated and "0" substitute values are used in place of the normal channel value(s) within the process image. All other channels remain operational.

Compact Guide Cylinder Series MGQ

B0.2 2d or more 0.1 MGJ MGP MGQ 0.01 100 500 400 300 200 MGG Max. speed (mm/s) MGQ without a cushion (XB6, XC22) MGC D C0.2 1000 By-pass port dia.

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

q"s

I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !