) (66) 47.6 (5.5) (49.5) (42.5) 31.5 [38.5] 24.5 + 16.1 (P port) 1/4 2 18 0.9 (23.9) EA P EB For manifold gasket positioning 22.2 die-cast hole (EA, EB port) 1/8 36 L plug connector (L): M plug connector (M): DIN terminal (D): M8 connector (W0): 3 4 5 3 4 5 3 4 5 3 4 5 SY7 20-L(-F2) C8, N9 C10, N11 SY7 20-D(-F2) C8, N9 C10, N11 SY7 20-W0(-F2) C8, N9 C10, N11 SY7 20-M(-F2) C8, N9 C10, N11
VCC13-02(F) 45.9 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 16.5 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 6 22 22 58 6 25 25 50 15 15 G1/4, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 12 Valve for Water and Chemical Base Fluids
01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.
. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!
(B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (
Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High
M-5HL-6 P. 92 M-01AN-6 P. 90 6/4 6/4 P. 93 Plug To plug unused M5 port. Barb fitting M-01AU-4 Hose elbow(H) M-5HLH-4 4/2.5 4/2.5 M-5P For soft nylon and polyurethane tube. 1 8 R(PT) P. 93 Gasket M-01AU-6 P. 90 M-5HLH-6 P. 92 6/4 6/4 To seal M5 thread. M-5G1 Hose nipple M-01H-4 Elbow P. 93 4/2.5 For nylon, soft nylon and polyurethane tube.
4 !3 y @0 !9 r t !8 @2 @4 !1 @3 A A Component Parts Enlarged view of A Description No.
(See Figure 4-1,Figure 4 1,Figure 4-2) 2) Refer to 6. Maintenance parts (4) Micro switch for Differential pressure indication switch for Refer to 6. Maintenance parts (4) Micro switch for Differential pressure indication switch for Refer to 6. Maintenance parts (4) Micro switch for Differential pressure indication switch for Refer to 6.
) Composed effective area So (mm2) 100 RHC = 0.7 38 47 0.5 56.5 MK(2) 0.1 0.3 10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500 24.5 = 0.7 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4 3/4 3/4 3/4 1000 1500 2000 2500 3000 500 1000 1500
6 25 117 (125) 3 50 62 15 7 10 3 12 5.5 8 3.5 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 4 6 28 127 (135) 3 57 70 15 7 10 3 12 5.5 10 3.5 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 (162) 4 6.6 28 128 (136) 3 60 74 16 8 10 3 12 6 14 4 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 4 6.6 33 142 (151) 3 68 84 16.5 8.5 10 4 12 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ H e f h ZZ 35 182 (190)
ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.
ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer
10 1.0 12 1.2 15 1.5 (2) Vacuum (V) port, Supply (P) port Symbol Standard Vacuum (V) port Supply (P) port C6 Metric 6 Plug C8 8 N7 Inch 1/4 N9 5/16 C6U Metric 6 6 Note 4) C8U 8 N7U Inch 1/4 1/4 Note 4) N9U 5/16 Note 4) When selecting Plug for individual supply for options (8) or increasing the flow rate of supply air, select Supply (P) port. -9No.
13 30 No code IS 1) 2400 psig (16.5MPa) for connection size 3/4 inch. 4) Indication of opened/closed status.
1 0 6 236 (28) (74) (60) (20) (12+0 070) (27) 1 5 5 (16 oo31) (18 + 0 070) r 10 3ff1" 1 0 2 M22x l 5 0 8 9 , 4 2 2 A O 0 7 1 + 0 0 0 3 80mm t-08 3 5 8 1 4 6 (26) (28 o:3') (91) (36) (71) 225\ (37) | , A 0 0 0 3 9 ' ' ' 0 0 r 2 M26x1 5 0 9 6 1 1 0 I 79 + 0.0033 1 5 7 4 1 3 1 4 6 3 2 7 t-10 (28) (30 T31) (105) (37) (40) (83) e0 +o oa4) Millimeters in Parentheses DOUBLE CLEVIS BORE PAFT# Al
Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-
Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.
KJS04-M5 KJS06-M5 KJL04-M5 KJL06-M5 M-5P 1 station 2 stations ZX Without fitting (M5 x 0.8) 4 (Straight) 6 (Straight) 4 (Elbow) 6 (Elbow) With plug ... ... ZR 08 8 stations ZM ZMA Left common air pressure supply (P) port (viewed from the vacuum (V) port side) ZQ Maximum Simultaneous Opreating Stations Symbol 0 2 3 5 6 P Applicable tubing O.D. Part no.
10.4 13.4 13.2 4 1 4 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5 18.0 26.1 15.2 6 5 16 1 4 1 4 3 8 17.46 17 22.23 29.5 36.3 17.9 7 3 8 22 21 Connection thread