VQZ1000/2000/3000

Note 2) Standard lead wire length: 300 mm Function 0 1 Metal seal Rubber seal Symbol Specifications DC (1.0 W) AC Coil voltage (3) Nil Standard 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC High pressure (Metal seal only) (1) (1.0 W) K (0.5 W) Low wattage type Y (2) R External pilot Note 1) Option Note 2) For details about external

CE

, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and

CE

, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and

CE

41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

LTF6 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 Load point distance (mm) 100 1000 Load point distance (mm) LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load

RLQ

Extension locking Retraction locking Retraction locking Series Variations Bore size (mm) Standard stroke (mm) Locking direction Mounting Series 20 25 30 40 50 75 100 LOCK 32 Extension lock Throughhole LOCK 40 RLQ LOCK 50 Retraction lock Both ends tapped 63 9-12-1 2 Series RLQ Specific Product Precautions 1 Be sure to read before handling. Selection Warning 1.

Compact Cylinder with Lock Series CLQ

1/4 Front cylinder port 10.5 13 Approx. 41 47 M10 x 1.5 effective thread depth 15 86 20 19 50 64 22 11 1.6 Minimum lead wire bending radius 10 Dust cover (manual unlocking unit) 6.6 Auto switch D-A7, A8 4-13 Counter bore depth 9.5 Rc 1/8 unlocking port (unlocks when pressurized) 17 50 64 4-11 Flat washer 4 pcs.

VQ5000

Seal type Nil E With Without light, with surge voltage suppressor Metal seal Rubber seal 0 1 Coil voltage 1 2 3 Stations Function D side U side 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) R Note 2) Note 1) Applicable to DC specifications.

MU

1 NBR Rod seal !2 Urethane Bumper !3 Replacement Parts: Seal Kits Bore size (mm) Kit No. Contents 25 32 40 50 63 MUB25-PS MUB32-PS A set of above numbers !1, !2 and !3. MUB40-PS MUB50-PS MUB63-PS Seal kits consist of items !1, !2 and !

Smooth Cylinder

32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13 Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided below are

VZ100/300/500

M plug connector (M) 1 8 24 VAC 50/60 Hz 48 VAC 50/60 Hz VFN 110 VAC 50/60 Hz Non-locking push type 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC Locking type (Slotted) VZ300 DIN terminal (D) Locking type (Manual) 1.2 2 3 (A R) 1 8 VZ500 2.7 2 3 (A R) 1 8, 1 4 4-6-1 2 Series VZ100/300/500 Manifold Variations A port size One-touch fitting P/R port size Applicable tubing O.D.

Vacuum Ejector Series ZM

ZM -E15CN . 1 pc. Nil 30 50 0.6 m ZQ 3 m 5 m ZS-20-5A-50 .1 pc. ZH Table (2) How to Order Connector for Supply Valve and Vacuum Release Valve ZU Caution 1A 36 VJ10 (Applicable to 100 VAC only) ZL When using AC, the DC solenoids are operated via a rectifier.

ITV

Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

VQ7-6/7-8

L approx. 500) Prewired connector (M12) (L approx. 500) PA R2 P R1 PA R2 R1 2-7.5 Mounting hole Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole Indicator light 49 (64) 49 (64) 108.5 (121.5) 108.5 (121.5) 50 (63) 32 (42) 50 (63) 32 (42) 5 3 5 3 38 (53) 38 (53) 1 23 (30) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P

3 Port Solenoid Valve Metal Seal Series VZ200 1

5 Pilot valve assembly How to Order Pilot Valve Assembly SCZ2 G 1 1 Rated voltage Series VZ200 1 100 VAC, 50/60 Hz Pilot pressure exhaust Manual override Electrical entry 2 200 VAC, 50/60 Hz 1 Spacer side exhaust (Type 20) 3 110 VAC, 50/60 Hz Nil Push type (Safety style) G H L LN L plug connector With lead wire 600 mm lead wire 300 mm lead wire 4 220 VAC, 50/60 Hz Grommet B Locking type

Compact Cylinder/Guide Rod Type Series CQM

2 x RA 2 x 2 x OA CQS Both ends tapped (CQMA) CQ2 RQ (mm) CQM Without auto switch With auto switch Bore size (mm) Stroke range (mm) P P EA EB EC MU A B F Q A B F Q TN TF TN TF 5 5.5 11.5 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc 1/8 NPT 1/8 G 1/8 7.5 10.5 G 1/8 Rc 1/8 NPT 1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc 1/8 NPT 1/8 G 1/8 8 11 G 1/8 56.5 39.5 8 11 52 50 41.4 Rc

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. + P.627 10-SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 23 (AR) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P.604 10-SYJ500 Push-turn locking lever type DIN terminal 1.2 23 (AR) 1/8 (SYJ500, 700 only) P.615 10-SYJ700 M8 connector 2.7 23 (AR) 1/8, 1/4 P.627 Note) All AC voltage models have built-in

Guide Cylinder Series MGG

Bore size (mm) P Y Z Y X T W S V R Q R U 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 Rc 1/8 100mm or more 88 250 to 400 157 80 30 40 12 26 48 12 21 14 82 Rc 1/8 125mm or more 88 350 to 500 175 80 37 13 46 57 31 12 21 14 100 Rc 1/8 150mm or more 90 350 to 600 201 82 37 52 16 38 65 12 21 14 114 Rc 1/8 200mm or more 101 350 to 800 238 92 44 62 20 47 84 12 25 15 138 Rc 1/4 250mm or more 116

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

Clamp Cylinder with Lock Series CLK1

Symbol Auto switch positioning and mounting 40 50 63 2 pcs. 1 pc. "n" pcs. Model A B Same side Same side 8 0 0 D-P7, D-P8 25 25 25 50 + 65(n-2) 50 50 D-P7, D-P8 D-P5 Approx. Hs 45 49 54.5 Approx. Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx.