VZA200/400

VVZ400-32A-21 pc. 1798 Series VZA200/400 3 Port Air Operated Valve Dimensions Body ported : VZA2 2-P-M5 Pilot port M5 x 0.8 2 x 2.8 Mounting hole 2 x 2.8 mounting hole Manual override (Non-locking) 3 x M5 x 0.8 Foot bracket Body ported : VZA2 2-P-M5-F SYA SYJA VZA VFA VFRA 2 x 3.5 mounting hole Manual override (Non-locking) VA Pilot port M5 x 0.8 3 x M5 x 0.8 1799 Series VZA200/400 Dimensions

ZSE30/ISE30

kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE OUT OUT OUT OUT OUT SET SET SET SET SET With One-touch fitting (4, 6, 5/32", 1/4") Reduced dimensions in piping direction 17.8 mm reduction Straight type 12.4 mm reduction Elbow type 14.4 22.4 12.4 mm 17.8 mm 32.2 34.8 KQ2H06-M5 KQ2L06-M5 Comparison when One-touch fittings (KQ2H06-M5 / KQ2L06-M5) are connected to the piping

Angle Seat Valve

VXB215C F(H).

Angle Seat Valve /

VXB215C F(H).

Shock Absorbers and Rate Controls

4 f f i .

/

6 to 12 Applications B B 8 x 18 8 x 18 F F S S Conduit terminal: T (V) (U) E 25 32 G1/2 R T B 8 x 18 F S (mm) Electrical entry Grommet Model Applicable flange Conduit DIN terminal Conduit terminal U 103.5 106 106 B C D A E F H N Q R S N.C.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

N 0.5MPa 0.5MPa 40 40 0.4MPa 0.4MPa F 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 0 0 10 10 20 20 30 30 40 40 Gripping point L mm Gripping point L mm MHS2-25D MHS2-25D 100 100 F Internal gripping Pressure 0.6MPa Pressure 0.6MPa 80 80 Gripping force N Gripping force N 0.5MPa 0.5MPa 60 60 Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi 0.4MPa 0.4MPa 40 40 0.3MPa 0.3MPa 0.2MPa 0.2MPa 20 20 0 0 10 10

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

AS-FPQ/AS-FPG

)) Flow rate (L/min (ANR)) 10,12 08 06 Number of needle rotations Number of needle rotations 712 AS-FPQ/FPG Series Clean Speed Controller with One-touch Fitting Elbow Type Construction Meter-out type M5 type AS-F o !

AS-FPQ/AS-FPG

)) Flow rate (L/min (ANR)) 10,12 08 06 Number of needle rotations Number of needle rotations 712 AS-FPQ/FPG Series Clean Speed Controller with One-touch Fitting Elbow Type Construction Meter-out type M5 type AS-F o !

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3 33.3 8.8 22.8 19 3.5 4 Note) Through-hole mounting is not possible for 10. 925 Standard Type / Series MHZ2 Finger Option 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment

PSxx-OMU0005CN

1]OUT1[F 2]OUT2// -26No.PS-OMU0005CN-C <> () ,() 13[SEt] [SEt]()[P_1][n_1]() () ()( 62) ( )(62 ) 2 (2OUT2) 1 2 2 3(32)OFF ([SEt]) 4OUT2OUT2[P_2][n_2] -27No.PS-OMU0005CN-C 27 P1L()P1H()WH1() dt1() (n1L n1H) 34 OUT2 -28No.PS-OMU0005CN-C , 35[F 0] [F] 2 3 5 F0 F1 F99 ()[-] [F 0] 31 ""M ISE20B MPa ZSE20B(F) kPa P ISE20B psi ZSE20B(F) [F 1] OUT1 32 OFF ONOFF ISE20B 0.500 MPa ZSE20B

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators S ZZ SS 20 10 9 2 x 4.3 through Z 2 x 8 counterbore depth 4.4 18 5 30 1 M6 x 1.0 x 5 L (Hexagon socket set screw) 450.2 450.2 48 56 25 58 6.3 5 2 x M4 x 0.7 thread depth 6 1 M4 x 0.7 x 14.5 L and M4 x 0.7 (Hexagon bolt) (Hexagon nut) 9 M5 x 0.8 x 10 L (Hexagon socket head cap screw) 2 x M5 x 0.8 (Through-hole) (Z) 2 x M5 x 0.8 thread depth

MHL2

F = one finger thrust.

Compact Cylinder

x 0.8 B Nil Rc G NPT L F G D 50 63 F N Piping Mounting brackets are included, (but not assembled).

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting

Electric Actuator

Rubber back of the belt is softened and sticky. f . Crack on the back of the belt 13.

VK300

Port size (A port) Option M5 M5 x 0.8 01 1 8 Nil None With bracket (Not assembled) P, R port: M5 Note1) AC-type models that are CE-compliant have DIN terminals only. Note2) For other rated voltages, please consult with SMC. F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

LUBRICATOR

AL-OMQ0006-C PRODUCT NAME LUBRICATOR MODEL / Series / Product Number AL10-M5(-2,3,6,R,Z)-A AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-A AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)06(B)(-2,3,6,8,R,3W,Z)-A AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,3W,Z)-A AL60-(F,N)10(B)(-2,3,6,8,R,3W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3.

Rotary Table/

x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25